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公开(公告)号：US06910847B1
公开(公告)日：2005-06-28
申请号：US10199140
申请日：2002-07-19
CPC分类号： B25J9/042 , B25J15/0095 , H01L21/67742
摘要： A polar coordinate stage that may be used in a chamber includes a rotating chuck that moves in a linear direction and has the motors that drive the motion of the chuck outside the chamber. The stage can include a linkage of arms to support and drive the linear motion of the chuck. The chuck is coupled to a horizontal rail such that rotational motion of a first arm is translated into precise linear motion of the chuck along the horizontal rail through a second arm. In addition, a system of pulleys within the arms translates rotational (or linear) motion through the arms and rotates the chuck. Vertical motion may be provided by an actuator between the second arm and the chuck or by a motor under the stage. Because of the compact nature of the stage, it can be easily placed within a chamber.
摘要翻译： 可以在室中使用的极坐标台包括沿线性方向移动并具有驱动卡盘在室外的运动的马达的旋转卡盘。 舞台可以包括臂的连接以支撑和驱动卡盘的线性运动。 卡盘联接到水平轨道，使得第一臂的旋转运动通过第二臂被转换成沿着水平轨道的卡盘的精确的线性运动。 此外，臂内的滑轮系统使旋转（或线性）运动通过臂平移并旋转卡盘。 垂直运动可以由第二臂和卡盘之间的致动器或在该台下方的电动机提供。 由于舞台的紧凑性，它可以很容易地放置在一个室内。
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公开(公告)号：US07032287B1
公开(公告)日：2006-04-25
申请号：US10198948
申请日：2002-07-19
CPC分类号： H01L21/68728 , H01L21/68707 , Y10T29/49998 , Y10T279/19 , Y10T279/1986
摘要： An actuated edge grip chuck includes tabs with raised portions that press against the side of a substrate as opposed clamping on the top or bottom surfaces. The edge grip chuck includes a solid-state actuator to move a moveable tab into an open position. The solid-state actuator may be, e.g., a piezoelectric actuator or a shape memory alloy. The tab may be biased into the closed position such that when a substrate is held by the edge by the moveable tab and one or more fixed tabs. If desired, more than one moveable tab may be used.
摘要翻译： 致动的边缘夹持卡盘包括具有凸起部分的突出部，其相对于顶部或底部表面上的夹紧而抵靠基板的侧面。 边缘夹持夹具包括一个固态致动器，用于将可移动的突片移动到打开位置。 固态致动器可以是例如压电致动器或形状记忆合金。 突片可以被偏置到关闭位置，使得当基板被可移动突片和一个或多个固定突片保持在边缘时。 如果需要，可以使用多于一个的可动片。
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公开(公告)号：US07301623B1
公开(公告)日：2007-11-27
申请号：US10738190
申请日：2003-12-16
CPC分类号： H01L21/68742
摘要： A chuck that clamps a substrate to the top surface using, e.g., a vacuum, electrostatic force, or other appropriate means, includes a plurality of lift pins that can raise the substrate off the top surface of the chuck. The chuck may be used with a metrology device that measures the substrate using a first type of measurement, e.g., film thickness measurement, while the substrate is held flat, and measures the substrate using a second type of measurement, e.g., radius of curvature measurement, while the substrate is supported on the lift pins. The thickness and radius of curvature measurements may then be used to determine the stress on the substrate. The lift pins may include an aperture through which a vacuum is applied through the top surface of the lift pins to the bottom of the substrate to securely hold the substrate while moving.
摘要翻译： 使用例如真空，静电力或其他合适的方式将基板夹紧到顶表面的卡盘包括可以将基板从卡盘的顶表面上升起的多个提升销。 卡盘可以与测量装置一起使用，该测量装置使用第一类型的测量（例如膜厚度测量）来测量衬底，同时衬底保持平坦，并且使用第二类型的测量来测量衬底，例如曲率半径测量 而基板支撑在提升销上。 然后可以使用厚度和曲率半径测量来确定衬底上的应力。 提升销可以包括孔，通过该孔通过提升销的顶表面将真空施加到基板的底部，以在移动时牢固地保持基板。
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公开(公告)号：US07173417B1
公开(公告)日：2007-02-06
申请号：US10402661
申请日：2003-03-28
CPC分类号： G01B7/105 , G01B11/0616
摘要： A metrology instrument includes an eddy current sensor that is mounted to and concentric with a confocal distance sensor. By measuring the precise vertical placement of the eddy current probe with respect to the surface of the sample using the confocal distance sensor, the accuracy and precision of the eddy current measurement is improved. Because the confocal distance sensor and the eddy current sensor are confocal, there is no need to move the relative lateral positions between the sample and instrument, between the distance measurement and the eddy current measurement, thereby reducing error in the measurement as well are maximizing the throughput by minimizing the required stage travel for a single measurement.
摘要翻译： 计量仪器包括安装在共聚距离传感器上并与其同心的涡流传感器。 通过使用共聚距离传感器测量涡流探针相对于样品表面的精确垂直布置，提高了涡流测量的精度和精度。 由于共焦距离传感器和涡流传感器是共焦的，所以在距离测量和涡流测量之间，不需要在样品和仪器之间移动相对的横向位置，从而减少了测量中的误差，同时也使最大化 通过最小化单个测量所需的阶段行程来实现吞吐量。
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