公开(公告)号：US20160129586A1

公开(公告)日：2016-05-12

申请号：US14937676

申请日：2015-11-10

Applicant: Brooks Automation, Inc.

Inventor： Jairo T. MOURA ,  Aaron GAWLIK ,  Reza SAEIDPOURAZAR

IPC: B25J9/00 ,  B25J11/00 ,  H01L21/67 ,  H01L21/687

CPC classification number: H01L21/67742 ,  H01L21/67265 ,  H01L21/67294 ,  H01L21/67766 ,  H01L21/67778 ,  H01L21/68 ,  H01L21/68707

Abstract: A substrate transport apparatus auto-teach system for auto-teaching a substrate station location, the system including a frame, a substrate transport connected to the frame, the substrate transport having an end effector configured to support a substrate, and a controller configured to move the substrate transport so that the substrate transport biases the substrate supported on the end effector against a substrate station feature causing a change in eccentricity between the substrate and the end effector, determine the change in eccentricity, and determine the substrate station location based on at least the change in eccentricity between the substrate and the end effector.

Abstract translation: 一种用于自动教导衬底站位置的衬底传送装置自动教学系统，所述系统包括框架，连接到框架的衬底传送器，具有构造成支撑衬底的端部执行器的衬底传送器以及被配置为移动 衬底传输，使得衬底传输使支撑在端部执行器上的衬底相对于衬底台特征偏置，导致衬底和端部执行器之间的偏心度的变化，确定偏心率的变化，并且至少基于至少 底物与末端执行器之间偏心度的变化。

公开(公告)号：US20190371641A1

公开(公告)日：2019-12-05

申请号：US16539819

申请日：2019-08-13

Applicant: Brooks Automation, Inc.

Inventor： Jairo T. MOURA ,  Aaron GAWLIK ,  Reza SAEIDPOURAZAR

IPC: H01L21/677 ,  H01L21/687 ,  H01L21/68 ,  H01L21/67

Abstract: A substrate transport apparatus auto-teach system for auto-teaching a substrate station location, the system including a frame, a substrate transport connected to the frame, the substrate transport having an end effector configured to support a substrate, and a controller configured to move the substrate transport so that the substrate transport biases the substrate supported on the end effector against a substrate station feature causing a change in eccentricity between the substrate and the end effector, determine the change in eccentricity, and determine the substrate station location based on at least the change in eccentricity between the substrate and the end effector.

公开(公告)号：US20160164382A1

公开(公告)日：2016-06-09

申请号：US14540058

申请日：2014-11-13

Applicant: BROOKS AUTOMATION, INC.

Inventor： Jairo T. MOURA ,  Reza SAEIDPOURAZAR ,  Branden Gunn ,  Matthew W. Coady ,  Ulysses Gilchrist

IPC: H02K11/215 ,  H01L21/687 ,  H02K1/14 ,  H01L21/677 ,  H02K5/128 ,  H02K1/24

Abstract: A transport apparatus including a housing, a drive mounted to the housing, and at least one transport arm connected to the drive, where the drive includes at least one rotor having at least one salient pole of magnetic permeable material and disposed in an isolated environment, at least one stator having at least one salient pole with corresponding coil units and disposed outside the isolated environment where the at least one salient pole of the at least one stator and the at least one salient pole of the rotor form a closed magnetic flux circuit between the at least one rotor and the at least one stator, at least one seal partition configured to isolate the isolated environment, and at least one sensor including a magnetic sensor member connected to the housing, at least one sensor track connected to the at least one rotor where the at least one seal partition is disposed between and separates the magnetic sensor member and the at least one sensor track so that the at least one sensor track is disposed in the isolated environment and the magnetic sensor member is disposed outside the isolated environment.

Abstract translation: 一种运输装置，包括壳体，安装到壳体的驱动器和连接到驱动器的至少一个输送臂，其中驱动器包括至少一个转子，该转子具有至少一个磁性可渗透材料的凸极并且设置在隔离环境中， 至少一个定子具有至少一个具有对应的线圈单元的凸极并且设置在所述隔离环境的外部，其中所述至少一个定子的至少一个凸极和所述转子的所述至少一个凸极形成闭合磁通电路， 所述至少一个转子和所述至少一个定子，被配置为隔离所述隔离环境的至少一个密封分隔件，以及包括连接到所述壳体的磁性传感器构件的至少一个传感器，连接到所述至少一个的至少一个传感器轨道 转子，其中所述至少一个密封分隔件设置在所述磁性传感器构件和所述至少一个传感器轨道之间，并且使所述至少一个感测体 r轨道设置在隔离环境中，并且磁传感器构件设置在隔离环境的外部。

公开(公告)号：US20190027389A1

公开(公告)日：2019-01-24

申请号：US16011978

申请日：2018-06-19

Applicant: Brooks Automation, Inc.

Inventor： Jairo T. MOURA ,  Aaron GAWLIK ,  Reza SAEIDPOURAZAR

IPC: H01L21/677 ,  H01L21/687 ,  H01L21/68 ,  H01L21/67

CPC classification number: H01L21/67742 ,  H01L21/67265 ,  H01L21/67294 ,  H01L21/67766 ,  H01L21/67778 ,  H01L21/68 ,  H01L21/68707

Abstract: A substrate transport apparatus auto-teach system for auto-teaching a substrate station location, the system including a frame, a substrate transport connected to the frame, the substrate transport having an end effector configured to support a substrate, and a controller configured to move the substrate transport so that the substrate transport biases the substrate supported on the end effector against a substrate station feature causing a change in eccentricity between the substrate and the end effector, determine the change in eccentricity, and determine the substrate station location based on at least the change in eccentricity between the substrate and the end effector.