Pre-ionizer for pulsed gas-discharge laser
    1.
    发明申请
    Pre-ionizer for pulsed gas-discharge laser 有权
    用于脉冲气体放电激光器的预电离器

    公开(公告)号:US20080069170A1

    公开(公告)日:2008-03-20

    申请号:US11524337

    申请日:2006-09-20

    IPC分类号: H01S3/03

    摘要: In a CO2 laser a pre-ionizer is assembled in a flange configured to be attached to a laser-gas enclosure of the laser over an aperture in a wall of the enclosure. An aperture in the base of the flange is aligned over the aperture in the enclosure wall. The aperture in the pre-ionizer flange is covered by a ceramic membrane. A disc electrode is in contact with the ceramic membrane on a side of the membrane outside of the laser-gas enclosure. An RF potential applied to the disc electrode creates a corona discharge on the side of the ceramic membrane inside the enclosure. The corona discharge ionizes laser gas in the enclosure before RF power is applied to electrodes of the slab laser.

    摘要翻译: 在CO 2激光器中,预电离器组装在凸缘中,该凸缘被配置成在外壳的壁上的孔上连接到激光器的激光气体外壳。 凸缘底部的孔径对准外壳壁上的孔。 预电除法器法兰中的孔径被陶瓷膜覆盖。 圆盘电极与激光 - 气体外壳外侧的膜侧的陶瓷膜接触。 施加到盘形电极的RF电势在外壳内部的陶瓷膜侧产生电晕放电。 在将RF功率施加到平板激光器的电极之前,电晕放电使外壳中的激光气体电离。