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公开(公告)号：US07305883B2
公开(公告)日：2007-12-11
申请号：US11543550
申请日：2006-10-04
IPC分类号： G01N29/036
CPC分类号： G01N27/221 , G01N1/26 , G01N2001/022 , G01N2291/02863 , G01N2291/0427
摘要： The present invention provides sensors based on micromachined ultrasonic transducer technology. The sensors preferably include a plurality of sensor elements, but may include only one sensor element. Arrays of sensors are also provided. Sensor elements include a functionalized membrane supported over a substrate by a support frame. The functionalized membrane, support frame and substrate together form a vacuum gap. The sensor element is connected to an electrical circuit, which is configured to operate the sensor element at or near an open circuit resonance condition. The mechanical resonance frequency of the functionalized membrane is responsive to binding of an agent to the membrane. Thus, the sensor element also includes a detector, where the detector provides a sensor output responsive to the mechanical resonance frequency of the sensor element.
摘要翻译： 本发明提供了基于微加工超声换能器技术的传感器。 传感器优选地包括多个传感器元件，但是可以仅包括一个传感器元件。 还提供了传感器阵列。 传感器元件包括通过支撑框架支撑在衬底上的功能化膜。 功能化膜，支撑框架和基板一起形成真空间隙。 传感器元件连接到电路，该电路构造成在开路谐振状态或接近开路谐振条件下操作传感器元件。 功能化膜的机械共振频率响应于试剂与膜的结合。 因此，传感器元件还包括检测器，其中检测器响应于传感器元件的机械共振频率提供传感器输出。
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公开(公告)号：US5629724A
公开(公告)日：1997-05-13
申请号：US890995
申请日：1992-05-29
CPC分类号： B41J2/14008 , B41J2002/14322
摘要： Techniques for obtaining an ejection rate independent, spatial relationship between an acoustic focal area and the free surface of a liquid. Variations in the spatial relationship are reduced or eliminated by applying substantially the same acoustic energy to the liquid's free surface during periods when droplets are not ejected as when they are, but at power levels insufficient to eject a droplet. During ejection periods in which a droplet is not ejected, the acoustic energy is applied at a lower level, but for a longer time. Because it is more convenient to measure and control, the transducer drive voltage is used to control the acoustic energy applied to the liquid's free surface.
摘要翻译： 用于获得喷射速率独立的声学焦点区域和液体的自由表面之间的空间关系的技术。 在液滴不喷射的时段期间，通过对液体的自由表面施加基本上相同的声能，而在功率水平不足以喷射液滴的时期，空间关系的变化被减少或消除。 在不喷射液滴的喷射期间，声能被施加在较低的水平上，但持续较长的时间。 因为测量和控制更方便，因此传感器驱动电压用于控制施加到液体自由表面的声能。
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公开(公告)号：US5194880A
公开(公告)日：1993-03-16
申请号：US632260
申请日：1990-12-21
IPC分类号： B41J2/065
CPC分类号： B41J2/065
摘要： An ejector for ejecting droplets from an ink-filled reservoir is disclosed. The ejector comprises a substrate with a generally planar surface. The substrate is submerged in the reservoir so that the substrate surface is parallel to the reservoir surface at a shallow predetermined depth. On the substrate surface around a center is a plurality of concentric, circular electrodes. A coupled oscillator excites the electrodes in a temporal relationship such that the capillary waves generated at the ink reservoir surface are reinforced so that droplets may be ejected from the reservoir at the center of the electrodes.
摘要翻译： 公开了一种用于从填充墨水的储存器喷射液滴的喷射器。 喷射器包括具有大致平坦表面的基板。 将基板浸没在储存器中，使得基板表面在浅预定深度处平行于储存器表面。 在中心周围的基板表面上是多个同心圆形电极。 耦合振荡器以时间关系激发电极，使得在墨水储存器表面处产生的毛细管波被加强，使得液滴可以从电极中心处的储存器喷出。
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公开(公告)号：US4719476A
公开(公告)日：1988-01-12
申请号：US853252
申请日：1986-04-17
CPC分类号： B41J2/065 , G10K11/36 , B41J2002/14322
摘要： Provision is made for selectively addressing inividual crests of traveling or standing capillary surface waves to eject droplets from the selected crests on command. To that end, the addressing mechanism of this invention locally increase the surface pressure acting on the selected crests and/or locally reduce the surface tension of the liquid within the selected crests. The preferred addressing mechanisms have sufficient spatial resolution to address a single crest substantially independently of its neighbors.Discrete addressing mechanisms having a plurality of individual addressing elements are especially attractive for liquid ink printing and similar applications, not only because their individual addressing elements may be spatially fixed, but also because the spatial frequency of their addressing elements may be matched to the spatial frequency of the capillary wave. Such frequency matching enables selected crests of the capillary wave to be addressed in parallel, such as for line printing. Preferably, the capillary wave for a printer is a spatially stabilized standing wave, so that the crests and troughs of the capillary wave are locked in predetermined spatial locations.
摘要翻译： 提供了选择性地寻址行进或站立的毛细管表面波的单个波峰，以便根据命令从所选择的波峰喷射液滴。 为此，本发明的寻址机构局部地增加作用在所选择的顶部上的表面压力和/或局部地降低所选择的顶部内液体的表面张力。 优选的寻址机制具有足够的空间分辨率以基本上独立于其邻居来解决单个波峰。 具有多个独立寻址元件的离散寻址机制对于液体油墨印刷和类似应用是特别有吸引力的，不仅因为它们的各自的寻址元件可以在空间上固定，而且由于它们的寻址元件的空间频率可以与空间频率相匹配 的毛细血管。 这种频率匹配使得能够平行地寻址毛细波的选定波峰，例如用于线印刷。 优选地，用于打印机的毛细管波是空间稳定的驻波，使得毛细波的波峰和波谷被锁定在预定的空间位置。
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公开(公告)号：US5686945A
公开(公告)日：1997-11-11
申请号：US337913
申请日：1994-11-14
CPC分类号： B41J2/14008 , B41J2002/14483
摘要： Acoustically thin capping structures and acoustic droplet ejectors having fluid wells and which use such capping structures to create fluid cells. The inventive capping structures permit the accurate positioning of the free surface of a fluid, permit acoustically induced fluid droplet ejection, and prevent fluid from spilling from the fluid wells. "Acoustically thin" means that the thickness of the capping structure is small enough that the acoustic energy that is lost passing through the capping structure is less than 50% of the incident acoustic energy.
摘要翻译： 声学薄封盖结构和具有流体孔的声学液滴喷射器，并且使用这种封盖结构来产生流体池。 本发明的封盖结构允许流体的自由表面的精确定位，允许声学诱导的液滴喷射，并且防止流体从流体孔溢出。 “声学上薄”意味着封盖结构的厚度足够小，使得通过封盖结构失去的声能小于入射声能的50％。
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6.发明授权Liquid surface control with an applied pressure signal in acoustic ink printing 失效液压表面控制与应用压力信号在声学印刷中的应用
公开(公告)号：US5229793A
公开(公告)日：1993-07-20
申请号：US634248
申请日：1990-12-26
CPC分类号： B41J2/14008 , B41J2002/14322
摘要： This invention is an acoustic ink printer. It has a pool of ink (33) with a free surface (36). Underneath the ink is a print head (10) which has droplet ejectors (14) for irradiating the free surface (36) of the pool of ink (33) with focused acoustic radiation (44). Over the free surface (36) of the pool of ink (33) is a membrane (16), with one or more apertures (20) aligned with the droplet ejectors (14), in intimate contact with the free surface (36) of the pool of ink (33). The apertures 20 are substantially larger than the waist diameter (46) of the focused acoustic radiation (44). An external pressure source (50) maintains the meniscus (48) of the pool of ink (33) substantially in the focal plane (52) of the focused acoustic radiation (44) during operation of the droplet ejectors (14). A piezoelectric crystal (24) is in intimate contact with the pool of ink (33). An electrical signal source (32) energizes the piezoelectric crystal (24) in order to apply a pressure signal (54) on demand to the pool of ink (33) during operation of the droplet ejectors (14). The different pressure signals (54) resulting from application of different electrical signals (29) to the piezoelectric crystal (24) can be utilized to eject individual droplets (38) of ink (33) from the free surface (34) of the ink (33) on demand, or to effect finer control over the free surface (34) of the ink (33) than is possible with the external pressure source (50) by itself.
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公开(公告)号：US4751529A
公开(公告)日：1988-06-14
申请号：US944490
申请日：1986-12-19
CPC分类号： B41J2/14008 , B41J2002/14322
摘要： A printhead for an acoustic printer comprises one or more acoustic microlenses, each of which brings an acoustic beam to focus approximately at the free surface of a pool of ink for ejecting individual droplets of ink from the pool on demand. As used herein, an "acoustic microlens" is defined as being an acoustic lens having an aperture diameter which is less than an order of magnitude greater than the wavelength of the incident acoustic wave (i.e., the acoustic wave which illuminates the lens).
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公开(公告)号：US4749900A
公开(公告)日：1988-06-07
申请号：US931602
申请日：1986-11-17
IPC分类号： B06B1/06 , H01L41/083 , H01L41/24 , H01L41/08
CPC分类号： H01L41/083 , B06B1/0611 , H01L41/187 , H01L41/316 , Y10T29/42
摘要： The invention relates to a multi-layered piezoelectric acoustic transducer for generating layers of the same piezoelectric material are provided such tool alternate layers have different crystallographic orientations and different piezoelectric coupling coefficients. The layers may be provided so that alternate layers have crystallographic orientations which provide maximum electro-acoustic coupling and layers which provide minimum electro-acoustic coupling.
摘要翻译： 本发明涉及一种用于产生相同压电材料层的多层压电声换能器，这样的工具交替层具有不同的晶体取向和不同的压电耦合系数。 可以提供这些层，使得交替层具有提供最大电声耦合的晶体取向和提供最小电声耦合的层。
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公开(公告)号：US4697195A
公开(公告)日：1987-09-29
申请号：US946682
申请日：1987-01-05
CPC分类号： B41J2/14008 , B41J2002/14322 , Y10S310/80
摘要： A nozzleless print head for ink jet printing and the like comprises one or more essentially planar surface acoustic wave transducers which are submerged at a predetermined depth in a liquid filled reservoir, so that each of the transducers launches a converging cone of coherent acoustic waves into the reservoir, thereby producing an acoustic beam which comes to a focus at or near the surface of the reservoir (i.e., the liquid/air interface). The acoustic beam may be intensity modulated to control the ejection timing, or an external source may be used to extract droplets from the acoustically excited liquid on the surface of the reservoir on demand. Regardless of the timing mechanism employed, the size of the ejected droplets is determined by the waist diameter of the focused acoustic beam. To control, the direction in which the droplets are ejected, provision may be made for producing a controllable acoustical asymmetry for steering the focused acoustic beam in a direction generally parallel to the surface of the reservoir.
摘要翻译： 用于喷墨打印等的无喷嘴打印头包括一个或多个基本上平面的表面声波换能器，其在液体填充的储存器中浸没在预定深度处，使得每个换能器将相干声波的会聚锥发射到 从而产生在储存器表面（即，液体/空气界面）处或其附近聚焦的声束。 声束可以被强度调制以控制喷射定时，或者可以使用外部源来根据需要从储层表面上的声吸收液体中提取液滴。 不管所采用的定时机制如何，喷射的液滴的尺寸由聚焦声束的腰部直径决定。 为了控制喷射液滴的方向，可以提供用于产生可控的声学不对称性，以便在大致平行于储存器的表面的方向上转向聚焦的声束。
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公开(公告)号：US5319977A
公开(公告)日：1994-06-14
申请号：US718234
申请日：1991-06-20
IPC分类号： G01B17/00 , G01N29/06 , G01N29/24 , G01N37/00 , G01Q10/00 , G01Q20/00 , G01Q60/04 , G01Q60/06 , G01Q60/22 , G01S15/89 , G01N29/08
CPC分类号： G01N29/0681 , G01H3/125 , G01Q60/32 , G01S15/8945 , G01N2291/02827 , G01N2291/048 , Y10S977/86
摘要： An acoustic microscope assembly for atomic level inspection of a target object includes a cantilever arm with a sharp tip on its lower surface and a zinc oxide piezoelectric thin film on its upper surface. High frequency excitation signals, having a frequency of at least 50 Megahertz, are applied to the piezoelectric thin film so as to generate high frequency acoustic signals that are transmitted through the sharp tip so as to impact on a target object. The assembly can either receive acoustic signals reflected by the target object, or it can receive acoustic signals that have propagated through the target object. One method of using this assembly is to apply a continuous wave signal to the piezoelectric thin film while scanning the target object, and measuring characteristics of the target object at various positions thereof by measuring the resonant frequency of the transmitted high frequency acoustic signals. Other methods include pulsed operation, and combining acoustic measurements with atomic force measurements and/or tunneling current measurements to characterize a target object. The acoustic microscope assembly can also be used for storing information on a substrate, by deforming the substrate at selected positions, and for reading such stored information by determining which positions on a substrate have been deformed.
摘要翻译： 用于目标物体的原子级检查的声学显微镜组件包括在其下表面具有尖锐尖端的悬臂和在其上表面上的氧化锌压电薄膜。 将具有至少50兆赫兹频率的高频激励信号施加到压电薄膜上，以便产生通过尖尖传输以便对目标物体产生影响的高频声信号。 组件可以接收由目标对象反射的声信号，或者它可以接收已传播通过目标对象的声信号。 使用该组件的一种方法是在扫描目标物体的同时向压电薄膜施加连续波信号，并且通过测量发射的高频声信号的谐振频率来测量其各个位置处的目标物体的特性。 其他方法包括脉冲操作，以及将声学测量与原子力测量和/或隧道电流测量结合以表征目标对象。 声学显微镜组件还可以用于在基板上存储信息，通过使基板在选定位置变形，并且通过确定基板上的哪些位置已经变形来读取这些存储的信息。
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