Method and apparatus for precisely dimensioning pole tips of a magnetic
transducing head structure
    1.
    发明授权
    Method and apparatus for precisely dimensioning pole tips of a magnetic transducing head structure 失效
    磁传感头结构的极尖的精确尺寸的方法和装置

    公开(公告)号:US5752309A

    公开(公告)日:1998-05-19

    申请号:US663839

    申请日:1996-06-14

    IPC分类号: G11B5/187 G11B5/31 G11B5/127

    摘要: A method and apparatus for processing a magnetic transducer which uses gallium ion beam milling to precisely define pole tip widths of the magnetic transducer. The gallium ion beam may be defocused to improve definition of the region which is damaged by gallium ion implantation. The precision pole tip widths provide a transducer that may record correspondingly precise track widths on a magnetic storage medium, such as a rotating disk. Subsequent to the ion milling process, the invention restores the magnetically conductive properties of the pole tip region, which may be degraded as a result of the ion milling process, by means of a lapping process.

    摘要翻译: 一种用于处理磁换能器的方法和装置,其使用镓离子束铣削精确地限定磁换能器的极尖宽度。 镓离子束可以散焦以改善由镓离子注入损坏的区域的定义。 精密磁极尖端宽度提供了可在磁存储介质(例如旋转盘)上记录对应的精确轨道宽度的换能器。 在离子研磨过程之后,本发明通过研磨工艺恢复极尖区域的导磁性能,其可能由于离子铣削过程而劣化。

    ELECTRONIC DEVICE PACKAGE AND METHOD OF FORMATION
    3.
    发明申请
    ELECTRONIC DEVICE PACKAGE AND METHOD OF FORMATION 审中-公开
    电子设备包装和形成方法

    公开(公告)号:US20090154872A1

    公开(公告)日:2009-06-18

    申请号:US12338918

    申请日:2008-12-18

    IPC分类号: G02B6/12 G02B7/00 H05K5/06

    摘要: Provided are electronic device packages and their methods of formation. The electronic device packages include a sealed volume enclosing an electronic device and a feedthrough into the sealed volume for electrical connection of the electronic device. Provided are optoelectronic device packages and their methods of formation. The optoelectronic device packages include a first substrate and lid attached to the first substrate forming an enclosed volume. An optoelectronic device is disposed within the enclosed volume and a wick stop for preventing solder flow is provided. Provided are prism-coupled optical assemblies which allow for the coupling of light between an optical component, such as a laser, and an integrated optical waveguide through a prism.

    摘要翻译: 提供电子器件封装及其形成方法。 电子设备包装包括封闭电子设备的密封容积和用于电子设备的电连接的密封容积中的馈通。 提供了光电器件封装及其形成方法。 光电子器件封装包括附接到第一衬底的第一衬底和盖,形成封闭容积。 光电子器件设置在封闭容积内,并提供防止焊料流动的芯吸止动件。 提供了棱镜耦合的光学组件,其允许光学部件(例如激光器)与通过棱镜的集成光波导之间的光耦合。

    Silicon optical bench OCT probe for medical imaging
    4.
    发明授权
    Silicon optical bench OCT probe for medical imaging 有权
    硅光学台用于医学成像的OCT探针

    公开(公告)号:US08515221B2

    公开(公告)日:2013-08-20

    申请号:US12693181

    申请日:2010-01-25

    IPC分类号: G02B6/26

    摘要: An optical probe for emitting and/or receiving light within a body comprises an optical fiber that transmits and/or receives an optical signal, a silicon optical bench including a fiber groove running longitudinally that holds an optical fiber termination of the optical fiber and a reflecting surface that optically couples an endface of the optical fiber termination to a lateral side of the optical bench. The fiber groove is fabricated using silicon anisotropic etching techniques. Some examples use a housing around the optical bench that is fabricated using LIGA or other electroforming technology. A method for forming lens structure is also described that comprises forming a refractive lens in a first layer of a composite wafer material, such as SOI (silicon on insulator) wafers and forming an optical port through a backside of the composite wafer material along an optical axis of the refractive lens. the refractive lens is preferably formed using grey-scale lithography and dry etching the first layer.

    摘要翻译: 用于在体内发射和/或接收光的光学探针包括传输和/或接收光信号的光纤,包括纵向延伸的光纤槽的硅光学台,其保持光纤的光纤端接和反射 表面,其将光纤端接件的端面光学耦合到光学平台的侧面。 使用硅各向异性蚀刻技术制造纤维槽。 一些例子使用使用LIGA或其他电铸技术制造的光学平台周围的外壳。 还描述了一种用于形成透镜结构的方法,其包括在诸如SOI(绝缘体上硅)晶片的复合晶片材料的第一层中形成折射透镜,并且沿着光学器件通过复合晶片材料的背面形成光学端口 折射透镜的轴线。 折射透镜优选使用灰度光刻形成并且对第一层进行干蚀刻。

    Electronic device packages and methods of formation
    5.
    发明申请
    Electronic device packages and methods of formation 有权
    电子器件封装和形成方法

    公开(公告)号:US20090256251A1

    公开(公告)日:2009-10-15

    申请号:US12072157

    申请日:2008-02-25

    IPC分类号: H01L23/10 H01L21/50

    摘要: Provided are electronic device packages and their methods of formation. The electronic device packages include an electronic device mounted on a substrate, a conductive via and a locally thinned region in the substrate. The invention finds application, for example, in the electronics industry for hermetic packages containing an electronic device such as an IC, optoelectronic or MEMS device.

    摘要翻译: 提供电子器件封装及其形成方法。 电子器件封装包括安装在衬底上的电子器件,衬底中的导电通孔和局部变薄的区域。 本发明可应用于电子工业中用于包含诸如IC,光电子或MEMS器件的电子器件的气密封装。

    Mechanically Balanced Optical Membrane Device for Orientation Insensitivity
    6.
    发明申请
    Mechanically Balanced Optical Membrane Device for Orientation Insensitivity 有权
    用于定向不敏感的机械平衡光学膜装置

    公开(公告)号:US20130301098A1

    公开(公告)日:2013-11-14

    申请号:US13467787

    申请日:2012-05-09

    IPC分类号: G02B26/08

    CPC分类号: G02B26/001 G02B26/0825

    摘要: An optical membrane device comprises a substrate, at least one support block on a surface of the substrate, and at least one plate. A torsion beam supports the plate above the substrate on the support block. The optical membrane device also includes an optical membrane structure supported by the plate above the substrate and at least one electrode on the substrate underneath the plate. In one implementation, the optical membrane device further comprises a tether for coupling the optical membrane structure to the plate. The tether extends between the optical membrane structure and the plate. In another implementation, the substrate of the optical membrane device has an optical port through the substrate directly below the optical membrane structure. The plate is substantially balanced around the torsion beam to minimize a sensitivity to orientation in a gravitational field.

    摘要翻译: 光学膜装置包括基底,在基底表面上的至少一个支撑块和至少一个板。 扭力梁将支撑块上的基板上方的板支撑。 光学膜装置还包括由基板上方的板支撑的光学膜结构和在板下方的基板上的至少一个电极。 在一个实施方式中,光学膜装置还包括用于将光学膜结构耦合到板的系绳。 系绳在光学膜结构和板之间延伸。 在另一实施方式中,光学膜装置的基板具有通过光学膜结构正下方的基板的光学端口。 该板在扭转梁周围基本平衡,以最小化对重力场中的取向的敏感性。

    Tunable Filter with Levered Membrane and Longer Scan Length
    9.
    发明申请
    Tunable Filter with Levered Membrane and Longer Scan Length 有权
    带有滤膜的可调滤波器和更长的扫描长度

    公开(公告)号:US20130314794A1

    公开(公告)日:2013-11-28

    申请号:US13481340

    申请日:2012-05-25

    IPC分类号: G02B27/00

    CPC分类号: G02B26/001

    摘要: A Fabry-Perot tunable filter comprises a membrane device. The membrane device includes a support structure having an optical port. Also, the membrane device has an optical membrane structure separated from the support structure over the optical port. The optical membrane structure includes a center body portion and an outer body potion. Tethers extend radially from the center body portion to the outer body portion of the optical membrane structure. The center body portion has an area that is about equal or smaller than the area of the optical port.

    摘要翻译: 法布里 - 珀罗可调滤波器包括膜装置。 膜装置包括具有光学端口的支撑结构。 此外,膜装置具有与光学端口上的支撑结构分离的光学膜结构。 光学膜结构包括中心体部和外体部。 束带从中心体部径向延伸到光学膜结构的外主体部分。 中心体部分具有等于或小于光学端口面积的区域。

    Silicon Optical Bench OCT Probe for Medical Imaging
    10.
    发明申请
    Silicon Optical Bench OCT Probe for Medical Imaging 有权
    硅光学台面OCT医用成像探头

    公开(公告)号:US20110182550A1

    公开(公告)日:2011-07-28

    申请号:US12693181

    申请日:2010-01-25

    IPC分类号: G02B6/26 B29C65/72 B29D11/00

    摘要: An optical probe for emitting and/or receiving light within a body comprises an optical fiber that transmits and/or receives an optical signal, a silicon optical bench including a fiber groove running longitudinally that holds an optical fiber termination of the optical fiber and a reflecting surface that optically couples an endface of the optical fiber termination to a lateral side of the optical bench. The fiber groove is fabricated using silicon anisotropic etching techniques. Some examples use a housing around the optical bench that is fabricated using LIGA or other electroforming technology. A method for forming lens structure is also described that comprises forming a refractive lens in a first layer of a composite wafer material, such as SOI (silicon on insulator) wafers and forming an optical port through a backside of the composite wafer material along an optical axis of the refractive lens. the refractive lens is preferably formed using grey-scale lithography and dry etching the first layer.

    摘要翻译: 用于在体内发射和/或接收光的光学探针包括透射和/或接收光信号的光纤,包括纵向延伸的光纤槽的硅光学台,其保持光纤的光纤终端和反射 表面,其将光纤端接件的端面光学耦合到光学平台的侧面。 使用硅各向异性蚀刻技术制造纤维槽。 一些例子使用使用LIGA或其他电铸技术制造的光学平台周围的外壳。 还描述了一种用于形成透镜结构的方法,其包括在诸如SOI(绝缘体上硅)晶片的复合晶片材料的第一层中形成折射透镜,并沿着光学器件通过复合晶片材料的背面形成光学端口 折射透镜的轴线。 折射透镜优选使用灰度光刻形成并且对第一层进行干蚀刻。