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公开(公告)号：US20130156967A1
公开(公告)日：2013-06-20
申请号：US13713632
申请日：2012-12-13
申请人： Christopher Michaluk , William Loewenthal , Gary Rozak , Marc Abouaf , Patrick Hogan , Steven A. Miller
发明人： Christopher Michaluk , William Loewenthal , Gary Rozak , Marc Abouaf , Patrick Hogan , Steven A. Miller
IPC分类号： C23C14/34
CPC分类号： C23C14/3414 , C23C14/3407 , C23C24/04
摘要： In various embodiments, used sputtering targets are refurbished at least in part by maintaining a large obliquity angle between the spray-deposition gun and the depressed surface contour of the target during spray deposition of the target material.
摘要翻译： 在各种实施例中，使用的溅射靶材至少部分地通过在喷射沉积目标材料期间在喷涂沉积枪和靶的凹陷表面轮廓之间保持大的倾斜角来进行翻新。
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2.发明授权Methods of manufacturing large-area sputtering targets using interlocking joints 有权使用互锁接头制造大面积溅射靶的方法公开(公告)号：US09564299B2
公开(公告)日：2017-02-07
申请号：US15042987
申请日：2016-02-12
申请人： Scott Jeffrey Volchko , William Loewenthal , Stefan Zimmermann , Mark Gaydos , Steven Alfred Miller
发明人： Scott Jeffrey Volchko , William Loewenthal , Stefan Zimmermann , Mark Gaydos , Steven Alfred Miller
CPC分类号： H01J37/3429 , B05D1/02 , B23K31/02 , C23C14/3407 , C23C14/3414 , C23C24/04 , H01J37/3417 , H01J37/3426 , H01J2237/081 , H01J2237/332 , Y10T156/10
摘要： In various embodiments, joined sputtering targets are formed at least in part by spray deposition of the sputtering material and/or welding.
摘要翻译： 在各种实施例中，至少部分地通过溅射材料的喷涂和/或焊接形成连接的溅射靶。
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3.发明申请METHODS OF MANUFACTURING LARGE-AREA SPUTTERING TARGETS USING INTERLOCKING JOINTS 有权使用互锁接头制造大面积飞溅目标的方法公开(公告)号：US20150311047A1
公开(公告)日：2015-10-29
申请号：US14793931
申请日：2015-07-08
申请人： Scott Jeffrey Volchko , William Loewenthal , Stefan Zimmermann , Mark Gaydos , Steven Alfred Miller
发明人： Scott Jeffrey Volchko , William Loewenthal , Stefan Zimmermann , Mark Gaydos , Steven Alfred Miller
IPC分类号： H01J37/34
CPC分类号： H01J37/3429 , B05D1/02 , B23K31/02 , C23C14/3407 , C23C14/3414 , C23C24/04 , H01J37/3417 , H01J37/3426 , H01J2237/081 , H01J2237/332 , Y10T156/10
摘要： In various embodiments, joined sputtering targets are formed at least in part by spray deposition of the sputtering material and/or welding.
摘要翻译： 在各种实施例中，至少部分地通过溅射材料的喷涂和/或焊接形成连接的溅射靶。
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公开(公告)号：US20160163520A1
公开(公告)日：2016-06-09
申请号：US15042987
申请日：2016-02-12
申请人： Scott Jeffrey Volchko , William Loewenthal , Stefan Zimmermann , Mark Gaydos , Steven Alfred Miller
发明人： Scott Jeffrey Volchko , William Loewenthal , Stefan Zimmermann , Mark Gaydos , Steven Alfred Miller
CPC分类号： H01J37/3429 , B05D1/02 , B23K31/02 , C23C14/3407 , C23C14/3414 , C23C24/04 , H01J37/3417 , H01J37/3426 , H01J2237/081 , H01J2237/332 , Y10T156/10
摘要： In various embodiments, joined sputtering targets are formed at least in part by spray deposition of the sputtering material and/or welding.
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公开(公告)号：US09293306B2
公开(公告)日：2016-03-22
申请号：US14793931
申请日：2015-07-08
申请人： Scott Jeffrey Volchko , William Loewenthal , Stefan Zimmermann , Mark Gaydos , Steven Alfred Miller
发明人： Scott Jeffrey Volchko , William Loewenthal , Stefan Zimmermann , Mark Gaydos , Steven Alfred Miller
CPC分类号： H01J37/3429 , B05D1/02 , B23K31/02 , C23C14/3407 , C23C14/3414 , C23C24/04 , H01J37/3417 , H01J37/3426 , H01J2237/081 , H01J2237/332 , Y10T156/10
摘要： In various embodiments, joined sputtering targets are formed at least in part by spray deposition of the sputtering material and/or welding.
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