公开(公告)号：US20130250099A1

公开(公告)日：2013-09-26

申请号：US13795998

申请日：2013-03-12

Applicant: CANON KABUSHIKI KAISHA

Inventor： Hitoshi Iijima ,  Atsushi Maeda

IPC: G01B11/24

CPC classification number: G01B11/2441 ,  G01B9/02027 ,  G01B9/02039 ,  G01B9/02088 ,  G01B9/0209 ,  G01B2290/70 ,  G01J2009/002 ,  G01J2009/0203 ,  G01M11/025 ,  G01M11/0271 ,  Y10T29/49826

Abstract: To eliminate influence of undesirable light component from an object when measuring optical characteristics such as shape and wavefront aberration of the object, light from light source (101) is separated by polarization beam splitter (103) into measuring light (L1) that irradiates and travels via the object (108) and is condensed on image plane (P) through microlenses (114a) of microlens array (114), and reference light (L2) that does not irradiate the object and is guided to the image plane by reference light optical system (109). A computer (113) acquires picked-up images sequentially from CCD image sensor (116) arranged on the image plane while changing optical path length of the reference light by movable stage (117), extracts interference light spots generated through interference between signal light component and the reference light from the picked-up images, calculates positions of the interference light spots, and calculates deviation amounts of positions from predetermined reference positions.

Abstract translation: 为了在测量物体的形状和波面象差等光学特性时，消除来自物体的不良光分量的影响，来自光源（101）的光被偏振分束器（103）分离成照射和行进的测量光（L1） 通过物体（108）通过微透镜阵列（114）的微透镜（114a）在像平面（P）上聚焦，并且通过参考光学光学被引导到图像平面的参考光（L2）不被照射到物体 系统（109）。 计算机（113）在通过移动台（117）改变参考光的光程长度的同时，从布置在图像平面上的CCD图像传感器（116）顺序地获取拾取图像，提取通过信号光分量 和来自拾取图像的参考光，计算干涉光斑的位置，并计算出与预定基准位置的偏移量。

公开(公告)号：US09091534B2

公开(公告)日：2015-07-28

申请号：US13795998

申请日：2013-03-12

Applicant: CANON KABUSHIKI KAISHA

Inventor： Hitoshi Iijima ,  Atsushi Maeda

IPC: H04N7/18 ,  A61B3/14 ,  G01B9/02 ,  G01B11/24 ,  G01M11/02 ,  G01J9/00 ,  G01J9/02

CPC classification number: G01B11/2441 ,  G01B9/02027 ,  G01B9/02039 ,  G01B9/02088 ,  G01B9/0209 ,  G01B2290/70 ,  G01J2009/002 ,  G01J2009/0203 ,  G01M11/025 ,  G01M11/0271 ,  Y10T29/49826

Abstract: To eliminate influence of undesirable light component from an object when measuring optical characteristics such as shape and wavefront aberration of the object, light from light source (101) is separated by polarization beam splitter (103) into measuring light (L1) that irradiates and travels via the object (108) and is condensed on image plane (P) through microlenses (114a) of microlens array (114), and reference light (L2) that does not irradiate the object and is guided to the image plane by reference light optical system (109). A computer (113) acquires picked-up images sequentially from CCD image sensor (116) arranged on the image plane while changing optical path length of the reference light by movable stage (117), extracts interference light spots generated through interference between signal light component and the reference light from the picked-up images, calculates positions of the interference light spots, and calculates deviation amounts of positions from predetermined reference positions.

Abstract translation: 为了在测量物体的形状和波面象差等光学特性时，消除来自物体的不良光分量的影响，来自光源（101）的光被偏振分束器（103）分离成照射和行进的测量光（L1） 通过物体（108）通过微透镜阵列（114）的微透镜（114a）在像平面（P）上聚焦，并且通过参考光学光学被引导到图像平面的参考光（L2）不被照射到物体 系统（109）。 计算机（113）在通过移动台（117）改变参考光的光程长度的同时，从布置在图像平面上的CCD图像传感器（116）顺序地获取拾取图像，提取通过信号光分量 和来自拾取图像的参考光，计算干涉光斑的位置，并计算出与预定基准位置的偏移量。