公开(公告)号：US20130091949A1

公开(公告)日：2013-04-18

申请号：US13484681

申请日：2012-05-31

申请人： Chih-Wei HUANG ,  Chieh-Pin CHANG ,  Ja-Hao CHEN ,  Chuan-Jane CHAO ,  Ying-Zong JUANG ,  Shyh-Chyi WONG ,  Yeong-Her WANG

发明人： Chih-Wei HUANG ,  Chieh-Pin CHANG ,  Ja-Hao CHEN ,  Chuan-Jane CHAO ,  Ying-Zong JUANG ,  Shyh-Chyi WONG ,  Yeong-Her WANG

IPC分类号： G01P15/09

CPC分类号： G01P15/0802 ,  G01P15/123 ,  G01P2015/0837

摘要： A pizeoresistive type Z-axis accelerometer is provided, including a substrate; a plurality of anchors formed over the substrate; a plurality of cantilever beams, wherein the cantilever beams include a piezoresistive material; and a proof mass, wherein the proof mass is suspended over the substrate by respectively connecting the proof mass with the anchors, and the accelerometer senses a movement of the proof mass by the piezoresistive material.

摘要翻译： 提供了一种包括基板的等离子体型Z轴加速度计， 形成在所述基板上的多个锚固件; 多个悬臂梁，其中所述悬臂梁包括压阻材料; 以及证明物质，其中通过分别将证明物质与锚固件连接，将证明物料悬浮在基材上，并且加速度计通过压阻材料感测证明物质的移动。

公开(公告)号：US20120285245A1

公开(公告)日：2012-11-15

申请号：US13458359

申请日：2012-04-27

申请人： Chih-Wei HUANG ,  Chieh-Pin CHANG ,  Ja-Hao CHEN ,  Chuan-Jane CHAO ,  Ying-Zong JUANG ,  Shyh-Chyi WONG ,  Yeong-Her WANG

发明人： Chih-Wei HUANG ,  Chieh-Pin CHANG ,  Ja-Hao CHEN ,  Chuan-Jane CHAO ,  Ying-Zong JUANG ,  Shyh-Chyi WONG ,  Yeong-Her WANG

IPC分类号： G01P15/125

CPC分类号： G01P15/125 ,  G01P2015/0814

摘要： A sensing apparatus includes an acceleration sensing unit, for measuring an acceleration applied to a proof mass, further including: a proof mass; a carrier signal source, for providing a carrier signal; a capacitive half-bridge, including a first and a second capacitor, wherein each capacitor is coupled to the proof mass and the carrier signal source, one with a positive electrode and the other one with a negative electrode, and the acceleration applied to the proof mass makes the carrier signal flow through the first and the second capacitor so that the first capacitor and the second capacitor respectively generates a first voltage and a second voltage variation which have opposite phases with each other; and an instrumentation amplifier, for receiving and amplifying the first voltage and the second voltage variation, whereby the magnitude and the direction of the acceleration applied to the proof mass is determined.

摘要翻译： 感测装置包括加速度检测单元，用于测量施加到检验质量块的加速度，还包括：检验质量块; 载波信号源，用于提供载波信号; 包括第一和第二电容器的电容半桥，其中每个电容器耦合到检测质量块和载波信号源，一个具有正电极，另一个与负电极耦合，并且加速度应用于证明 质量使得载流子信号流过第一和第二电容器，使得第一电容器和第二电容器分别产生彼此具有相反相位的第一电压和第二电压变化; 以及用于接收和放大第一电压和第二电压变化的仪表放大器，由此确定施加到检验质量块的加速度的大小和方向。