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1.
公开(公告)号:US07378030B2
公开(公告)日:2008-05-27
申请号:US11041773
申请日:2005-01-24
CPC分类号: B41J2/14201 , B41J2/1433 , B41J2/1607 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1634 , B41J2/1642 , B41J2/1646 , B41J2002/1437 , B41J2202/15 , H01L41/0973 , H01L41/316 , Y10T29/49401
摘要: A method of forming an opening through a substrate having a first side and a second side opposite the first side includes forming a trench in the first side of the substrate, forming a mask layer within the trench, filling the trench with a fill material, forming a first portion of the opening in the substrate from the second side of the substrate toward the mask layer, and forming a second portion of the opening in the substrate through the mask layer and the fill material, including communicating the second portion of the opening with the first portion of the opening and the first side of the substrate.
摘要翻译: 通过具有第一侧和与第一侧相对的第二侧的衬底形成开口的方法包括在衬底的第一侧中形成沟槽,在沟槽内形成掩模层,用填充材料填充沟槽,形成 从衬底的第二侧到掩模层的衬底中的开口的第一部分,以及通过掩模层和填充材料在衬底中形成开口的第二部分,包括使开口的第二部分与第 开口的第一部分和基底的第一侧。
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公开(公告)号:US06883903B2
公开(公告)日:2005-04-26
申请号:US10348384
申请日:2003-01-21
CPC分类号: B41J2/14201 , B41J2/1433 , B41J2/1607 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1634 , B41J2/1642 , B41J2/1646 , B41J2002/1437 , B41J2202/15 , H01L41/0973 , H01L41/316 , Y10T29/49401
摘要: A method of forming an opening through a substrate having a first side and a second side opposite the first side includes forming a trench in the first side of the substrate, forming a mask layer within the trench, filling the trench with a fill material, forming a first portion of the opening in the substrate from the second side of the substrate toward the mask layer, and forming a second portion of the opening in the substrate through the mask layer and the fill material, including communicating the second portion of the opening with the first portion of the opening and the first side of the substrate.
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公开(公告)号:US20050212868A1
公开(公告)日:2005-09-29
申请号:US10810270
申请日:2004-03-26
摘要: The described embodiments relate to fluid-ejection devices and methods of forming same. One exemplary embodiment includes a plurality of fluid drop generators and associated electrically conductive paths, and at least one electron beam generation assembly configured to selectively direct at least one electron beam at individual electrically conductive paths sufficiently to cause fluid to be ejected from an associated fluid drop generator.
摘要翻译: 所描述的实施例涉及流体喷射装置及其形成方法。 一个示例性实施例包括多个流体液滴发生器和相关联的导电路径,以及至少一个电子束产生组件,被配置为在各个导电路径下选择性地引导至少一个电子束,以使流体从相关联的液滴 发电机。
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公开(公告)号:US20060264055A1
公开(公告)日:2006-11-23
申请号:US11492518
申请日:2006-07-24
申请人: Steven Leith , Jeffrey Obert , Eric Nikkel , Kenneth Kramer
发明人: Steven Leith , Jeffrey Obert , Eric Nikkel , Kenneth Kramer
IPC分类号: H01L21/302
CPC分类号: B41J2/1603 , B41J2/1628 , B41J2/1632 , B41J2/1634
摘要: A method of forming a slot in a substrate comprises growing an oxide layer on a first side of a substrate, patterning and etching the oxide layer to form an opening, forming a material overlying the opening and the oxide layer, removing substrate material through a second side to a first distance from the first side, and anisotropic etching the substrate to create a substrate opening at the first side which is aligned with the opening in the oxide layer during anisotropic etching. The material overlying the opening and the oxide layer is selected so that an anisotropic etch rate of the substrate at an interface of the material and the substrate is greater than an anisotropic etch rate of the substrate at an interface of the oxide layer and the substrate.
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5.
公开(公告)号:US20050157096A1
公开(公告)日:2005-07-21
申请号:US11041773
申请日:2005-01-24
申请人: Martha Truninger , Charles Haluzak , Steven Leith
发明人: Martha Truninger , Charles Haluzak , Steven Leith
CPC分类号: B41J2/14201 , B41J2/1433 , B41J2/1607 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1634 , B41J2/1642 , B41J2/1646 , B41J2002/1437 , B41J2202/15 , H01L41/0973 , H01L41/316 , Y10T29/49401
摘要: A method of forming an opening through a substrate having a first side and a second side opposite the first side includes forming a trench in the first side of the substrate, forming a mask layer within the trench, filling the trench with a fill material, forming a first portion of the opening in the substrate from the second side of the substrate toward the mask layer, and forming a second portion of the opening in the substrate through the mask layer and the fill material, including communicating the second portion of the opening with the first portion of the opening and the first side of the substrate.
摘要翻译: 通过具有第一侧和与第一侧相对的第二侧的衬底形成开口的方法包括在衬底的第一侧中形成沟槽,在沟槽内形成掩模层,用填充材料填充沟槽,形成 从衬底的第二侧到掩模层的衬底中的开口的第一部分,以及通过掩模层和填充材料在衬底中形成开口的第二部分,包括使开口的第二部分与第 开口的第一部分和基底的第一侧。
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公开(公告)号:US06822379B2
公开(公告)日:2004-11-23
申请号:US10262808
申请日:2002-10-01
IPC分类号: H01J102
CPC分类号: H01J1/312 , B82Y10/00 , G11B9/10 , H01J1/3044 , H01J3/022 , H01J9/025 , H01J2201/30426
摘要: An emission device includes a plurality of electron emitter structures of varied geometry that have a conducting layer deposited thereon. The conducting layer has openings located at tunneling sites for each of the electron emitter structures. The tunneling sites facilitate electron emissions from each of the varied geometry electron emitter structures upon voltage biasing of the conducting layer relative to the electron emitter structures.
摘要翻译: 发射装置包括具有沉积在其上的导电层的多种几何形状的电子发射体结构。 导电层具有位于每个电子发射器结构的隧道位置处的开口。 隧道位置有助于在导电层相对于电子发射体结构的电压偏置时来自各种不同的几何形状的电子发射体结构的电子发射。
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公开(公告)号:US20060094200A1
公开(公告)日:2006-05-04
申请号:US10977090
申请日:2004-10-29
申请人: Steven Leith , Jeffrey Obert , Eric Nikkel , Kenneth Kramer
发明人: Steven Leith , Jeffrey Obert , Eric Nikkel , Kenneth Kramer
IPC分类号: H01L21/76
CPC分类号: B41J2/1603 , B41J2/1628 , B41J2/1632 , B41J2/1634
摘要: A method of forming a slot in a substrate comprises growing an oxide layer on a first side of a substrate, patterning and etching the oxide layer to form an opening, forming a material overlying the opening and the oxide layer, removing substrate material through a second side to a first distance from the first side, and anisotropic etching the substrate to create a substrate opening at the first side which is aligned with the opening in the oxide layer during anisotropic etching. The material overlying the opening and the oxide layer is selected so that an anisotropic etch rate of the substrate at an interface of the material and the substrate is greater than an anisotropic etch rate of the substrate at an interface of the oxide layer and the substrate.
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公开(公告)号:US20060030149A1
公开(公告)日:2006-02-09
申请号:US10912888
申请日:2004-08-06
申请人: Steven Leith , Gregory Herman
发明人: Steven Leith , Gregory Herman
IPC分类号: H01L21/44
CPC分类号: H01L21/288 , G02F2001/136295 , G03F7/00 , H01L21/76838 , H01L51/0097 , Y02E10/549
摘要: Embodiments of methods, apparatuses, devices, and/or systems for depositing a first material on photosensitive material are described.
摘要翻译: 描述了用于在感光材料上沉积第一材料的方法,装置,装置和/或系统的实施例。
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公开(公告)号:US20050012772A1
公开(公告)日:2005-01-20
申请号:US10619639
申请日:2003-07-15
申请人: Martha Truninger , Steven Leith , Jeffery Hess
发明人: Martha Truninger , Steven Leith , Jeffery Hess
CPC分类号: B41J2/1629 , B41J2/1603 , B41J2/1628 , B41J2/1634
摘要: A method of forming an opening through a substrate having a first side and a second side opposite the first side includes forming spaced stops in the first side of the substrate, partially forming a first portion of the opening in the substrate from the second side by a first process, further forming the first portion of the opening in the substrate from the second side by a second process, including forming the first portion of the opening to the spaced stops, and forming a second portion of the opening in the substrate from the first side, including forming the second portion of the opening between the spaced stops.
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