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公开(公告)号:US11662504B2
公开(公告)日:2023-05-30
申请号:US16740322
申请日:2020-01-10
发明人: Yonghwi Kim , Pin Chieh Wu , Ruzan Sokhoyan , Kelly W Mauser , Rebecca D Glaudell , Ghazaleh Kafaie Shirmanesh , Harry A Atwater
CPC分类号: G02B1/002 , G02B26/06 , G02F1/0147 , G02F2202/30 , H10N70/231 , H10N70/8613 , H10N70/8828 , H10N70/8833
摘要: Electrically tunable metasurfaces including an array of subwavelength metasurface unit elements are presented. The unit elements include a stacked metal-insulator-metal structure within which an active phase change layer is included. A purely insulator, metal, or coexisting metal-insulator phase of the active layer can be electrically controlled to tune an amplitude and phase response of the metasurfaces. In combination with the subwavelengths dimensions of the unit elements, the phase and amplitude response can be controlled in a range from optical wavelengths to millimeter wavelength of incident light. Electrical control of the unit elements can be provided via resistive heating produced by flow of current though a top metal layer of the unit elements. Alternatively, electrical control of the unit elements can be provided via electrical field effect produced by applying a voltage differential between the top and bottom metal layers of the unit elements.
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公开(公告)号:US11108213B2
公开(公告)日:2021-08-31
申请号:US16804442
申请日:2020-02-28
发明人: Duhyun Lee , Muhammad Alam , Ghazaleh Kafaie Shirmanesh , Harry Atwater , Pin Chieh Wu , Ragip Pala
摘要: A light modulation element according to example embodiments includes a substrate; a first lower DBR layer on the substrate including a first material layer alternately stacked with a second material layer having a different refractive index from the first material layer; a second lower DBR layer on the first lower DBR layer with a surface area less than the first lower DBR layer and including a third material layer alternately stacked with a fourth material layer having a different refractive index from the third material layer; an active layer on the second lower DBR layer, including a semiconductor material having a multi-quantum well structure and having a refractive index that varies according to an applied voltage; and an upper DBR layer on the active layer including a fifth material layer alternately stacked with a sixth material layer having a different refractive index from the fifth material layer.
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公开(公告)号:US10802301B2
公开(公告)日:2020-10-13
申请号:US16124948
申请日:2018-09-07
摘要: The optical response of a metasurface is controlled by actuating it via an electrical or magnetic field, temperature control, optical pumping or electromechanical actuation. The metasurface will therefore control the polarization of the incident light. The metasurface comprises an array of patch antennas. The patch antennas are in the form of asymmetrical elements, including rotated rods, cross-shapes, V-shapes, and L-shapes.
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公开(公告)号:US20200227632A1
公开(公告)日:2020-07-16
申请号:US16740322
申请日:2020-01-10
发明人: Yonghwi Kim , Pin Chieh Wu , Ruzan Sokhoyan , Kelly W. Mauser , Rebecca D. Glaudell , Ghazaleh Kafaie Shirmanesh , Harry A. Atwater
IPC分类号: H01L45/00
摘要: Electrically tunable metasurfaces including an array of subwavelength metasurface unit elements are presented. The unit elements include a stacked metal-insulator-metal structure within which an active phase change layer is included. A purely insulator, metal, or coexisting metal-insulator phase of the active layer can be electrically controlled to tune an amplitude and phase response of the metasurfaces. In combination with the subwavelengths dimensions of the unit elements, the phase and amplitude response can be controlled in a range from optical wavelengths to millimeter wavelength of incident light. Electrical control of the unit elements can be provided via resistive heating produced by flow of current though a top metal layer of the unit elements. Alternatively, electrical control of the unit elements can be provided via electrical field effect produced by applying a voltage differential between the top and bottom metal layers of the unit elements.
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