专利检索 ap:("Carl Zeiss SMT GmbH") AND inv:"Marcel HAERTLING" 第 1 页

1.

发明公开
METHOD AND APPARATUS FOR DEPOSITION OF AT LEAST ONE LAYER, OPTICAL ELEMENT AND OPTICAL ARRANGEMENT 审中-公开

公开(公告)号：US20240035163A1

公开(公告)日：2024-02-01

申请号：US18482472

申请日：2023-10-06

申请人： Carl Zeiss SMT GmbH

发明人： Felix LANGE , Alexandra PAZIDIS , Marcel HAERTLING , Alexander WIEGAND

IPC分类号： C23C16/48 , G02B5/08 , C23C16/513 , C23C16/52 , C23C16/40

CPC分类号： C23C16/482 , G02B5/0891 , C23C16/486 , C23C16/513 , C23C16/52 , C23C16/40

摘要： The disclosed techniques relate to a method for depositing at least one layer composed of an ionically bonded solid on a substrate, comprising the following steps: converting a coating material to the gas phase and depositing the coating material converted to the gas phase on the substrate. The layer is irradiated with UV/VIS light during the deposition. The disclosed techniques also relate to an apparatus for implementing the disclosed method and optical elements and devices created using the disclosed method.