公开(公告)号：US20240355598A1

公开(公告)日：2024-10-24

申请号：US18574792

申请日：2022-07-04

Applicant: COMET AG

Inventor： Thomas Fink ,  André Grede ,  Daniel Gruner ,  Anton Labanc ,  Roland Schlierf ,  Nikolai Schwerg ,  Manuel vor dem Brocke

IPC: H01J37/32

CPC classification number: H01J37/32926 ,  H01J37/32944

Abstract: A method for machine learning a detection of at least one irregularity in a plasma system, particularly an RF powered plasma processing system, including providing at least one input signal each related to an analog signal of a power delivery system for the plasma system and/or to another characteristic of the power delivery system and/or of the plasma system. The at least one input signal having at least one irregularity feature indicative of the irregularity in the plasma system, performing a machine learning procedure wherein the at least one input signal having the at least one irregularity feature is processed by a programmable circuit to train the detection of the irregularity in the plasma system.

公开(公告)号：US20220189739A1

公开(公告)日：2022-06-16

申请号：US17437446

申请日：2020-03-03

Applicant: COMET AG

Inventor： Thomas Fink ,  Kevin Häuser ,  Holger Maune ,  Daniel Kienemund ,  Joachim Binder ,  Rolf Jakoby ,  Nicole Bohn

IPC: H01J37/32 ,  H01G7/06 ,  H01G4/12 ,  C04B35/468 ,  C04B35/64

Abstract: A radio-frequency (RF) power variable capacitor capable of operating at, at least, 50 watts in the MHz range. The capacitor has a composite HDK-NDK ceramic dielectric. The HDK (high dielectric constant) component comprises an active matrix of barium strontium titanate, for example. Acoustic resonances are reduced or eliminated by the addition of a metal or metalloid oxide such as magnesium borate (NDK—low dielectric constant), which acts as an acoustic resonance reduction agent (ARRA) in the RF power domain. The acoustic resonances which previously occurred under bias voltage 500 V or 1100 V in prior art RF power variable capacitors are eliminated by the addition of the ARRA.

公开(公告)号：US11901160B2

公开(公告)日：2024-02-13

申请号：US17437446

申请日：2020-03-03

Applicant: COMET AG

Inventor： Thomas Fink ,  Kevin Häuser ,  Holger Maune ,  Daniel Kienemund ,  Joachim Binder ,  Rolf Jakoby ,  Nicole Bohn

IPC: H01J37/32 ,  C04B35/468 ,  H01G4/12 ,  C04B35/64 ,  H01G7/06

CPC classification number: H01J37/32183 ,  C04B35/468 ,  C04B35/64 ,  H01G4/1218 ,  H01G7/06

Abstract: A radio-frequency (RF) power variable capacitor capable of operating at, at least, 50 watts in the MHz range. The capacitor has a composite HDK-NDK ceramic dielectric. The HDK (high dielectric constant) component comprises an active matrix of barium strontium titanate, for example. Acoustic resonances are reduced or eliminated by the addition of a metal or metalloid oxide such as magnesium borate (NDK—low dielectric constant), which acts as an acoustic resonance reduction agent (ARRA) in the RF power domain. The acoustic resonances which previously occurred under bias voltage 500 V or 1100 V in prior art RF power variable capacitors are eliminated by the addition of the ARRA.

公开(公告)号：US20180233330A1

公开(公告)日：2018-08-16

申请号：US15509146

申请日：2014-09-04

Applicant: COMET AG

Inventor： Mike Abrecht ,  Thomas Fink ,  Walter Bigler

IPC: H01J37/32 ,  H01G7/06

CPC classification number: H01J37/32183 ,  H01G7/06 ,  H01J37/32082 ,  H01J37/32174 ,  H03H7/40

Abstract: A power capacitor (7) is described for use in an RF power delivery system. The power capacitor comprises at least two RF electrodes (18, 19) separated by a capacitor dielectric (17) comprising a solid paraelectric dielectric material whose relative permittivity is controllable by varying a DC bias voltage applied across the dielectric (17) at DC bias electrodes (10, 26, 28). Composite capacitor configurations, an RF power system and a method of controlling the power capacitor are also described.

公开(公告)号：US20200007047A1

公开(公告)日：2020-01-02

申请号：US16465415

申请日：2017-11-29

Applicant: COMET AG

Inventor： Thomas Fink ,  Ralf Negele

IPC: H02M3/335 ,  H01J37/32 ,  H02M1/42 ,  H02M3/158 ,  H02N2/06

Abstract: A variable voltage generator circuit is described for generating, from a substantially constant supply voltage VS, a variable high-voltage control voltage VC for a variable power capacitor (1) having a variable-permittivity dielectric. The control voltage generator circuit comprises a top-up circuit (10) for maintaining the voltage VCin on an input capacitor (12) at least at supply voltage VS, and a bidirectional DC-DC converter circuit (20) having a variable voltage conversion factor G controlled by control input signal (27). The bidirectional DC-DC converter (20) is arranged to convert voltage, at the voltage conversion factor G, between the input capacitor voltage VCin and the output voltage VC. When VC G×VCin, the DC-DC converter circuit (20) uses charge stored in the load capacitance (1) to charge the input capacitor (12).

公开(公告)号：US20240296270A1

公开(公告)日：2024-09-05

申请号：US18574831

申请日：2022-06-24

Applicant: COMET AG

Inventor： Nikolai Schwerg ,  Roland Schlierf ,  André Grede ,  Daniel Gruner ,  Anton Labanc ,  Thomas Fink ,  Manuel vor dem Brocke

IPC: G06F30/34 ,  G06F30/27 ,  G06F30/373

CPC classification number: G06F30/34 ,  G06F30/27 ,  G06F30/373

Abstract: A method for improving digital signal processing in a radio-frequency system, in particular a radio-frequency power delivery system, including providing at least one input signal, preferably related to a radio-frequency signal of the radio-frequency system, performing a processing procedure wherein the at least one input signal is repeatedly processed by a programmable circuit using at least one configurable parameter of the processing, wherein a configuration of the at least one parameter is varied for each processing of the at least one input signal to obtain respective processing results, determining at least one parameter result for an optimization of the configuration based on the processing results, and providing the at least one determined parameter result for the improved digital signal processing.

公开(公告)号：US11496059B2

公开(公告)日：2022-11-08

申请号：US16465415

申请日：2017-11-29

Applicant: COMET AG

Inventor： Thomas Fink ,  Ralf Negele

IPC: H02M1/42 ,  H02M3/335 ,  H02M1/00

Abstract: A variable voltage generator circuit is described for generating, from a substantially constant supply voltage VS, a variable high-voltage control voltage VC for a variable power capacitor (1) having a variable-permittivity dielectric. The control voltage generator circuit comprises a top-up circuit (10) for maintaining the voltage VCin on an input capacitor (12) at least at supply voltage VS, and a bidirectional DC-DC converter circuit (20) having a variable voltage conversion factor G controlled by control input signal (27). The bidirectional DC-DC converter (20) is arranged to convert voltage, at the voltage conversion factor G, between the input capacitor voltage VCin and the output voltage VC. When VC G×VCin, the DC-DC converter circuit (20) uses charge stored in the load capacitance (1) to charge the input capacitor (12).

公开(公告)号：US11011350B2

公开(公告)日：2021-05-18

申请号：US15509146

申请日：2014-09-04

Applicant: COMET AG

Inventor： Mike Abrecht ,  Thomas Fink ,  Walter Bigler

IPC: H01J37/32 ,  H01G7/06 ,  H03H7/40

Abstract: A power capacitor (7) is described for use in an RF power delivery system. The power capacitor comprises at least two RF electrodes (18, 19) separated by a capacitor dielectric (17) comprising a solid paraelectric dielectric material whose relative permittivity is controllable by varying a DC bias voltage applied across the dielectric (17) at DC bias electrodes (10, 26, 28). Composite capacitor configurations, an RF power system and a method of controlling the power capacitor are also described.