公开(公告)号：US20190174662A1

公开(公告)日：2019-06-06

申请号：US16258817

申请日：2019-01-28

Applicant: CKD Corporation

Inventor： Takahiro Ninomiya ,  Kensuke Takamura ,  Nobuyuki Umemura

IPC: H05K13/08 ,  H05K13/04 ,  H05K3/00 ,  G01N21/84 ,  H05K1/02

CPC classification number: H05K13/081 ,  G01N21/84 ,  H05K1/0269 ,  H05K3/0044 ,  H05K13/04 ,  H05K2201/09009 ,  H05K2201/09918

Abstract: A substrate position detection device includes: an irradiator that irradiates a predetermined range of a substrate with a predetermined light; an imager that takes an image of the predetermined range of the substrate irradiated with the predetermined light; a moving mechanism that causes a relative movement of the imager and the substrate; and a controller that: detects a position of the substrate by sequentially executing to a plurality of recognition objects on the substrate: a moving process of relatively moving the imager to a position corresponding to a predetermined recognition object among the plurality of recognition objects on the substrate; an imaging process of taking an image of the predetermined recognition object under a predetermined imaging condition; and a recognition process of recognizing the predetermined recognition object based on image data obtained by the imaging process.

公开(公告)号：US10743448B2

公开(公告)日：2020-08-11

申请号：US16258817

申请日：2019-01-28

Applicant: CKD Corporation

Inventor： Takahiro Ninomiya ,  Kensuke Takamura ,  Nobuyuki Umemura

IPC: H05K13/08 ,  H05K13/04 ,  G01N21/84 ,  H05K1/02 ,  H05K3/00

Abstract: A substrate position detection device includes: an irradiator that irradiates a predetermined range of a substrate with a predetermined light; an imager that takes an image of the predetermined range of the substrate irradiated with the predetermined light; a moving mechanism that causes a relative movement of the imager and the substrate; and a controller that: detects a position of the substrate by sequentially executing to a plurality of recognition objects on the substrate: a moving process of relatively moving the imager to a position corresponding to a predetermined recognition object among the plurality of recognition objects on the substrate; an imaging process of taking an image of the predetermined recognition object under a predetermined imaging condition; and a recognition process of recognizing the predetermined recognition object based on image data obtained by the imaging process.