公开(公告)号：US5793480A

公开(公告)日：1998-08-11

申请号：US719003

申请日：1996-09-24

申请人： Christopher A. Lacey ,  Kenneth H. Womack ,  Carlos Duran ,  Ed Ross ,  Semyon Nodelman

发明人： Christopher A. Lacey ,  Kenneth H. Womack ,  Carlos Duran ,  Ed Ross ,  Semyon Nodelman

IPC分类号： G01N21/21 ,  G01B9/02

CPC分类号： G01N21/211

摘要： An apparatus and method for measuring the space between a transparent member such as a substrate, and reflective member such as a slider. The apparatus includes a first optical system which detects a first light beam that is reflected from the substrate and the slider. The reflected light is separated into four separate beams. The intensities of the beams are detected and utilized to determine a first stokes parameter, a second stokes parameter, a third stokes parameter and a fourth stokes parameter of the reflected light. The stokes parameters are used to compute the real index of refraction n, extinction coefficient k and the thickness of the space. The four stokes parameters account for any depolarized light that is reflected from the slider. The first optical system may have a photodetector which detects an image of the slider. The image provides multiple data points that can be used to calculate n, k and the thickness of the air gap without a retract routine. The apparatus may also have a second optical system which detects a second light beam reflected from the substrate and the slider. The second optical system can be used to dynamically measure a thickness of the space. In the combined system the first optical system may accurately measure the n and k of a slider area while the second optical system dynamically measures the thickness of the air gap.

摘要翻译： 用于测量诸如基板的透明构件之间的空间以及诸如滑块的反射构件之间的空间的装置和方法。 该装置包括第一光学系统，其检测从基板和滑块反射的第一光束。 反射光分成四个独立的光束。 检测并利用光束的强度来确定反射光的第一斯托克斯参数，第二斯托克斯参数，第三斯托克斯参数和第四斯托克斯参数。 斯托克斯参数用于计算实际折射率n，消光系数k和空间厚度。 四个斯托克斯参数表示从滑块反射的任何去极化光。 第一光学系统可以具有检测滑块的图像的光电检测器。 图像提供了多个数据点，可用于计算n，k和气隙的厚度，而无需缩回程序。 该装置还可以具有检测从基板和滑块反射的第二光束的第二光学系统。 第二光学系统可用于动态测量空间的厚度。 在组合系统中，第一光学系统可以精确地测量滑块区域的n和k，而第二光学系统动态地测量气隙的厚度。

公开(公告)号：US5777740A

公开(公告)日：1998-07-07

申请号：US807669

申请日：1997-02-27

申请人： Christopher A. Lacey ,  Kenneth H. Womack

发明人： Christopher A. Lacey ,  Kenneth H. Womack

IPC分类号： G01B11/30 ,  G01B9/02

CPC分类号： G01B11/306

摘要： An apparatus and method for measuring the topographic profile of a reflective member having an index of refraction. The apparatus comprises a first optical system that reflects a light beam from the reflective member and detects the reflected light beam. A second optical system directs the light beam to interfere with the reflected light beam and detects the resulting interference pattern. A processor coupled to the first optical system and the second optical system computes the index of refraction of the reflective member from the detected reflected light beam and provides the topographic profile of the reflective member from the index of refraction and the interference pattern.

摘要翻译： 一种用于测量具有折射率的反射构件的地形图的装置和方法。 该装置包括第一光学系统，其反射来自反射构件的光束并检测反射光束。 第二光学系统引导光束干涉反射光束并检测所得到的干涉图案。 耦合到第一光学系统和第二光学系统的处理器从检测到的反射光束计算反射构件的折射率，并且从折射率和干涉图案提供反射构件的形貌。

公开(公告)号：US5638178A

公开(公告)日：1997-06-10

申请号：US522553

申请日：1995-09-01

申请人： Christopher A. Lacey ,  Kenneth H. Womack

发明人： Christopher A. Lacey ,  Kenneth H. Womack

IPC分类号： G01N21/21 ,  G01B11/14

CPC分类号： G01N21/211

摘要： An apparatus and method for measuring the space between a transparent member such as a disk, and reflective member such as a slider, by detecting a change of polarization of a reflected light beam. The apparatus includes a light source that emits a light beam. The light beam is circularly polarized and directed onto the disk and reflected off of the interface between the disk and the slider. The reflected light beam is split into four separately polarized beams by a beam splitter/polarizer assembly. The four light beams have varying intensities that are measured by photodetectors. Stokes parameters are computed from electrical signals that are generated by the photodetectors. The Stokes parameters correlate to the change in polarization of the reflected light beam. Ellipsometric parameters delta and psi are computed from the Stokes parameters. The thickness of the space and the complex index of refraction (n and K) of the slider are computed from the delta and psi parameters, typically by computing two separate sets of ellipsometric parameters at two different spacing thicknesses.

摘要翻译： 通过检测反射光束的偏振变化来测量诸如光盘之类的透明部件和诸如滑块的反射部件之间的空间的装置和方法。 该装置包括发射光束的光源。 光束被圆偏振并且被引导到盘上并从盘和滑块之间的界面反射出来。 反射光束通过分束器/偏振器组件分成四个分开的偏振光束。 四个光束具有由光电检测器测量的变化的强度。 斯托克斯参数由光电检测器产生的电信号计算。 斯托克斯参数与反射光束极化的变化相关。 椭圆偏振参数delta和psi由斯托克斯参数计算。 滑块的厚度和复数折射率（n和K）由delta和psi参数计算，通常通过计算两个不同间距厚度的两组椭偏参数来计算。

公开(公告)号：US5808736A

公开(公告)日：1998-09-15

申请号：US718899

申请日：1996-09-24

申请人： Kenneth H. Womack ,  Carlos A. Duran ,  Christopher A. Lacey

发明人： Kenneth H. Womack ,  Carlos A. Duran ,  Christopher A. Lacey

IPC分类号： G11B5/60 ,  G11B5/84 ,  G11B21/21 ,  G11B23/00 ,  G11B33/10 ,  G01J1/02

CPC分类号： G11B5/6005 ,  G11B21/21 ,  G11B23/0021 ,  G11B33/10 ,  G11B5/84

摘要： A calibration medium that is used to calibrate a flying height tester which measures the gap of an air bearing formed between a magnetic recording head and a substrate. The medium contains a first ridge and a second ridge that extend from an underlying substrate. The ridges may be coated with a reflective material. A flying height tester can be calibrated by measuring light reflected from each ridge. The ridges have varying thicknesses so that the calibration medium will produce multiple data points.

摘要翻译： 用于校准飞行高度测试仪的校准介质，其测量在磁记录头和基底之间形成的空气轴承的间隙。 介质包含从下面的基底延伸的第一脊和第二脊。 脊可以涂覆有反射材料。 飞行高度测试仪可以通过测量从每个脊反射的光来校准。 脊具有不同的厚度，使得校准介质将产生多个数据点。

公开(公告)号：US5781299A

公开(公告)日：1998-07-14

申请号：US719252

申请日：1996-09-24

申请人： Kenneth H. Womack ,  L. Allan Butler

发明人： Kenneth H. Womack ,  L. Allan Butler

IPC分类号： G01B11/14 ,  G11B5/60 ,  G11B19/04 ,  G11B21/21 ,  G11B33/10 ,  G01B11/02 ,  G01N21/41

CPC分类号： G11B5/6005 ,  G01B11/14 ,  G11B21/21 ,  G11B33/10 ,  G11B19/04

摘要： An apparatus and method for optically measuring the air gap between a transparent glass disk and an air bearing slider without separately measuring the real index of refraction n and extinction coefficient k of the slider using an external ellipsometer. The phase offset required to compute the air gap is computed from a measurement of the air slider reflectivity and from an empirically derived equation that correlates the index of refraction with the reflectance of the slider. The apparatus includes a light source for directing a light beam through the transparent member and air gap, and onto the reflective slider. The light reflects off of the slider and the transparent member to create an interference pattern. The reflected light is detected by a photodetector that is coupled to a computer. The slider reflectivity r is found from the reflected light. An empirically derived linear equation which correlates the real part (n) of the slider refractive index to reflectivity (r) is next used to estimate n from r. Given n and r the phase offset and space can then be calculated.

摘要翻译： 一种用于光学测量透明玻璃盘和空气轴承滑块之间的气隙的装置和方法，而不使用外部椭偏仪单独测量滑块的实际折射率n和消光系数k。 计算空气间隙所需的相位偏移是从空气滑块反射率的测量值和根据折射率与滑块的反射率相关联的经验导出方程计算的。 该装置包括用于将光束引导通过透明构件和气隙的光源，并且到达反射滑块。 该光从滑块和透明构件反射以产生干涉图案。 反射光由耦合到计算机的光电检测器检测。 从反射光中发现滑块反射率r。 将滑块折射率的实部（n）与反射率（r）相关联的经验导出的线性方程式接下来用于从r估计n。 给定n和r可以计算相位偏移和空间。

公开(公告)号：US06184993B2

公开(公告)日：2001-02-06

申请号：US09248182

申请日：1999-02-09

申请人： Carlos A. Durán ,  Kenneth H. Womack

发明人： Carlos A. Durán ,  Kenneth H. Womack

IPC分类号： G01B1102

CPC分类号： G11B7/122 ,  G01B11/14

摘要： An apparatus that can measure a space between a first surface and a second surface such as the air bearing between a slider and a disk. The apparatus may include a light source that can reflect a light beam from the slider and the disk. By way of example, the light beam can be reflected off of an Al2O3 cap of a slider. A birefringent element such as a Savart plate may split the reflected light beam into an ordinary beam and an extraordinary beam. The ordinary and extraordinary beams may combine to form an interference pattern that is detected by a photodetector. A controller receives data from the photodetector. The apparatus may have a mechanism which can vary a phase between the ordinary and extraordinary beams so that the controller can calculate a phase value &phgr;. The controller then computes the space from the phase value &phgr;. The variation in phase between the beams may be created by tilting the birefringent element, or moving the reflected light beam directed into the birefringent element. The apparatus can determine the space without performing a retract calibration routine that moves the slider as is required in the prior art.

摘要翻译： 可以测量第一表面和第二表面之间的空间的装置，例如滑块和盘之间的空气轴承。 该装置可以包括可以反射来自滑块和盘的光束的光源。 作为示例，光束可以从滑块的Al 2 O 3盖反射。 诸如萨瓦特板之类的双折射元件可以将反射光束分裂成普通光束和非常光束。 普通和非常的光束可以组合以形成由光电检测器检测到的干涉图案。 控制器从光电检测器接收数据。 该装置可以具有可以改变普通光束和非常光束之间的相位的机构，使得控制器可以计算相位值phi。 然后，控制器从相位值phi计算空间。 可以通过倾斜双折射元件或者将引导到双折射元件的反射光束移动来产生光束之间的相位变化。 该装置可以确定空间，而不执行如现有技术中所需的移动滑块的缩回校准例程。

公开(公告)号：US5696585A

公开(公告)日：1997-12-09

申请号：US766900

申请日：1996-12-13

申请人： Michael Wahl ,  Kenneth H. Womack

发明人： Michael Wahl ,  Kenneth H. Womack

IPC分类号： G11B5/40 ,  G11B5/60 ,  G11B21/21 ,  G11B23/50 ,  G11B33/10 ,  G11B33/14 ,  G01B9/02 ,  G01J5/60

CPC分类号： G11B5/6005 ,  G11B21/21 ,  G11B23/505 ,  G11B33/10 ,  G11B33/1493 ,  G11B5/40

摘要： An electrostatic discharge device for a flying height tester which measures the air gap of a recording head. The tester includes a transparent disk that is rotated by a spindle motor. The spindle motor is mounted to a spin stand. The tester has a manifold that is mounted to the spin stand and directs a flow of ionized fluid to a bottom surface of the disk. The manifold is also electrically grounded. The ionized fluid and electrically grounded manifold provide an electrical path that discharge electrostatic charge located on the bottom surface of the disk. The manifold extends from an inner disk diameter to an outer disk diameter so that ionized fluid is introduced to the entire bottom surface of the rotating disk. Additionally, the manifold location is such that the ionized fluid provides an electrical path from the disk to the manifold that is relatively constant across the surface of the disk. The manifold location insures that the electrostatic charge is discharged from the entire bottom surface of the disk. The manifold is also grounded by a fixed wire to provide a reliable ground path for the device.

摘要翻译： 一种用于测量记录头的气隙的飞行高度测试仪的静电放电装置。 测试仪包括由主轴电机旋转的透明盘。 主轴电机安装在旋转架上。 测试仪具有安装在旋转架上并将电离流体流引导到盘的底表面的歧管。 歧管也是电接地。 电离流体和电接地歧管提供放电位于盘的底表面上的静电电荷的电路径。 歧管从内盘直径延伸到外盘直径，使得离子化流体被引入旋转盘的整个底表面。 另外，歧管位置使得离子化流体提供从盘到歧管的电路径，其在盘的表面上相对恒定。 歧管位置确保静电电荷从盘的整个底表面排出。 歧管还通过固定电线接地，为设备提供可靠的接地路径。

公开(公告)号：US4963984A

公开(公告)日：1990-10-16

申请号：US349744

申请日：1989-05-10

申请人： Kenneth H. Womack

发明人： Kenneth H. Womack

IPC分类号： H04N17/00

CPC分类号： G03B17/54 ,  H04N17/00

摘要： An optical projection camera alignment system and method particularly adapted for a solid state image sensor array type cameras such that a high intensity light source is directed onto the image sensor array to effectively project the image of the image sensor array out of the camera, through its lens systems, onto an object plane. The focus and angular orientation of the camera is then adjusted to accurately focus and align the image of the camera's image sensor array with respect to the object plane. In multiple camera installations the overlap and relative alignment of neighboring camera's fields-of-view can be set at desired levels. In a preferred apparatus embodiment of the invention, a pair of fiber optic bundles each having a right angle prism affixed to one end is inserted into the camera body and the cavity between the lens system and the image sensor array. A light source is coupled to the opposite ends of the pair of fiber optic bundles for generating light which is passed through the fiber optics and dispersed onto the surface of the image sensor array by the right angle prisms.

摘要翻译： 一种光学投影相机对准系统和方法，特别适用于固态图像传感器阵列型摄像机，使得高强度光源被引导到图像传感器阵列上，以有效地将图像传感器阵列的图像投射出相机，通过其 透镜系统，到物体平面上。 然后调整相机的焦点和角度定向，以准确地将相机的图像传感器阵列的图像相对于物体平面聚焦和对准。 在多个摄像机安装中，相邻摄像机的视场的重叠和相对对准可以设置在所需的水平。 在本发明的优选设备实施例中，将一对具有固定在一端的直角棱镜的一对光纤束插入相机主体和透镜系统与图像传感器阵列之间的空腔。 光源耦合到一对光纤束的相对端，用于产生通过光纤的光，并通过直角棱镜分散在图像传感器阵列的表面上。

公开(公告)号：US5875029A

公开(公告)日：1999-02-23

申请号：US908061

申请日：1997-08-11

申请人： Peter C. Jann ,  Wayne W. Li ,  Igor Iosilevsky ,  Kenneth H. Womack ,  Vlastimil Cejna ,  George A. Burt, Jr.

发明人： Peter C. Jann ,  Wayne W. Li ,  Igor Iosilevsky ,  Kenneth H. Womack ,  Vlastimil Cejna ,  George A. Burt, Jr.

IPC分类号： G01N21/94 ,  G01N21/956 ,  G01B9/02

CPC分类号： G01N21/9501 ,  G01N21/94 ,  G01N2201/1045

摘要： A simple yet versatile noncontact optical inspection instrument and method are described for the inspection of magnetic disk surfaces for surface defects. This instrument is capable of inspecting the disk surface at any point in the disk manufacturing process. Surface defects such as bumps, pits and scratches can be measured. Surface contaminants such as particles and stains can also be measured. The instrument is also capable of discriminating between surface defects and surface contaminants. The instrument is comprised of two identical optical sensors which are located on opposite sides of the disk. A carriage supports and translates these sensors along the disk radius while a spindle rotates the disk. Both surfaces of the disk are therefore simultaneously scanned in a spiral fashion. The sensor's illumination optics produce a monochromatic focused spot of light which is normally incident upon the disk surface. The sensor uses two collection optics channels which simultaneously detect both the specular reflected light and the diffuse scattered light produced by the disk surface. Both the angle and power of the specular reflected light are measured, while just the power of the diffuse scattered light is measured. The output signals from the sensors are processed to estimate the size of the defects and to determine the type of defect.

摘要翻译： 描述了一种简单而通用的非接触式光学检测仪器和方法，用于检查表面缺陷的磁盘表面。 该仪器能够在磁盘制造过程的任何时刻检查磁盘表面。 可以测量诸如凸块，凹坑和划痕的表面缺陷。 还可以测量颗粒和污渍等表面污染物。 该仪器还能够区分表面缺陷和表面污染物。 仪器由两个相同的光学传感器构成，位于光盘的相对两侧。 当主轴旋转磁盘时，滑架沿着磁盘半径支撑并平移这些传感器。 因此，盘的两个表面都以螺旋方式同时扫描。 传感器的照明光学器件产生通常入射在盘表面上的单色聚光光点。 该传感器使用两个收集光学通道，其同时检测镜面反射光和由盘表面产生的漫射散射光。 测量镜面反射光的角度和功率，同时测量漫射散射光的功率。 来自传感器的输出信号被处理以估计缺陷的尺寸并确定缺陷的类型。

公开(公告)号：US5085502A

公开(公告)日：1992-02-04

申请号：US045110

申请日：1987-04-30

申请人： Kenneth H. Womack ,  Brian J. Kwarta ,  David H. Outterson ,  James R. Reda

发明人： Kenneth H. Womack ,  Brian J. Kwarta ,  David H. Outterson ,  James R. Reda

IPC分类号： G01B11/25 ,  H04N9/31

CPC分类号： H04N9/3185 ,  G01B11/2504

摘要： Projectors and cameras disposed about an object under test obtain digital moire information of overlapping aspects (views) of the object. The system is calibrated using a calibration pattern of straight lines on a flat reference surface and a projected pattern of lines which are perpendicular to the lines of the calibration pattern and contain marker fringes between predetermined lines. Each aspect is calibrated individually by stepping the calibration pattern along the axis of each camera so as to obtain a plurality of tables which relate phase information to distance in each of a plurality of planes spaced successively closer to the camera. The calibration tables define a calibrated volume in space between the cameras and projectors. When the object under test is located in this volume, the video signals from the camera are converted into digital moire information. This information is directly related to the calibration information and is converted with the aid of the calibration information into absolute distance measurements along the perimeters of cross-sections through the object.

摘要翻译： 被放置在被测物体周围的投影机和摄像机获得对象重叠方面（视图）的数字莫尔信息。 使用在平坦参考表面上的直线的校准图案和垂直于校准图案的线并且在预定线之间包含标记条纹的线的投影图案来校准系统。 每个方面通过沿着每个照相机的轴的步进校准图案来单独地校准，以便获得多个表，其将相位信息与连续更靠近相机间隔开的多个平面中的每个平面中的距离相关联。 校准表定义了相机和投影机之间的校准空间空间。 当被测对象位于该卷中时，来自相机的视频信号被转换成数字莫尔信息。 该信息与校准信息直接相关，并通过校准信息转换成通过物体的横截面周边的绝对距离测量值。