公开(公告)号：US11270904B2

公开(公告)日：2022-03-08

申请号：US15634871

申请日：2017-06-27

Applicant: BROOKS AUTOMATION, INC.

Inventor： Vincent W. Tsang ,  Charles W. Su

IPC: H01L21/67 ,  H01L21/687 ,  H01L21/677 ,  B25J9/10 ,  B25J9/04 ,  B25J9/16

Abstract: A substrate processing apparatus including a frame, a first SCARA arm having an end effector and being configured to extend and retract along a first axis, a second SCARA arm having an end effector and being configured to extend and retract along a second axis, a drive section including a splitting drive pulley rotatably mounted to rotate at an axis of rotation of the drive section that is shared by the first and second SCARA arms, the splitting drive pulley being coupled to at least two idler pulleys by respective segmented transmission loops of separate band segments so that the splitting drive pulley is a common pulley splitting one degree of freedom of the drive section between the at least two idler pulleys so as to commonly drive the at least two idler pulleys, wherein at least one band of each respective transmission loop share a common band interface level.

公开(公告)号：US11235935B2

公开(公告)日：2022-02-01

申请号：US17156007

申请日：2021-01-22

Applicant: Brooks Automation, Inc.

Inventor： Daniel Babbs ,  Vincent W. Tsang ,  Robert C. May

IPC: H01L21/687 ,  B65G47/90 ,  H01L21/67

Abstract: A substrate transport apparatus comprising a frame, a drive section connected to the frame, and an articulated arm having at least one articulated arm link operably connected to the drive section so that the articulated arm rotates about a pivot axis relative to the frame and extends and retracts relative to the pivot axis. The articulated arm has an end effector pivotally mounted to at least one articulated arm link forming a joint between the end effector and the articulated arm link, with an arm joint pivot axis disposed so that the end effector rotates relative to at least one articulated arm link about the arm joint pivot axis. The articulated arm has a drive band transmission with drive and driven pulleys where the driven pulley is connected to the articulated wrist.

公开(公告)号：US11251059B2

公开(公告)日：2022-02-15

申请号：US16872864

申请日：2020-05-12

Applicant: Brooks Automation, Inc.

Inventor： Jairo T. Moura ,  Robert T. Caveney ,  Bing Yin ,  Nathan Spiker ,  Vincent W. Tsang

IPC: H01L21/677 ,  H01L21/68 ,  B25J9/00 ,  B25J11/00 ,  B25J9/10 ,  H01L21/67 ,  B25J9/12 ,  B25J9/16 ,  G05B19/418

Abstract: A substrate transport empiric arm droop mapping apparatus for a substrate transport system of a processing tool, the mapping apparatus including a frame, an interface disposed on the frame forming datum features representative of a substrate transport space in the processing tool defined by the substrate transport system, a substrate transport arm, that is articulated and has a substrate holder, mounted to the frame in a predetermined relation to at least one of the datum features, and a registration system disposed with respect to the substrate transport arm and at least one datum feature so that the registration system registers, in an arm droop distance register, empiric arm droop distance, due to arm droop changes, between a first arm position and a second arm position different than the first arm position and in which the substrate holder is moved in the transport space along at least one axis of motion.

公开(公告)号：US11192239B2

公开(公告)日：2021-12-07

申请号：US16592431

申请日：2019-10-03

Applicant: Brooks Automation, Inc.

Inventor： Vincent W. Tsang ,  Robert T. Caveney

IPC: B25J9/00 ,  B65G47/90 ,  H01L21/687

Abstract: A substrate processing apparatus including a frame, a SCARA arm mounted to the frame at a shoulder joint having two links with at least one end effector dependent therefrom, the links defining an upper arm and a forearm, each end effector pivotally joined to the forearm at a wrist to rotate about a wrist axis, and a drive section with at least one degree of freedom operably coupled to the arm to rotate the arm about a shoulder axis articulating extension and retraction, wherein the end effector is coupled to a wrist joint pulley so that extension and retraction effects rotation of the pulley and end effector as a unit about the wrist axis, and wherein a height of the end effector is within a stack height profile of the wrist joint so that a total stack height is sized to conform with and pass through a pass-through of a slot valve.

公开(公告)号：US11972965B2

公开(公告)日：2024-04-30

申请号：US17651183

申请日：2022-02-15

Applicant: Brooks Automation, Inc.

Inventor： Jairo T. Moura ,  Robert T. Caveney ,  Bing Yin ,  Nathan Spiker ,  Vincent W. Tsang

IPC: H01L21/677 ,  B25J9/00 ,  B25J9/10 ,  B25J9/12 ,  B25J9/16 ,  B25J11/00 ,  G05B19/418 ,  H01L21/67 ,  H01L21/68

CPC classification number: H01L21/67742 ,  B25J9/0027 ,  B25J9/107 ,  B25J9/126 ,  B25J9/1605 ,  B25J11/0095 ,  G05B19/4189 ,  H01L21/67161 ,  H01L21/67196 ,  H01L21/681

Abstract: A substrate transport empiric arm droop mapping apparatus for a substrate transport system of a processing tool, the mapping apparatus including a frame, an interface disposed on the frame forming datum features representative of a substrate transport space in the processing tool defined by the substrate transport system, a substrate transport arm, that is articulated and has a substrate holder, mounted to the frame in a predetermined relation to at least one of the datum features, and a registration system disposed with respect to the substrate transport arm and at least one datum feature so that the registration system registers, in an arm droop distance register, empiric arm droop distance, due to arm droop changes, between a first arm position and a second arm position different than the first arm position and in which the substrate holder is moved in the transport space along at least one axis of motion.

公开(公告)号：US10651067B2

公开(公告)日：2020-05-12

申请号：US15880387

申请日：2018-01-25

Applicant: Brooks Automation, Inc.

Inventor： Jairo T. Moura ,  Robert T. Caveney ,  Bing Yin ,  Nathan Spiker ,  Vincent W. Tsang

IPC: H01L21/677 ,  H01L21/68 ,  B25J9/00 ,  B25J11/00 ,  B25J9/10 ,  H01L21/67 ,  B25J9/12 ,  B25J9/16 ,  G05B19/418

Abstract: A substrate transport empiric arm droop mapping apparatus for a substrate transport system of a processing tool, the mapping apparatus including a frame, an interface disposed on the frame forming datum features representative of a substrate transport space in the processing tool defined by the substrate transport system, a substrate transport arm, that is articulated and has a substrate holder, mounted to the frame in a predetermined relation to at least one of the datum features, and a registration system disposed with respect to the substrate transport arm and at least one datum feature so that the registration system registers, in an arm droop distance register, empiric arm droop distance, due to arm droop changes, between a first arm position and a second arm position different than the first arm position and in which the substrate holder is moved in the transport space along at least one axis of motion.

公开(公告)号：US20220161418A1

公开(公告)日：2022-05-26

申请号：US17544815

申请日：2021-12-07

Applicant: Brooks Automation, Inc.

Inventor： Vincent W. Tsang ,  Robert T. Caveney

IPC: B25J9/00 ,  B65G47/90 ,  H01L21/687

Abstract: A substrate processing apparatus including a frame, a SCARA arm mounted to the frame at a shoulder joint having two links with at least one end effector dependent therefrom, the links defining an upper arm and a forearm, each end effector pivotally joined to the forearm at a wrist to rotate about a wrist axis, and a drive section with at least one degree of freedom operably coupled to the arm to rotate the arm about a shoulder axis articulating extension and retraction, wherein the end effector is coupled to a wrist joint pulley so that extension and retraction effects rotation of the pulley and end effector as a unit about the wrist axis, and wherein a height of the end effector is within a stack height profile of the wrist joint so that a total stack height is sized to conform with and pass through a pass-through of a slot valve.