Package having bond-sealed underbump
    1.
    发明授权
    Package having bond-sealed underbump 有权
    封装具有密封的底部灌封

    公开(公告)号:US07443017B2

    公开(公告)日:2008-10-28

    申请号:US11447764

    申请日:2006-06-06

    IPC分类号: H01L23/02

    CPC分类号: B81C1/00269

    摘要: A package for containing microelectromechanical devices includes a first substrate wafer, and a second substrate wafer made of an optical quality material. An underbump is interposed between the first and second substrate wafers. The underbump is composed of a standoff region and a localized bond region. The first and second substrate wafers and the underbump define a chamber that contains at least one microelectronic device.

    摘要翻译: 用于容纳微机电器件的封装包括第一衬底晶片和由光学质量材料制成的第二衬底晶片。 在第一和第二基板晶片之间插入底部凹凸。 底部凹坑由间隔区域和局部粘结区域组成。 第一和第二衬底晶片和底部凹部限定包含至少一个微电子器件的腔室。

    Package having bond-sealed underbump
    2.
    发明授权
    Package having bond-sealed underbump 有权
    封装具有密封的底部灌封

    公开(公告)号:US07067355B2

    公开(公告)日:2006-06-27

    申请号:US10854110

    申请日:2004-05-26

    IPC分类号: H01L21/50 H01L21/48 H01L21/44

    CPC分类号: B81C1/00269

    摘要: A package for containing microelectromechanical devices includes a first substrate wafer, and a second substrate wafer made of an optical quality material. An underbump is interposed between the first and second substrate wafers. The underbump is composed of a standoff region and a localized bond region. The first and second substrate wafers and the underbump define a chamber that contains at least one microelectronic device.

    摘要翻译: 用于容纳微机电器件的封装包括第一衬底晶片和由光学质量材料制成的第二衬底晶片。 在第一和第二基板晶片之间插入底部凹凸。 底部凹坑由间隔区域和局部粘结区域组成。 第一和第二衬底晶片和底部凹部限定包含至少一个微电子器件的腔室。

    Substrate and method of forming substrate for fluid ejection device
    5.
    发明授权
    Substrate and method of forming substrate for fluid ejection device 失效
    用于流体喷射装置的基板的形成基板和方法

    公开(公告)号:US07018015B2

    公开(公告)日:2006-03-28

    申请号:US10992159

    申请日:2004-11-18

    IPC分类号: B41J2/05 B41J2/14 B41J2/16

    摘要: A method of forming an opening through a substrate having a first side and a second side opposite the first side includes forming a trench in the first side of the substrate, forming a mask layer within the trench, forming at least one hole in the mask layer, filling the trench and the at least one hole, forming a first portion of the opening in the substrate from the second side of the substrate to the mask layer, and forming a second portion of the opening in the substrate from the second side of the substrate through the at least one hole in the mask layer to the first side of the substrate.

    摘要翻译: 通过具有第一侧和与第一侧相对的第二侧的衬底形成开口的方法包括在衬底的第一侧中形成沟槽,在沟槽内形成掩模层,在掩模层中形成至少一个孔 填充所述沟槽和所述至少一个孔,从所述衬底的所述第二侧到所述掩模层形成所述衬底中的所述开口的第一部分,以及从所述衬底的所述第二侧形成所述衬底中的所述开口的第二部分 衬底通过掩模层中的至少一个孔到衬底的第一侧。

    MICROFLUIDIC DEVICE AND A FLUID EJECTION DEVICE INCORPORATING THE SAME
    8.
    发明申请
    MICROFLUIDIC DEVICE AND A FLUID EJECTION DEVICE INCORPORATING THE SAME 有权
    微流体装置和与其同时进行的流体喷射装置

    公开(公告)号:US20110025782A1

    公开(公告)日:2011-02-03

    申请号:US12896980

    申请日:2010-10-04

    IPC分类号: B41J2/14

    摘要: A microfluidic device includes first and second substrates bonded together. The first substrate has first and second opposed surfaces. A die pocket is formed in the first opposed surface, and a through slot extends from the die pocket to the second opposed surface. The second substrate is bonded to the second opposed surface of the first substrate whereby an outlet of a channel formed in the second substrate substantially aligns with the through slot. The channel of the second substrate has an inlet that is larger than the outlet.

    摘要翻译: 微流体装置包括粘合在一起的第一和第二基底。 第一基板具有第一和第二相对表面。 模具袋形成在第一相对表面中,并且通孔从模腔延伸到第二相对表面。 第二基板结合到第一基板的第二相对表面,由此形成在第二基板中的通道的出口基本上与通孔对准。 第二基板的通道具有比出口大的入口。

    Method for forming a fluid ejection device
    9.
    发明授权
    Method for forming a fluid ejection device 有权
    用于形成流体喷射装置的方法

    公开(公告)号:US07766462B2

    公开(公告)日:2010-08-03

    申请号:US11677340

    申请日:2007-02-21

    IPC分类号: B41J2/045 B21D53/00

    摘要: A method of forming a fluid ejection device includes forming a pair of first glass layers and forming a second glass layer. Each first glass layer includes a first side and a second side with the second side defining a first fluid flow structure. The second glass layer includes a first side and a second side opposite the first side, with each respective first side and second side defining a second fluid flow structure. The second glass layer is bonded in a sandwiched position between the respective first glass layers with each respective second fluid flow structure of the second glass layer in fluid communication with the respective first fluid flow structure of the respective first glass layers to define a fluid flow pathway for ejecting a fluid.

    摘要翻译: 形成流体喷射装置的方法包括形成一对第一玻璃层并形成第二玻璃层。 每个第一玻璃层包括第一侧和第二侧,第二侧限定第一流体流动结构。 第二玻璃层包括与第一侧相对的第一侧和第二侧,每个相应的第一侧​​和第二侧限定第二流体流动结构。 第二玻璃层被粘合在相应的第一玻璃层之间的夹持位置中,其中第二玻璃层的每个相应的第二流体流动结构与相应的第一玻璃层的相应的第一流体流动结构流体连通,以限定流体流动路径 用于喷射流体。