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    OPTICAL SYSTEMS AND METHODS OF CHARACTERIZING HIGH-K DIELECTRICS
    2.
    发明申请
    OPTICAL SYSTEMS AND METHODS OF CHARACTERIZING HIGH-K DIELECTRICS 有权

    公开(公告)号：US20220003678A1

    公开(公告)日：2022-01-06

    申请号：US17147371

    申请日：2021-01-12

    申请人： California Institute of Technology

    发明人： Philippe C. Adell ,  Harry A. Atwater

    IPC分类号： G01N21/64 ,  G01N21/63 ,  H01L21/66 ,  G01R31/26 ,  G01R29/24 ,  G01R31/302 ,  G01N21/88 ,  G01N21/95

    摘要： The disclosed technology generally relates to characterization of semiconductor structures, and more particularly to optical characterization of high-k dielectric materials. A method includes providing a semiconductor structure comprising a semiconductor and a high-k dielectric layer formed over the semiconductor, wherein the dielectric layer has electron traps formed therein. The method additionally includes at least partially transmitting an incident light having an incident energy through the high-k dielectric layer and at least partially absorbing the incident light in the semiconductor. The method additionally includes measuring a nonlinear optical spectrum resulting from the light having the energy different from the incident energy, the nonlinear optical spectrum having a first region and a second region, wherein the first region changes at a different rate in intensity compared to the second region. The method further includes determining from the nonlinear optical spectrum one or both of a first time constant from the first region and a second time constant from the second region, and determining a trap density in the high-k dielectric layer based on the one or both of the first time constant and the second time constant.

    Narrowband Light Filters
    7.
    发明申请
    Narrowband Light Filters 审中-公开

    公开(公告)号：US20180308888A1

    公开(公告)日：2018-10-25

    申请号：US15961819

    申请日：2018-04-24

    申请人： California Institute of Technology

    发明人： Dagny Fleischman ,  Harry A. Atwater

    IPC分类号： H01L27/146 ,  G02B5/20 ,  G03F7/00 ,  G03C7/12

    摘要： Narrowband light filters, and methods of manufacturing such light filters, are provided. A narrowband light filter may include at least two electrically conductive bodies, an electrically conductive thin film layer disposed between the at least two electrically conductive bodies, at least one protective oxide layer disposed on the thin film layer and electrically conductive bodies, and at least one slit disposed through the electrically conductive thin layer. In various embodiments, the electrically conductive bodies give the narrowband light filter a mirrored structure in exemplary embodiments of the invention. The narrowband filters may also include one or more slits. Multiple slits may be configured to make the narrowband filtration polarization-independent. A plurality of narrowband light filters may be configured into pixel arrays. Pixel arrays may also be used in multispectral or hyperspectral imaging apparatus and techniques.

    Systems and methods for implementing electrically tunable metasurfaces
    8.
    发明授权
    Systems and methods for implementing electrically tunable metasurfaces 有权

    公开(公告)号：US09958707B2

    公开(公告)日：2018-05-01

    申请号：US15124017

    申请日：2015-03-06

    申请人： California Institute of Technology

    发明人： Harry A. Atwater

    IPC分类号： H01Q15/02 ,  G02F1/00 ,  G02F1/01

    CPC分类号： G02F1/0018 ,  B82Y20/00 ,  G02B1/002 ,  G02B26/02 ,  G02F1/0121 ,  G02F2202/30

    摘要： Systems and methods in accordance with embodiments of the invention implement electrically tunable metasurfaces. In one embodiment, an electrically tunable metasurface reflectarray includes: a mirrored surface; a conductive layer; a dielectric layer; where the conductive layer and the dielectric layer are in direct contact, and thereby define a conductor-dielectric interface; a plurality of subwavelength antenna elements; and an electrical power source configured to establish a potential difference between at least one subwavelength antenna element and the mirrored surface; where a potential difference between a subwavelength antenna element and the mirrored surface applies an electric field to a corresponding region of the electrically tunable metasurface reflectarray; where any applied electric fields in conjunction with the geometry and the material composition of each of the subwavelength antenna elements, the conductive layer, and the dielectric layer, enable the electrically tunable metasurface reflectarray to measurably augment the propagation characteristics of incident electromagnetic waves.