公开(公告)号：US20210230056A1

公开(公告)日：2021-07-29

申请号：US15734109

申请日：2019-05-31

Applicant: CORNING INCORPORATED

Inventor： Brian Sterling Chan ,  Yinghong Chen ,  Sumalee Likitvanichkul Fagan ,  Jun Hou ,  Qiao Li ,  Santona Pal ,  Rohit Rai

IPC: C03C21/00 ,  C03C4/18 ,  C03C3/083 ,  C03C3/087 ,  C03C3/089 ,  C03C3/097

Abstract: A method of making strengthened articles that includes: providing articles comprising ion-exchangeable alkali metal ions and first and second primary surfaces; providing a bath comprising ion-exchanging alkali metal ions larger in size than the ion-exchangeable ions; and submersing the articles in the bath at a first ion-exchange temperature and duration to form strengthened articles. Each strengthened article comprises a compressive stress region. Further, the exchange rate of the ion-exchanging alkali metal ions is higher into the first primary surface than into the second primary surface. In addition, the submersing step is conducted such that a predetermined gap is maintained between the first primary surface of each of the articles.

公开(公告)号：US20200006068A1

公开(公告)日：2020-01-02

申请号：US16567610

申请日：2019-09-11

Applicant: CORNING INCORPORATED

Inventor： Sumalee Likitvanichkul Fagan ,  William John Furnas ,  Ekaterina Aleksandrovna Kuksenkova

IPC: H01L21/02 ,  C03C3/097 ,  C03C3/083 ,  C03C4/00 ,  C03C19/00

Abstract: Disclosed herein are glass-based articles having a first surface having an edge, wherein a maximum optical retardation of the first surface is at the edge and the maximum optical retardation is less than or equal to about 40 nm and wherein the optical retardation decreases from the edge toward a central region of the first surface, the central region having a boundary defined by a distance from the edge toward a center point of the first surface, wherein the distance is ½ of the shortest distance from the edge to the center point.

公开(公告)号：US20190085443A1

公开(公告)日：2019-03-21

申请号：US16197466

申请日：2018-11-21

Applicant: CORNING INCORPORATED

Inventor： Daniel Robert Boughton ,  James Gerard Fagan ,  Sumalee Likitvanichkul Fagan

IPC: C23C14/50 ,  C23C14/24 ,  H02N13/00 ,  C03C17/00 ,  C03C23/00 ,  C03C27/06 ,  H01L21/67 ,  H01L21/683 ,  H01L21/687

CPC classification number: C23C14/50 ,  C03C17/002 ,  C03C23/0075 ,  C03C27/06 ,  C03C2218/30 ,  C23C14/24 ,  H01L21/6715 ,  H01L21/6831 ,  H01L21/68785 ,  H02N13/00

Abstract: A chucking apparatus and methods for coating a glass substrate using a vacuum deposition process are disclosed. In one or more embodiments, the chucking apparatus includes an ESC (ESC), a carrier disposed on the ESC, wherein the carrier comprises a first surface adjacent to the ESC and an opposing second surface for forming a Van der Waals bond with a third surface of a glass substrate, without application of a mechanical force on a fourth surface of the glass substrate opposing the third surface. In one or more embodiments, the method includes disposing a carrier and a glass substrate on an ESC, such that the carrier is between the glass substrate and the ESC to form a chucking assembly, forming a Van der Waals bond between the carrier and the glass substrate, and vacuum depositing a coating on the glass substrate.

公开(公告)号：US20180044784A1

公开(公告)日：2018-02-15

申请号：US15673979

申请日：2017-08-10

Applicant: CORNING INCORPORATED

Inventor： Daniel Robert Boughton ,  James Gerard Fagan ,  Sumalee Likitvanichkul Fagan

IPC: C23C14/50 ,  C23C14/24 ,  H02N13/00

CPC classification number: C23C14/50 ,  C03C17/002 ,  C03C23/0075 ,  C03C27/06 ,  C03C2218/30 ,  C23C14/24 ,  H01L21/6715 ,  H01L21/6831 ,  H01L21/68785 ,  H02N13/00

Abstract: A chucking apparatus and methods for coating a glass substrate using a vacuum deposition process are disclosed. In one or more embodiments, the chucking apparatus includes an ESC (ESC), a carrier disposed on the ESC, wherein the carrier comprises a first surface adjacent to the ESC and an opposing second surface for forming a Van der Waals bond with a third surface of a glass substrate, without application of a mechanical force on a fourth surface of the glass substrate opposing the third surface. In one or more embodiments, the method includes disposing a carrier and a glass substrate on an ESC, such that the carrier is between the glass substrate and the ESC to form a chucking assembly, forming a Van der Waals bond between the carrier and the glass substrate, and vacuum depositing a coating on the glass substrate.

公开(公告)号：US12040183B2

公开(公告)日：2024-07-16

申请号：US16567610

申请日：2019-09-11

Applicant: CORNING INCORPORATED

Inventor： Sumalee Likitvanichkul Fagan ,  William John Furnas ,  Ekaterina Aleksandrovna Kuksenkova

IPC: C03B25/02 ,  C03B23/02 ,  C03B29/02 ,  C03B32/00 ,  C03C3/083 ,  C03C3/097 ,  C03C4/00 ,  C03C19/00 ,  C03C23/00 ,  H01L21/02 ,  H01L21/687

CPC classification number: H01L21/02422 ,  C03B23/02 ,  C03B25/025 ,  C03B29/025 ,  C03B32/005 ,  C03C3/083 ,  C03C3/097 ,  C03C4/00 ,  C03C19/00 ,  C03C23/007 ,  H01L21/68757 ,  C03C2204/00

Abstract: Disclosed herein are glass-based articles having a first surface having an edge, wherein a maximum optical retardation of the first surface is at the edge and the maximum optical retardation is less than or equal to about 40 nm and wherein the optical retardation decreases from the edge toward a central region of the first surface, the central region having a boundary defined by a distance from the edge toward a center point of the first surface, wherein the distance is ½ of the shortest distance from the edge to the center point.

公开(公告)号：US10580666B2

公开(公告)日：2020-03-03

申请号：US15632886

申请日：2017-06-26

Applicant: CORNING INCORPORATED

Inventor： Sumalee Likitvanichkul Fagan ,  Weiguo Miao ,  Eric James Nichols

IPC: H01L21/56 ,  H01L21/687 ,  H01L21/683 ,  B29C65/00 ,  B29C70/72 ,  H01L23/367 ,  H01L23/498

Abstract: A carrier substrate includes a base layer having a first surface, and having a second surface that is parallel to and opposite of the first surface. The carrier substrate further includes a glass layer bonded to the first surface of the base layer. The carrier substrate has a Young's modulus greater than or equal to 150 GPa. A carrier substrate includes a polycrystalline ceramic and has a Young's modulus greater than or equal to 150 GPa. The carrier substrate has a coefficient of thermal expansion of greater than or equal to 20×10−7/° C. to less than or equal to 120×10−7/° C. over a range from 25° C. to 500° C.

公开(公告)号：US10450648B2

公开(公告)日：2019-10-22

申请号：US16197466

申请日：2018-11-21

Applicant: CORNING INCORPORATED

Inventor： Daniel Robert Boughton ,  James Gerard Fagan ,  Sumalee Likitvanichkul Fagan

IPC: H02N13/00 ,  C23C14/50 ,  C23C14/24 ,  C03C17/00 ,  C03C23/00 ,  C03C27/06 ,  H01L21/67 ,  H01L21/683 ,  H01L21/687

Abstract: A chucking apparatus and methods for coating a glass substrate using a vacuum deposition process are disclosed. In one or more embodiments, the chucking apparatus includes an ESC (ESC), a carrier disposed on the ESC, wherein the carrier comprises a first surface adjacent to the ESC and an opposing second surface for forming a Van der Waals bond with a third surface of a glass substrate, without application of a mechanical force on a fourth surface of the glass substrate opposing the third surface. In one or more embodiments, the method includes disposing a carrier and a glass substrate on an ESC, such that the carrier is between the glass substrate and the ESC to form a chucking assembly, forming a Van der Waals bond between the carrier and the glass substrate, and vacuum depositing a coating on the glass substrate.

公开(公告)号：US20180005847A1

公开(公告)日：2018-01-04

申请号：US15632886

申请日：2017-06-26

Applicant: CORNING INCORPORATED

Inventor： Sumalee Likitvanichkul Fagan ,  Weiguo Miao ,  Eric James Nichols

IPC: H01L21/56 ,  H01L23/367 ,  B29C70/72 ,  H01L23/498 ,  B29C65/00

Abstract: A carrier substrate includes a base layer having a first surface, and having a second surface that is parallel to and opposite of the first surface. The carrier substrate further includes a glass layer bonded to the first surface of the base layer. The carrier substrate has a Young's modulus greater than or equal to 150 GPa. A carrier substrate includes a polycrystalline ceramic and has a Young's modulus greater than or equal to 150 GPa. The carrier substrate has a coefficient of thermal expansion of greater than or equal to 20×10−7/° C. to less than or equal to 120×10−7/° C. over a range from 25° C. to 500° C.

公开(公告)号：US10483101B2

公开(公告)日：2019-11-19

申请号：US15633000

申请日：2017-06-26

Applicant: CORNING INCORPORATED

Inventor： Sumalee Likitvanichkul Fagan ,  William John Furnas ,  Ekaterina Aleksandrovna Kuksenkova

IPC: B32B15/04 ,  H01L21/02 ,  C03C3/097 ,  C03C23/00 ,  C03B25/02 ,  C03B29/02 ,  H01L21/687 ,  C03C3/083 ,  C03C4/00 ,  C03C19/00 ,  C03B23/02

Abstract: Disclosed herein are glass-based articles having a first surface having an edge, wherein a maximum optical retardation of the first surface is at the edge and the maximum optical retardation is less than or equal to about 40 nm and wherein the optical retardation decreases from the edge toward a central region of the first surface, the central region having a boundary defined by a distance from the edge toward a center point of the first surface, wherein the distance is ½ of the shortest distance from the edge to the center point.

公开(公告)号：US20190276356A1

公开(公告)日：2019-09-12

申请号：US16463692

申请日：2017-11-29

Applicant: CORNING INCORPORATED

Inventor： John Steele Abbott ,  Douglas Clippinger Allan ,  John Martin Darfin ,  Sumalee Likitvanichkul Fagan ,  David Lee Weidman ,  David Inscho Wilcox

IPC: C03C21/00 ,  C03C15/00

Abstract: Strengthened glass substrates and methods of reducing warp in strengthened glass substrates having 3D and 2.5D shapes are disclosed. In one embodiment, a strengthened glass-based article includes a first surface, a second surface opposite the first surface, and an edge between the first surface and the second surface. The edge is asymmetric with respect to a plane that is located at an average depth of the strengthened glass-based article and is parallel to the first surface and the second surface. The strengthened glass-based article has an expected warp WE based at least in part on a shape of the asymmetric edge of the strengthened glass-based article. An actual warp WA of the strengthened glass-based article is less than 85% of the expected warp metric WE of the strengthened glass-based article. The actual warp WA of the strengthened glass-based article is measured with a concave surface facing up.