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公开(公告)号：US07545842B2
公开(公告)日：2009-06-09
申请号：US11524337
申请日：2006-09-20
IPC分类号： H01S3/097
CPC分类号： H01S3/09713 , H01S3/0315 , H01S3/0384 , H01S3/0385 , H01S3/2232
摘要： In a CO2 laser a pre-ionizer is assembled in a flange configured to be attached to a laser-gas enclosure of the laser over an aperture in a wall of the enclosure. An aperture in the base of the flange is aligned over the aperture in the enclosure wall. The aperture in the pre-ionizer flange is covered by a ceramic membrane. A disc electrode is in contact with the ceramic membrane on a side of the membrane outside of the laser-gas enclosure. An RF potential applied to the disc electrode creates a corona discharge on the side of the ceramic membrane inside the enclosure. The corona discharge ionizes laser gas in the enclosure before RF power is applied to electrodes of the slab laser.
摘要翻译： 在CO2激光器中，预电离器组装在凸缘中，凸缘被配置成在外壳的壁上的孔上附接到激光器的激光气体外壳。 凸缘底部的孔径对准外壳壁上的孔。 预电除法器法兰中的孔径被陶瓷膜覆盖。 圆盘电极与激光 - 气体外壳外侧的膜侧的陶瓷膜接触。 施加到盘形电极的RF电势在外壳内部的陶瓷膜侧产生电晕放电。 在将RF功率施加到平板激光器的电极之前，电晕放电使外壳中的激光气体电离。
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公开(公告)号：US20080069170A1
公开(公告)日：2008-03-20
申请号：US11524337
申请日：2006-09-20
IPC分类号： H01S3/03
CPC分类号： H01S3/09713 , H01S3/0315 , H01S3/0384 , H01S3/0385 , H01S3/2232
摘要： In a CO2 laser a pre-ionizer is assembled in a flange configured to be attached to a laser-gas enclosure of the laser over an aperture in a wall of the enclosure. An aperture in the base of the flange is aligned over the aperture in the enclosure wall. The aperture in the pre-ionizer flange is covered by a ceramic membrane. A disc electrode is in contact with the ceramic membrane on a side of the membrane outside of the laser-gas enclosure. An RF potential applied to the disc electrode creates a corona discharge on the side of the ceramic membrane inside the enclosure. The corona discharge ionizes laser gas in the enclosure before RF power is applied to electrodes of the slab laser.
摘要翻译： 在CO 2激光器中，预电离器组装在凸缘中，该凸缘被配置成在外壳的壁上的孔上连接到激光器的激光气体外壳。 凸缘底部的孔径对准外壳壁上的孔。 预电除法器法兰中的孔径被陶瓷膜覆盖。 圆盘电极与激光 - 气体外壳外侧的膜侧的陶瓷膜接触。 施加到盘形电极的RF电势在外壳内部的陶瓷膜侧产生电晕放电。 在将RF功率施加到平板激光器的电极之前，电晕放电使外壳中的激光气体电离。
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公开(公告)号：US07970038B2
公开(公告)日：2011-06-28
申请号：US12166640
申请日：2008-07-02
IPC分类号： H01S3/03
CPC分类号： H01S3/0385 , H01S3/2232
摘要： An RF excited gas discharge laser is disclosed including a housing holding the lasing gas. An electrode assembly is mounted within the housing. The electrode assembly includes a pair of elongated planar electrodes mounted in face to face relationship with a narrow gap therebetween. A pair of planar dielectric plates are positioned along the side edges of the gap to seal the discharge region. The plates extend part of the way into the gap from both sides edges of the electrodes. The inner surfaces of the electrodes are provided with an opposed trench in the region surrounding the inner edges of the plates. In this way, the exposure of the inner edges of the plates to the discharge is minimized improving performance.
摘要翻译： 公开了一种RF激励气体放电激光器，其包括保持激光气体的壳体。 电极组件安装在壳体内。 电极组件包括一对细长的平面电极，其以与它们之间的窄间隙的面对面关系安装。 沿着间隙的侧边缘定位一对平面电介质板以密封放电区域。 板从电极的两侧边缘延伸到间隙中的一部分。 电极的内表面在围绕板的内边缘的区域中设置有相对的沟槽。 以这种方式，将板的内边缘暴露于放电最小化提高了性能。
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公开(公告)号：US20090034574A1
公开(公告)日：2009-02-05
申请号：US12166640
申请日：2008-07-02
IPC分类号： H01S3/03
CPC分类号： H01S3/0385 , H01S3/2232
摘要： An RF excited gas discharge laser is disclosed including a housing holding the lasing gas. An electrode assembly is mounted within the housing. The electrode assembly includes a pair of elongated planar electrodes mounted in face to face relationship with a narrow gap therebetween. A pair of planar dielectric plates are positioned along the side edges of the gap to seal the discharge region. The plates extend part of the way into the gap from both sides edges of the electrodes. The inner surfaces of the electrodes are provided with an opposed trench in the region surrounding the inner edges of the plates. In this way, the exposure of the inner edges of the plates to the discharge is minimized improving performance.
摘要翻译： 公开了一种RF激励气体放电激光器，其包括保持激光气体的壳体。 电极组件安装在壳体内。 电极组件包括一对细长的平面电极，其以与它们之间的窄间隙的面对面关系安装。 沿着间隙的侧边缘定位一对平面电介质板以密封放电区域。 板从电极的两侧边缘延伸到间隙中的一部分。 电极的内表面在围绕板的内边缘的区域中设置有相对的沟槽。 以这种方式，将板的内边缘暴露于放电最小化提高了性能。
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公开(公告)号：US20090067467A1
公开(公告)日：2009-03-12
申请号：US11900530
申请日：2007-09-12
CPC分类号： H01S3/2232 , H01S3/03 , H01S3/0305 , H01S3/0384 , H01S3/09713 , H01S3/09716
摘要： In a CO2 laser a pre-ionizer is assembled in a flange configured to be attached to a laser-gas enclosure of the laser over an aperture in a wall of the enclosure. An aperture in the base of the flange is aligned over the aperture in the enclosure wall. The aperture in the pre-ionizer flange is covered by a ceramic membrane. A disc electrode is in contact with the ceramic membrane on a side of the membrane outside of the laser-gas enclosure. An RF potential applied to the disc electrode creates a corona discharge on the side of the ceramic membrane inside the enclosure. The corona discharge ionizes laser gas in the enclosure before RF power is applied to electrodes of the slab laser. A cylindrical ceramic sleeve extends from the membrane for containing the discharge.
摘要翻译： 在CO2激光器中，预电离器组装在凸缘中，凸缘被配置成在外壳的壁上的孔上附接到激光器的激光气体外壳。 凸缘底部的孔径对准外壳壁上的孔。 预电除法器法兰中的孔径被陶瓷膜覆盖。 圆盘电极与激光 - 气体外壳外侧的膜侧的陶瓷膜接触。 施加到盘形电极的RF电势在外壳内部的陶瓷膜侧产生电晕放电。 在将RF功率施加到平板激光器的电极之前，电晕放电使外壳中的激光气体电离。 一个圆柱形陶瓷套筒从膜上延伸出来，用于容纳排放物。
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公开(公告)号：US07693207B2
公开(公告)日：2010-04-06
申请号：US11900530
申请日：2007-09-12
IPC分类号： H01S3/22
CPC分类号： H01S3/2232 , H01S3/03 , H01S3/0305 , H01S3/0384 , H01S3/09713 , H01S3/09716
摘要： In a CO2 laser a pre-ionizer is assembled in a flange configured to be attached to a laser-gas enclosure of the laser over an aperture in a wall of the enclosure. An aperture in the base of the flange is aligned over the aperture in the enclosure wall. The aperture in the pre-ionizer flange is covered by a ceramic membrane. A disc electrode is in contact with the ceramic membrane on a side of the membrane outside of the laser-gas enclosure. An RF potential applied to the disc electrode creates a corona discharge on the side of the ceramic membrane inside the enclosure. The corona discharge ionizes laser gas in the enclosure before RF power is applied to electrodes of the slab laser. A cylindrical ceramic sleeve extends from the membrane for containing the discharge.
摘要翻译： 在CO2激光器中，预电离器组装在凸缘中，凸缘被配置成在外壳的壁上的孔上附接到激光器的激光气体外壳。 凸缘底部的孔径对准外壳壁上的孔。 预电除法器法兰中的孔径被陶瓷膜覆盖。 圆盘电极与激光 - 气体外壳外侧的膜侧的陶瓷膜接触。 施加到盘形电极的RF电势在外壳内部的陶瓷膜侧产生电晕放电。 在将RF功率施加到平板激光器的电极之前，电晕放电使外壳中的激光气体电离。 一个圆柱形陶瓷套筒从膜上延伸出来，用于容纳排放物。
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