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公开(公告)号:US07443017B2
公开(公告)日:2008-10-28
申请号:US11447764
申请日:2006-06-06
IPC分类号: H01L23/02
CPC分类号: B81C1/00269
摘要: A package for containing microelectromechanical devices includes a first substrate wafer, and a second substrate wafer made of an optical quality material. An underbump is interposed between the first and second substrate wafers. The underbump is composed of a standoff region and a localized bond region. The first and second substrate wafers and the underbump define a chamber that contains at least one microelectronic device.
摘要翻译: 用于容纳微机电器件的封装包括第一衬底晶片和由光学质量材料制成的第二衬底晶片。 在第一和第二基板晶片之间插入底部凹凸。 底部凹坑由间隔区域和局部粘结区域组成。 第一和第二衬底晶片和底部凹部限定包含至少一个微电子器件的腔室。
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公开(公告)号:US07067355B2
公开(公告)日:2006-06-27
申请号:US10854110
申请日:2004-05-26
CPC分类号: B81C1/00269
摘要: A package for containing microelectromechanical devices includes a first substrate wafer, and a second substrate wafer made of an optical quality material. An underbump is interposed between the first and second substrate wafers. The underbump is composed of a standoff region and a localized bond region. The first and second substrate wafers and the underbump define a chamber that contains at least one microelectronic device.
摘要翻译: 用于容纳微机电器件的封装包括第一衬底晶片和由光学质量材料制成的第二衬底晶片。 在第一和第二基板晶片之间插入底部凹凸。 底部凹坑由间隔区域和局部粘结区域组成。 第一和第二衬底晶片和底部凹部限定包含至少一个微电子器件的腔室。
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3.
公开(公告)号:US07378030B2
公开(公告)日:2008-05-27
申请号:US11041773
申请日:2005-01-24
CPC分类号: B41J2/14201 , B41J2/1433 , B41J2/1607 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1634 , B41J2/1642 , B41J2/1646 , B41J2002/1437 , B41J2202/15 , H01L41/0973 , H01L41/316 , Y10T29/49401
摘要: A method of forming an opening through a substrate having a first side and a second side opposite the first side includes forming a trench in the first side of the substrate, forming a mask layer within the trench, filling the trench with a fill material, forming a first portion of the opening in the substrate from the second side of the substrate toward the mask layer, and forming a second portion of the opening in the substrate through the mask layer and the fill material, including communicating the second portion of the opening with the first portion of the opening and the first side of the substrate.
摘要翻译: 通过具有第一侧和与第一侧相对的第二侧的衬底形成开口的方法包括在衬底的第一侧中形成沟槽,在沟槽内形成掩模层,用填充材料填充沟槽,形成 从衬底的第二侧到掩模层的衬底中的开口的第一部分,以及通过掩模层和填充材料在衬底中形成开口的第二部分,包括使开口的第二部分与第 开口的第一部分和基底的第一侧。
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公开(公告)号:US06821450B2
公开(公告)日:2004-11-23
申请号:US10347888
申请日:2003-01-21
IPC分类号: B41J204
CPC分类号: B41J2/1628 , B41J2/1601 , B41J2/1607 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1634
摘要: A method of forming an opening through a substrate having a first side and a second side opposite the first side includes forming a trench in the first side of the substrate, forming a mask layer within the trench, forming at least one hole in the mask layer, filling the trench and the at least one hole, forming a first portion of the opening in the substrate from the second side of the substrate to the mask layer, and forming a second portion of the opening in the substrate from the second side of the substrate through the at least one hole in the mask layer to the first side of the substrate.
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5.
公开(公告)号:US07018015B2
公开(公告)日:2006-03-28
申请号:US10992159
申请日:2004-11-18
CPC分类号: B41J2/1628 , B41J2/1601 , B41J2/1607 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1634
摘要: A method of forming an opening through a substrate having a first side and a second side opposite the first side includes forming a trench in the first side of the substrate, forming a mask layer within the trench, forming at least one hole in the mask layer, filling the trench and the at least one hole, forming a first portion of the opening in the substrate from the second side of the substrate to the mask layer, and forming a second portion of the opening in the substrate from the second side of the substrate through the at least one hole in the mask layer to the first side of the substrate.
摘要翻译: 通过具有第一侧和与第一侧相对的第二侧的衬底形成开口的方法包括在衬底的第一侧中形成沟槽,在沟槽内形成掩模层,在掩模层中形成至少一个孔 填充所述沟槽和所述至少一个孔,从所述衬底的所述第二侧到所述掩模层形成所述衬底中的所述开口的第一部分,以及从所述衬底的所述第二侧形成所述衬底中的所述开口的第二部分 衬底通过掩模层中的至少一个孔到衬底的第一侧。
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公开(公告)号:US06883903B2
公开(公告)日:2005-04-26
申请号:US10348384
申请日:2003-01-21
CPC分类号: B41J2/14201 , B41J2/1433 , B41J2/1607 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1634 , B41J2/1642 , B41J2/1646 , B41J2002/1437 , B41J2202/15 , H01L41/0973 , H01L41/316 , Y10T29/49401
摘要: A method of forming an opening through a substrate having a first side and a second side opposite the first side includes forming a trench in the first side of the substrate, forming a mask layer within the trench, filling the trench with a fill material, forming a first portion of the opening in the substrate from the second side of the substrate toward the mask layer, and forming a second portion of the opening in the substrate through the mask layer and the fill material, including communicating the second portion of the opening with the first portion of the opening and the first side of the substrate.
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公开(公告)号:US08454149B2
公开(公告)日:2013-06-04
申请号:US12824424
申请日:2010-06-28
申请人: Terry M. Lambright , Anthony Selmeczy , Francis Chee-Shuen Lee , Charles C. Haluzak , Kenneth E. Trueba
发明人: Terry M. Lambright , Anthony Selmeczy , Francis Chee-Shuen Lee , Charles C. Haluzak , Kenneth E. Trueba
IPC分类号: G01D11/00
CPC分类号: B41J2/1648 , B41J2/1404 , B41J2/14072 , B41J2/14129 , B41J2/1603 , B41J2/1623 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1634 , B41J2/1642 , B41J2/1646 , B41J2002/14387 , B41J2202/11
摘要: An inkjet printing system includes a print head in fluid communication with an ink reservoir and having a plurality of orifices and a corresponding plurality of associated ejection chambers. The print head includes a substrate and a barrier layer disposed on the substrate. The barrier layer defines in part a plurality of fluid channels and the plurality of ejection chambers. The barrier layer includes a material selected from epoxy-based photo resist materials and methyl methacrylate-based photo resist materials. An orifice plate is disposed over the substrate. The orifice plate includes the plurality of orifices in fluid communication with the ejection chambers. The orifice plate comprises a material selected from polyimides and nickel.
摘要翻译: 喷墨打印系统包括与墨水储存器流体连通并具有多个孔和相应的多个相关联的喷射室的打印头。 打印头包括衬底和设置在衬底上的阻挡层。 阻挡层部分地限定多个流体通道和多个喷射室。 阻挡层包括选自环氧类光致抗蚀剂材料和甲基丙烯酸甲酯系光致抗蚀剂材料的材料。 孔板设置在基板上。 孔板包括与喷射室流体连通的多个孔。 孔板包括选自聚酰亚胺和镍的材料。
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8.
公开(公告)号:US20110025782A1
公开(公告)日:2011-02-03
申请号:US12896980
申请日:2010-10-04
申请人: Charles C. Haluzak , Chien-Hua Chen , Kirby Sand
发明人: Charles C. Haluzak , Chien-Hua Chen , Kirby Sand
IPC分类号: B41J2/14
CPC分类号: B41J2/16 , B41J2/1623 , B41J2/1628 , B41J2/1632 , B41J2/1637
摘要: A microfluidic device includes first and second substrates bonded together. The first substrate has first and second opposed surfaces. A die pocket is formed in the first opposed surface, and a through slot extends from the die pocket to the second opposed surface. The second substrate is bonded to the second opposed surface of the first substrate whereby an outlet of a channel formed in the second substrate substantially aligns with the through slot. The channel of the second substrate has an inlet that is larger than the outlet.
摘要翻译: 微流体装置包括粘合在一起的第一和第二基底。 第一基板具有第一和第二相对表面。 模具袋形成在第一相对表面中,并且通孔从模腔延伸到第二相对表面。 第二基板结合到第一基板的第二相对表面,由此形成在第二基板中的通道的出口基本上与通孔对准。 第二基板的通道具有比出口大的入口。
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公开(公告)号:US07766462B2
公开(公告)日:2010-08-03
申请号:US11677340
申请日:2007-02-21
申请人: Charles C. Haluzak , Chien-Hua Chen , Kirby Sand
发明人: Charles C. Haluzak , Chien-Hua Chen , Kirby Sand
CPC分类号: B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1628 , B41J2/1629 , B41J2/1632 , B41J2/1637 , B41J2202/03 , Y10T29/49401
摘要: A method of forming a fluid ejection device includes forming a pair of first glass layers and forming a second glass layer. Each first glass layer includes a first side and a second side with the second side defining a first fluid flow structure. The second glass layer includes a first side and a second side opposite the first side, with each respective first side and second side defining a second fluid flow structure. The second glass layer is bonded in a sandwiched position between the respective first glass layers with each respective second fluid flow structure of the second glass layer in fluid communication with the respective first fluid flow structure of the respective first glass layers to define a fluid flow pathway for ejecting a fluid.
摘要翻译: 形成流体喷射装置的方法包括形成一对第一玻璃层并形成第二玻璃层。 每个第一玻璃层包括第一侧和第二侧,第二侧限定第一流体流动结构。 第二玻璃层包括与第一侧相对的第一侧和第二侧,每个相应的第一侧和第二侧限定第二流体流动结构。 第二玻璃层被粘合在相应的第一玻璃层之间的夹持位置中,其中第二玻璃层的每个相应的第二流体流动结构与相应的第一玻璃层的相应的第一流体流动结构流体连通,以限定流体流动路径 用于喷射流体。
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公开(公告)号:US07655275B2
公开(公告)日:2010-02-02
申请号:US10909949
申请日:2004-08-02
CPC分类号: C03C17/00 , B29C59/16 , B29C2791/009 , B29K2995/0092 , B29K2995/0093 , C03C23/0025 , C03C2218/32 , Y10T428/31
摘要: A method of controlling flow includes treating a region of a surface to have a non-wettable surface characteristic or a wettable surface characteristic in the region.
摘要翻译: 控制流动的方法包括处理表面的区域以在该区域具有不可润湿的表面特性或可湿性表面特征。
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