公开(公告)号：US06934131B2

公开(公告)日：2005-08-23

申请号：US10341281

申请日：2003-01-13

申请人： Ming Mao ,  Adrian J. Devasahayam ,  Jacques C. S. Kools ,  Chih-Ling Lee ,  Chih-Ching Hu ,  Patricia L. Cox

发明人： Ming Mao ,  Adrian J. Devasahayam ,  Jacques C. S. Kools ,  Chih-Ling Lee ,  Chih-Ching Hu ,  Patricia L. Cox

IPC分类号： G11B5/39

CPC分类号： B82Y25/00 ,  B82Y10/00 ,  G11B5/3906 ,  G11B2005/3996 ,  Y10T29/49044

摘要： A thermally stable spin valve sensor having an increased GMR ratio by virtue of an AP pinned layer structure in which the first and second pinned layers are separated by an AP coupling layer having a nano-oxide layer formed as an oxidized surface portion of the AP coupling layer. The nano-oxide layer provides an increase in the specular scattering, and in turn, an increase in the GMR ratio.

摘要翻译： 一种热稳定的自旋阀传感器，其具有通过AP钉扎层结构增加的GMR比，其中第一和第二被钉扎层由具有形成为AP耦合器的氧化表面部分的纳米氧化物层的AP耦合层分开 层。 纳米氧化物层提供了镜面散射的增加，并且进而增加了GMR比。

公开(公告)号：US06800565B2

公开(公告)日：2004-10-05

申请号：US10341282

申请日：2003-01-13

申请人： Chih-Ching Hu ,  Adrian J. Devasahayam ,  Patricia L. Cox ,  Chih-Ling Lee ,  Ming Mao ,  Jacques C. S. Kools

发明人： Chih-Ching Hu ,  Adrian J. Devasahayam ,  Patricia L. Cox ,  Chih-Ling Lee ,  Ming Mao ,  Jacques C. S. Kools

IPC分类号： H01L2131

CPC分类号： C23C14/5833 ,  C23C8/02 ,  C23C26/00 ,  C23C28/00 ,  G11B5/84

摘要： A method of forming a thin-film magnetic element, such as a TMR element or a spin valve element, on a substrate wherein at least a surface portion of a nonmagnetic metal layer is oxidized by cluster ion beam (CIB) oxidation. Specifically, the method comprises depositing a first magnetic layer on a substrate, then depositing a nonmagnetic metal layer on the first magnetic layer. At least a top surface of the nonmagnetic layer is oxidized by CIB oxidation. In one embodiment, only a top surface portion is oxidized such that a nano-oxide layer (NOL) is formed on a nonmagnetic conductive layer. In another embodiment, the nonmagnetic metal layer is oxidized throughout it's thickness such that the layer is converted to a nonmagnetic insulating film. After oxidation, a second magnetic layer is deposited on the oxidized layer. Oxidizing by cluster ion beam oxidation advantageously comprises mixing a pressurized inert carrier gas with oxygen gas to form a gas mixture and passing the gas mixture into a low pressure vacuum to produce a supersonic gas jet, whereby expansion occurs in the jet to cause formation of clusters of inert gas and oxygen atoms and molecules. The clusters are then ionized and focused into a cluster ion beam and accelerated toward the top surface of the nonmagnetic metal layer to bombard the top surface and react the ionized oxygen atoms and molecules with at least the top surface of the nonmagnetic metal layer.

公开(公告)号：US20070045102A1

公开(公告)日：2007-03-01

申请号：US11209907

申请日：2005-08-23

申请人： Chih-Ling Lee ,  Adrian Devasahayam ,  Ming Mao ,  Chih-Ching Hu ,  Vincent Ip ,  Piero Sferlazzo

发明人： Chih-Ling Lee ,  Adrian Devasahayam ,  Ming Mao ,  Chih-Ching Hu ,  Vincent Ip ,  Piero Sferlazzo

IPC分类号： C23C14/00

CPC分类号： C23C14/352 ,  C23C14/165

摘要： An improved planetary sputter deposition method for sputter depositing an alloy on a substrate wherein the sputter deposited amount, or thickness, of a specific material of the alloy can be controlled so that different substrates can be provided with an alloy having a different composition, i.e. having different percentages of the same materials, thus, reducing the costs of stockpiling multiple alloy targets. The method generally includes providing a substrate and a plurality of targets with each of the plurality of targets being composed of one or more magnetic materials. The targets are sputtered, in sequence, to deposit each of the materials of the plurality of targets on the substrate to provide at least one laminate defining an alloy.

摘要翻译： 一种用于在基板上溅射沉积合金的改进的行星溅射沉积方法，其中可以控制合金的特定材料的溅射沉积量或厚度，使得可以提供具有不同组成的合金，即具有 不同百分比的相同材料，从而降低储存多种合金靶材的成本。 该方法通常包括提供基底和多个靶，其中多个靶中的每一个由一个或多个磁性材料构成。 按顺序溅射靶，以将多个靶材的每种材料沉积在基底上，以提供限定合金的至少一个层压板。

公开(公告)号：US08630068B1

公开(公告)日：2014-01-14

申请号：US13296970

申请日：2011-11-15

申请人： Daniele Mauri ,  Chih-Ching Hu ,  Ming Mao ,  Kuok San Ho ,  Savas Gider

发明人： Daniele Mauri ,  Chih-Ching Hu ,  Ming Mao ,  Kuok San Ho ,  Savas Gider

IPC分类号： G11B5/39

CPC分类号： G11B5/3909 ,  B82Y10/00 ,  G11B5/3912 ,  G11B2005/3996

摘要： A method and system for providing a magnetic transducer having an air-bearing surface (ABS) is described. The magnetic read transducer includes a first shield, a magnetoresistive sensor, at least one soft magnetic side shield, and a second shield. The magnetoresistive sensor includes a sensor layer having at least one edge in the track width direction along the ABS. The at least one soft magnetic side shield is adjacent to the at least one edge of the sensor layer. The at least one soft magnetic side shield has a full film permeability of at least ten. The magnetoresistive sensor is between the first shield and the second shield and free of an in-stack hard bias layer.

摘要翻译： 描述了一种用于提供具有空气轴承表面（ABS）的磁换能器的方法和系统。 磁读取传感器包括第一屏蔽，磁阻传感器，至少一个软磁侧屏蔽和第二屏蔽。 磁阻传感器包括具有沿ABS的轨道宽度方向上的至少一个边缘的传感器层。 所述至少一个软磁侧屏蔽件邻近所述传感器层的所述至少一个边缘。 所述至少一个软磁侧屏具有至少十个全透膜度。 磁阻传感器位于第一屏蔽和第二屏蔽之间，并且没有堆叠内的硬偏置层。

公开(公告)号：US08607438B1

公开(公告)日：2013-12-17

申请号：US13309357

申请日：2011-12-01

申请人： Wei Gao ,  Guanxiong Li ,  Ming Mao ,  Chih-Ching Hu ,  Guanghong Luo ,  Miao Wang ,  Zhihong Zhang ,  Anup G. Roy

发明人： Wei Gao ,  Guanxiong Li ,  Ming Mao ,  Chih-Ching Hu ,  Guanghong Luo ,  Miao Wang ,  Zhihong Zhang ,  Anup G. Roy

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/3903 ,  G01R33/093 ,  G11B5/3163

摘要： A read sensor for a transducer is fabricated. The transducer has a field region and a sensor region corresponding to the sensor. A sensor stack is deposited. A hybrid mask including hard and field masks is provided. The hard mask includes a sensor portion covering the sensor region and a field portion covering the field region. The field mask covers the field portion of the hard mask. The field mask exposes the sensor portion of the hard mask and part of the sensor stack between the sensor and field regions. The sensor is defined from the sensor stack in a track width direction. Hard bias layer(s) are deposited. Part of the hard bias layer(s) resides on the field mask. Part of the hard bias layer(s) adjoining the sensor region is sealed. The field mask is lifted off. The transducer is planarized.

摘要翻译： 制造用于换能器的读取传感器。 传感器具有对应于传感器的场区域和传感器区域。 传感器堆叠被沉积。 提供了包括硬掩模和磁场掩模的混合掩模。 硬掩模包括覆盖传感器区域的传感器部分和覆盖场区域的场部分。 场掩模覆盖硬掩模的场部分。 场掩模将传感器和场区域之间的硬掩模的传感器部分和传感器堆叠的一部分暴露。 传感器从传感器堆叠在轨道宽度方向上定义。 硬偏置层被沉积。 硬偏置层的一部分位于场掩模上。 邻近传感器区域的一部分硬偏压层被密封。 场地面罩被提起。 传感器平坦化。

公开(公告)号：US20090109068A1

公开(公告)日：2009-04-30

申请号：US12289351

申请日：2008-10-27

申请人： Chih-Hsien Yeh ,  Chih-Ching Hu ,  Jeremy Casey Liu

发明人： Chih-Hsien Yeh ,  Chih-Ching Hu ,  Jeremy Casey Liu

IPC分类号： H03K17/94 ,  G06F3/041

CPC分类号： H03K17/9622 ,  G06F3/045 ,  G06F3/047 ,  G06F3/04886 ,  H03K2217/96079

摘要： A touch control input device includes a flexible dielectric touch plate disposed above a dielectric substrate. A conducting unit includes first conductive membrane patterns formed on a top surface of the substrate and spaced apart from each other, and second conductive membrane patterns formed on a bottom surface of the touch plate and corresponding respectively to the first conductive membrane patterns. A spacer is disposed between the substrate and the touch plate for spacing each first conductive membrane pattern apart from the corresponding second conductive membrane pattern. Pressing of the touch plate so that at least one first conductive membrane pattern electrically contacts the corresponding second conductive membrane pattern results in outputting of an input signal by the conducting unit. One of the substrate and the touch plate is formed with a predetermined pattern that is visible from above the touch plate.

摘要翻译： 触摸控制输入装置包括设置在电介质基板上方的柔性电介质触摸板。 导电单元包括形成在基板的顶表面上彼此间隔开的第一导电膜图案，以及形成在触摸板的底表面上并分别对应于第一导电膜图案的第二导电膜图案。 间隔件设置在基板和触摸板之间，用于将每个第一导电膜图案与相应的第二导电膜图案分开。 按压触摸板，使得至少一个第一导电膜图案与相应的第二导电膜图案电接触导致导电单元输出输入信号。 基板和触摸板之一形成有从触摸板的上方可见的预定图案。