公开(公告)号：US08194251B2

公开(公告)日：2012-06-05

申请号：US12946747

申请日：2010-11-15

Applicant: Casey Edward Emtman ,  Yong Xie

Inventor： Casey Edward Emtman ,  Yong Xie

IPC: G01N21/55

CPC classification number: G01B11/026 ,  G01B11/14

Abstract: A system and method provide a dual beam chromatic point sensor (CPS) system operable to simultaneously measure two surface regions. In one embodiment, a single beam CPS optical pen may have a dual beam assembly attached. First and second measurement beams of the system may be positioned on respective first and second surface regions, and both reflect light through a confocal aperture of the dual beam CPS. At least one set of measurements is determined, comprising a first and second measurement arising from the first and second measurement beams, respectively. At least the first surface region may be moved to acquire sets of measurements at various positions. Each measurement may be determined with extremely fine resolution (e.g., at least as fine as 10 nm). The system and method satisfy applications that require such resolution and accuracy without the use of an interferometer or other costly and complex elements.

Abstract translation: 一种系统和方法提供可操作以同时测量两个表面区域的双光束色点传感器（CPS）系统。 在一个实施例中，单光束CPS光笔可以具有连接的双光束组件。 系统的第一和第二测量光束可以位于相应的第一和第二表面区域上，并且两者都反射通过双光束CPS的共焦孔的光。 确定至少一组测量，包括分别由第一和第二测量光束产生的第一和第二测量。 至少第一表面区域可以被移动以在各个位置获取测量集合。 每个测量可以用非常精细的分辨率（例如，至少等于10nm）来确定。 该系统和方法满足需要这种分辨率和精度的应用，而不需要使用干涉仪或其他昂贵且复杂的元件。

公开(公告)号：US08739428B2

公开(公告)日：2014-06-03

申请号：US13541024

申请日：2012-07-03

Applicant: Casey Edward Emtman

Inventor： Casey Edward Emtman

IPC: G01B3/18

CPC classification number: G01B3/18 ,  G01B3/008

Abstract: A micrometer, including a constant force drive spring actuator configuration, is disclosed which comprises a frame, an anvil, a spindle, a linear displacement sensor that senses a displacement of the spindle, and an actuator including a button which is configured to move the spindle toward or away from the anvil. The spindle drive is attached to a constant force spring actuator comprising at least one constant force spring coil extending toward the spindle and attached between the spindle and the frame such that the sum of their forces drives the spindle toward the anvil with an approximately constant force. In some embodiments, the constant force spring actuator comprises at least two parallel constant force spring coils, extending in parallel toward the spindle. The constant force spring may be made more compact, exert a greater force, and have an extended life relative to known configurations.

Abstract translation: 公开了一种包括恒力驱动弹簧致动器构造的千分尺，其包括框架，砧座，主轴，感测主轴的位移的线性位移传感器，以及包括按钮的致动器，该按钮构造成使主轴 朝向或远离铁砧。 主轴驱动器连接到恒力弹簧致动器，该恒力弹簧致动器包括至少一个恒定力弹簧线圈，该弹簧线圈朝向主轴延伸并且安装在主轴和框架之间，使得它们的力的总和以大致恒定的力将主轴驱动到砧座。 在一些实施例中，恒力弹簧致动器包括至少两个平行的恒力弹簧线圈，其平行于主轴延伸。 恒力弹簧可以制成更紧凑，施加更大的力，并且相对于已知构造具有延长的使用寿命。

公开(公告)号：US20110317396A1

公开(公告)日：2011-12-29

申请号：US12943860

申请日：2010-11-10

Applicant: Casey Edward Emtman ,  Paul Gerard Gladnick ,  Scott Allen Harsila

Inventor： Casey Edward Emtman ,  Paul Gerard Gladnick ,  Scott Allen Harsila

IPC: F21V9/16 ,  C09K11/00

CPC classification number: F21V9/00 ,  G01J3/10

Abstract: A phosphor point source element comprises a substrate and light emitting phosphor particles arranged on the substrate to provide a circular operational track having a tightly packed particle arrangement adjacent to a flat operational surface of an operational track region. The operational track region is rotated while illuminated at a point to provide a high intensity point source. The tightly packed particle arrangement may be achieved by spinning the phosphor particles in a cavity to compress the phosphor on the substrate at the periphery of the cavity, or by other mechanical compression. The tightly packed phosphor arrangement may either be compressed against a forming element that bounds the cavity, or machined, to provide a flat operational surface. An adhesive binding agent that permeates the phosphor particles may be cured to fix the tightly packed arrangement. A window element may support and/or protect the operational surface, in some embodiments.

Abstract translation: 磷光体源元件包括衬底和布置在衬底上的发光荧光体颗粒，以提供具有与操作轨道区域的平坦操作表面相邻的紧密堆积的颗粒排列的圆形操作轨迹。 操作轨道区域在一点点亮时旋转，以提供高强度点源。 紧密堆积的颗粒布置可以通过将空穴中的荧光体颗粒旋转以在空腔的周边处压缩基底上的磷光体，或通过其它机械压缩来实现。 紧密堆积的磷光体布置可以压靠限定空腔或加工的成形元件，以提供平坦的操作表面。 可以固化渗透荧光体颗粒的粘合剂粘合剂以固定紧密堆积的布置。 在一些实施例中，窗口元件可以支撑和/或保护操作表面。

公开(公告)号：US20120050722A1

公开(公告)日：2012-03-01

申请号：US12869687

申请日：2010-08-26

Applicant: Casey Edward Emtman ,  Yong Xie

Inventor： Casey Edward Emtman ,  Yong Xie

IPC: G01J1/00

CPC classification number: G01B11/026 ,  G01B2290/20

Abstract: A dual beam assembly is provided for attachment to a chromatic confocal point sensor optical pen. The optical pen provides a single source beam having a measurement range R in the absence of the dual beam assembly. The dual beam assembly includes a first reflective element that is positioned in the source beam and divides it into a first measurement beam and a second measurement beam. The dual beam assembly outputs the first and second measurement beams along first and second measurement axes to different workpiece regions and returns workpiece measurement light arising from the first and second measurement beams back to the optical pen. A second reflective element may be included and configured to deflect the second measurement beam along a desired direction. An offset may be provided between the measuring ranges of the first and second measurement beams.

Abstract translation: 提供双光束组件用于附着到彩色共焦点传感器光笔。 光笔在不存在双光束组件的情况下提供具有测量范围R的单个光源光束。 双光束组件包括位于源光束中的第一反射元件，并将其分成第一测量光束和第二测量光束。 双光束组件将第一和第二测量光束沿着第一和第二测量轴输出到不同的工件区域，并将从第一和第二测量光束产生的工件测量光返回到光笔。 第二反射元件可以被包括并且被配置成沿着期望的方向偏转第二测量光束。 可以在第一和第二测量光束的测量范围之间提供偏移。

公开(公告)号：US20140007446A1

公开(公告)日：2014-01-09

申请号：US13541024

申请日：2012-07-03

Applicant: Casey Edward Emtman

Inventor： Casey Edward Emtman

IPC: G01B3/18

CPC classification number: G01B3/18 ,  G01B3/008

Abstract: A micrometer, including a constant force drive spring actuator configuration, is disclosed which comprises a frame, an anvil, a spindle, a linear displacement sensor that senses a displacement of the spindle, and an actuator including a button which is configured to move the spindle toward or away from the anvil. The spindle drive is attached to a constant force spring actuator comprising at least one constant force spring coil extending toward the spindle and attached between the spindle and the frame such that the sum of their forces drives the spindle toward the anvil with an approximately constant force. In some embodiments, the constant force spring actuator comprises at least two parallel constant force spring coils, extending in parallel toward the spindle. The constant force spring may be made more compact, exert a greater force, and have an extended life relative to known configurations.

Abstract translation: 公开了一种包括恒力驱动弹簧致动器构造的千分尺，其包括框架，砧座，主轴，感测主轴的位移的线性位移传感器，以及包括按钮的致动器，该按钮构造成使主轴 朝向或远离铁砧。 主轴驱动器连接到恒力弹簧致动器，该恒力弹簧致动器包括至少一个恒定力弹簧线圈，该弹簧线圈朝向主轴延伸并且安装在主轴和框架之间，使得它们的力的总和以大致恒定的力将主轴驱动到砧座。 在一些实施例中，恒力弹簧致动器包括至少两个平行的恒力弹簧线圈，其平行于主轴延伸。 恒力弹簧可以制成更紧凑，施加更大的力，并且相对于已知构造具有延长的使用寿命。

公开(公告)号：US20120050723A1

公开(公告)日：2012-03-01

申请号：US12946747

申请日：2010-11-15

Applicant: Casey Edward Emtman ,  Yong Xie

Inventor： Casey Edward Emtman ,  Yong Xie

IPC: G01J1/00

CPC classification number: G01B11/026 ,  G01B11/14

Abstract: A system and method provide a dual beam chromatic point sensor (CPS) system operable to simultaneously measure two surface regions. In one embodiment, a single beam CPS optical pen may have a dual beam assembly attached. First and second measurement beams of the system may be positioned on respective first and second surface regions, and both reflect light through a confocal aperture of the dual beam CPS. At least one set of measurements is determined, comprising a first and second measurement arising from the first and second measurement beams, respectively. At least the first surface region may be moved to acquire sets of measurements at various positions. Each measurement may be determined with extremely fine resolution (e.g., at least as fine as 10 nm). The system and method satisfy applications that require such resolution and accuracy without the use of an interferometer or other costly and complex elements.

Abstract translation: 一种系统和方法提供可操作以同时测量两个表面区域的双光束色点传感器（CPS）系统。 在一个实施例中，单光束CPS光笔可以具有连接的双光束组件。 系统的第一和第二测量光束可以位于相应的第一和第二表面区域上，并且两者都反射通过双光束CPS的共焦孔的光。 确定至少一组测量，包括分别由第一和第二测量光束产生的第一和第二测量。 至少第一表面区域可以被移动以在各个位置获取测量集合。 每个测量可以用非常精细的分辨率（例如，至少等于10nm）来确定。 该系统和方法满足需要这种分辨率和精度的应用，而不需要使用干涉仪或其他昂贵且复杂的元件。

公开(公告)号：US20110317171A1

公开(公告)日：2011-12-29

申请号：US12823050

申请日：2010-06-24

Applicant: Casey Edward Emtman ,  Paul Gladnick ,  Scott Allen Harsila

Inventor： Casey Edward Emtman ,  Paul Gladnick ,  Scott Allen Harsila

IPC: G01B11/24 ,  C09K11/00

CPC classification number: G01B11/24

Abstract: A phosphor point source element comprises a disk substrate and light emitting phosphor particles arranged on the substrate to provide a circular operational track having a desirable tightly packed particle arrangement adjacent to a flat operational surface of an operational track region. The operational track region is rotated while illuminated to provide a high intensity point source of radiation. The tightly packed particle arrangement may be achieved by spinning the phosphor particles in a cavity between a fabrication plate and the substrate, to compress the phosphor against the fabrication plate at the periphery of the cavity, or by mechanically compressing the phosphor. An adhesive binding agent may permeate the phosphor particles and be cured to maintain the tightly packed arrangement. A window element may support and/or protect the operational surface, in some embodiments.

Abstract translation: 荧光点源元件包括盘基片和布置在基片上的发光磷光体粒子，以提供一圆形操作轨迹，该轨迹具有与操作轨道区域的平坦操作表面相邻的所需紧密堆积的粒子排列。 操作轨道区域被照亮时旋转，以提供高强度点辐射源。 紧密堆积的颗粒布置可以通过将制造板和基板之间的空腔中的荧光体颗粒旋转，以在空腔的周边处将荧光体压在制造板上，或通过机械压缩荧光体来实现。 粘合剂粘合剂可渗透荧光体颗粒并固化以保持紧密堆积的布置。 在一些实施例中，窗口元件可以支撑和/或保护操作表面。

公开(公告)号：US08456637B2

公开(公告)日：2013-06-04

申请号：US12869687

申请日：2010-08-26

Applicant: Casey Edward Emtman ,  Yong Xie

Inventor： Casey Edward Emtman ,  Yong Xie

IPC: G01N21/55

CPC classification number: G01B11/026 ,  G01B2290/20

Abstract: A dual beam assembly is provided for attachment to a chromatic confocal point sensor optical pen. The optical pen provides a single source beam having a measurement range R in the absence of the dual beam assembly. The dual beam assembly includes a first reflective element that is positioned in the source beam and divides it into a first measurement beam and a second measurement beam. The dual beam assembly outputs the first and second measurement beams along first and second measurement axes to different workpiece regions and returns workpiece measurement light arising from the first and second measurement beams back to the optical pen. A second reflective element may be included and configured to deflect the second measurement beam along a desired direction. An offset may be provided between the measuring ranges of the first and second measurement beams.

Abstract translation: 提供双光束组件用于附着到彩色共焦点传感器光笔。 光笔在不存在双光束组件的情况下提供具有测量范围R的单个光源光束。 双光束组件包括位于源光束中的第一反射元件，并将其分成第一测量光束和第二测量光束。 双光束组件将第一和第二测量光束沿着第一和第二测量轴输出到不同的工件区域，并将从第一和第二测量光束产生的工件测量光返回到光笔。 第二反射元件可以被包括并且被配置成沿着期望的方向偏转第二测量光束。 可以在第一和第二测量光束的测量范围之间提供偏移。

公开(公告)号：US08142050B2

公开(公告)日：2012-03-27

申请号：US12943860

申请日：2010-11-10

Applicant: Casey Edward Emtman ,  Paul Gerard Gladnick ,  Scott Allen Harsila

Inventor： Casey Edward Emtman ,  Paul Gerard Gladnick ,  Scott Allen Harsila

IPC: F21V9/00 ,  G01N21/00

CPC classification number: F21V9/00 ,  G01J3/10

Abstract: A phosphor point source element comprises a substrate and light emitting phosphor particles arranged on the substrate to provide a circular operational track having a tightly packed particle arrangement adjacent to a flat operational surface of an operational track region. The operational track region is rotated while illuminated at a point to provide a high intensity point source. The tightly packed particle arrangement may be achieved by spinning the phosphor particles in a cavity to compress the phosphor on the substrate at the periphery of the cavity, or by other mechanical compression. The tightly packed phosphor arrangement may either be compressed against a forming element that bounds the cavity, or machined, to provide a flat operational surface. An adhesive binding agent that permeates the phosphor particles may be cured to fix the tightly packed arrangement. A window element may support and/or protect the operational surface, in some embodiments.

Abstract translation: 磷光体源元件包括衬底和布置在衬底上的发光荧光体颗粒，以提供具有与操作轨道区域的平坦操作表面相邻的紧密堆积的颗粒排列的圆形操作轨迹。 操作轨道区域在一点被照亮时旋转以提供高强度点源。 紧密堆积的颗粒布置可以通过将空穴中的荧光体颗粒旋转以在空腔的周边处压缩基底上的磷光体，或通过其它机械压缩来实现。 紧密堆积的磷光体布置可以压靠限定空腔或加工的成形元件，以提供平坦的操作表面。 可以固化渗透荧光体颗粒的粘合剂粘合剂以固定紧密堆积的布置。 在一些实施例中，窗口元件可以支撑和/或保护操作表面。

公开(公告)号：US07515280B2

公开(公告)日：2009-04-07

申请号：US10593574

申请日：2004-05-12

Applicant: Casey Edward Emtman ,  Andrew Michael Patzwald ,  Benjamin Keith Jones

Inventor： Casey Edward Emtman ,  Andrew Michael Patzwald ,  Benjamin Keith Jones

IPC: G01B11/14

CPC classification number: G01B11/16 ,  G01B11/002

Abstract: A displacement measurement device has a detector area which is larger than the area of the beam spot reflected from the measurement surface. The detector area is made larger than the size of the beam spot on the detector area, in order to accommodate shifts in the location of the beam spot due to changes in the precise locations of the components of the displacement measurement device. The subset of pixels in the detector area having advantageous correlation characteristics, is then selected to perform the correlation calculation, thereby reducing data processing time requirements.

Abstract translation: 位移测量装置具有大于从测量表面反射的束斑的面积的检测器面积。 检测器区域大于检测器区域上的光束点的尺寸，以便由于位移测量装置的部件的精确位置的变化而适应波束点位置的偏移。 然后选择具有有利相关特性的检测器区域中的像素子集以执行相关计算，从而减少数据处理时间要求。