SURFACE SHAPE MEASUREMENT METHOD AND MEASUREMENT APPARATUS
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    发明申请
    SURFACE SHAPE MEASUREMENT METHOD AND MEASUREMENT APPARATUS 审中-公开
    表面形状测量方法和测量装置

    公开(公告)号:US20130235385A1

    公开(公告)日:2013-09-12

    申请号:US13762447

    申请日:2013-02-08

    发明人: Masaki NAKAJIMA

    IPC分类号: G01B11/24

    摘要: A method of measuring a surface shape of a target object by irradiating a target object and a reference surface with coherent light while changing a frequency of the coherent light includes: setting a rate of changing the frequency of the coherent light based on at least one of first information of a contour of an image of the target object projected onto a surface perpendicular to an optical axis of a measurement light and known second information of the surface shape; obtaining, by an image sensor, a plurality of images of interference fringes while changing the frequency of the coherent light with which the target object and the reference surface are irradiated at the set rate; and obtaining the surface shape based on the obtained plurality of images.

    摘要翻译: 通过在改变相干光的频率的同时照射目标物体和具有相干光的参考表面来测量目标物体的表面形状的方法包括:基于以下中的至少一个来设置改变相干光的频率的速率: 投射到与测量光的光轴垂直的表面上的目标物体的图像的轮廓的第一信息和已知的表面形状的第二信息; 通过图像传感器获得干涉条纹的多个图像,同时以设定速率改变目标对象和参考表面照射的相干光的频率; 并且基于获得的多个图像获得表面形状。