METHODS FOR LASER PROCESSING TRANSPARENT WORKPIECES USING PULSED LASER BEAM FOCAL LINES AND VAPOR ETCHING

    公开(公告)号:US20210283713A1

    公开(公告)日:2021-09-16

    申请号:US17327194

    申请日:2021-05-21

    Abstract: A method for processing a transparent workpiece includes directing a pulsed laser beam into the transparent workpiece such that a portion of the pulsed laser beam directed into the transparent workpiece generates an induced absorption within the transparent workpiece, thereby forming a damage line within the transparent workpiece, and the portion of the pulsed laser beam directed into the transparent workpiece includes a wavelength λ, a spot size wo, and a Rayleigh range ZR that is greater than F D ⁢ π ⁢ w 0 , 2 λ , where FD is a dimensionless divergence factor comprising a value of 10 or greater. Further, the method for processing the transparent workpiece includes etching the transparent workpiece with an etching vapor to remove at least a portion of the transparent workpiece along the damage line, thereby forming an aperture extending through the at least a portion of the thickness of the transparent workpiece.

    METHODS FOR LASER PROCESSING TRANSPARENT WORKPIECES USING PULSED LASER BEAM FOCAL LINES AND VAPOR ETCHING

    公开(公告)号:US20200254557A1

    公开(公告)日:2020-08-13

    申请号:US16776055

    申请日:2020-01-29

    Abstract: A method for processing a transparent workpiece includes directing a pulsed laser beam into the transparent workpiece such that a portion of the pulsed laser beam directed into the transparent workpiece generates an induced absorption within the transparent workpiece, thereby forming a damage line within the transparent workpiece, and the portion of the pulsed laser beam directed into the transparent workpiece includes a wavelength λ, a spot size w0, and a Rayleigh range ZR that is greater than F D  π  w 0 2 λ , where FD is a dimensionless divergence factor comprising a value of 10 or greater. Further, the method for processing the transparent workpiece includes etching the transparent workpiece with an etching vapor to remove at least a portion of the transparent workpiece along the damage line, thereby forming an aperture extending through the at least a portion of the thickness of the transparent workpiece.

    MEDIA AND METHODS FOR ETCHING GLASS
    7.
    发明申请
    MEDIA AND METHODS FOR ETCHING GLASS 有权
    用于蚀刻玻璃的介质和方法

    公开(公告)号:US20140339194A1

    公开(公告)日:2014-11-20

    申请号:US14363147

    申请日:2012-12-10

    CPC classification number: C03C15/02 C09K13/04 C09K13/08

    Abstract: Described herein are aqueous acidic glass etching solutions or media comprising HF and H2SO4, wherein HF is present in concentrations not exceeding about 1.3M. The etching solutions are used to treat glass articles such as thin glass sheets at above-ambient temperatures to etch slight thicknesses of surface glass therefrom, the etching solutions exhibiting improved stability against dissolved glass precipitation and rapid glass removal rates at slightly elevated temperatures.

    Abstract translation: 本文描述的是含水的酸性玻璃蚀刻溶液或包含HF和H 2 SO 4的介质,其中HF的浓度不超过约1.3M。 蚀刻溶液用于在高于环境温度下处理玻璃制品例如薄玻璃板以从其中蚀刻表面玻璃的轻微厚度,所述蚀刻溶液在稍微升高的温度下表现出对溶解的玻璃沉淀的稳定性和快速的玻璃去除速率。

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