公开(公告)号：US06934131B2

公开(公告)日：2005-08-23

申请号：US10341281

申请日：2003-01-13

申请人： Ming Mao ,  Adrian J. Devasahayam ,  Jacques C. S. Kools ,  Chih-Ling Lee ,  Chih-Ching Hu ,  Patricia L. Cox

发明人： Ming Mao ,  Adrian J. Devasahayam ,  Jacques C. S. Kools ,  Chih-Ling Lee ,  Chih-Ching Hu ,  Patricia L. Cox

IPC分类号： G11B5/39

CPC分类号： B82Y25/00 ,  B82Y10/00 ,  G11B5/3906 ,  G11B2005/3996 ,  Y10T29/49044

摘要： A thermally stable spin valve sensor having an increased GMR ratio by virtue of an AP pinned layer structure in which the first and second pinned layers are separated by an AP coupling layer having a nano-oxide layer formed as an oxidized surface portion of the AP coupling layer. The nano-oxide layer provides an increase in the specular scattering, and in turn, an increase in the GMR ratio.

摘要翻译： 一种热稳定的自旋阀传感器，其具有通过AP钉扎层结构增加的GMR比，其中第一和第二被钉扎层由具有形成为AP耦合器的氧化表面部分的纳米氧化物层的AP耦合层分开 层。 纳米氧化物层提供了镜面散射的增加，并且进而增加了GMR比。

公开(公告)号：US06800565B2

公开(公告)日：2004-10-05

申请号：US10341282

申请日：2003-01-13

申请人： Chih-Ching Hu ,  Adrian J. Devasahayam ,  Patricia L. Cox ,  Chih-Ling Lee ,  Ming Mao ,  Jacques C. S. Kools

发明人： Chih-Ching Hu ,  Adrian J. Devasahayam ,  Patricia L. Cox ,  Chih-Ling Lee ,  Ming Mao ,  Jacques C. S. Kools

IPC分类号： H01L2131

CPC分类号： C23C14/5833 ,  C23C8/02 ,  C23C26/00 ,  C23C28/00 ,  G11B5/84

摘要： A method of forming a thin-film magnetic element, such as a TMR element or a spin valve element, on a substrate wherein at least a surface portion of a nonmagnetic metal layer is oxidized by cluster ion beam (CIB) oxidation. Specifically, the method comprises depositing a first magnetic layer on a substrate, then depositing a nonmagnetic metal layer on the first magnetic layer. At least a top surface of the nonmagnetic layer is oxidized by CIB oxidation. In one embodiment, only a top surface portion is oxidized such that a nano-oxide layer (NOL) is formed on a nonmagnetic conductive layer. In another embodiment, the nonmagnetic metal layer is oxidized throughout it's thickness such that the layer is converted to a nonmagnetic insulating film. After oxidation, a second magnetic layer is deposited on the oxidized layer. Oxidizing by cluster ion beam oxidation advantageously comprises mixing a pressurized inert carrier gas with oxygen gas to form a gas mixture and passing the gas mixture into a low pressure vacuum to produce a supersonic gas jet, whereby expansion occurs in the jet to cause formation of clusters of inert gas and oxygen atoms and molecules. The clusters are then ionized and focused into a cluster ion beam and accelerated toward the top surface of the nonmagnetic metal layer to bombard the top surface and react the ionized oxygen atoms and molecules with at least the top surface of the nonmagnetic metal layer.

公开(公告)号：US06716322B1

公开(公告)日：2004-04-06

申请号：US10126928

申请日：2002-04-19

申请人： Hari Hedge ,  Alan V. Hayes ,  Boris Druz ,  Viktor Kanarov ,  Adrian J. Devasahayam ,  Emmanuel Lakios

发明人： Hari Hedge ,  Alan V. Hayes ,  Boris Druz ,  Viktor Kanarov ,  Adrian J. Devasahayam ,  Emmanuel Lakios

IPC分类号： C23C1434

CPC分类号： C23C14/225 ,  C23C14/044

摘要： A deposition system includes a substrate holder supporting a substrate defining at least one topographical feature. In addition, the system includes a deposition plume that is directed toward the substrate. A first profiler mask is positioned between the deposition plume and the substrate, and is shaped so as to reduce inboard/outboard asymmetry in a deposition profile associated with the feature.

摘要翻译： 沉积系统包括支撑限定至少一个形貌特征的衬底的衬底保持器。 此外，该系统包括指向基板的沉积羽流。 第一轮廓仪掩模位于沉积羽流和基底之间，并且被成形为在与该特征相关联的沉积轮廓中减小内侧/外侧不对称。