-
公开(公告)号：US06910847B1
公开(公告)日：2005-06-28
申请号：US10199140
申请日：2002-07-19
CPC分类号： B25J9/042 , B25J15/0095 , H01L21/67742
摘要： A polar coordinate stage that may be used in a chamber includes a rotating chuck that moves in a linear direction and has the motors that drive the motion of the chuck outside the chamber. The stage can include a linkage of arms to support and drive the linear motion of the chuck. The chuck is coupled to a horizontal rail such that rotational motion of a first arm is translated into precise linear motion of the chuck along the horizontal rail through a second arm. In addition, a system of pulleys within the arms translates rotational (or linear) motion through the arms and rotates the chuck. Vertical motion may be provided by an actuator between the second arm and the chuck or by a motor under the stage. Because of the compact nature of the stage, it can be easily placed within a chamber.
摘要翻译： 可以在室中使用的极坐标台包括沿线性方向移动并具有驱动卡盘在室外的运动的马达的旋转卡盘。 舞台可以包括臂的连接以支撑和驱动卡盘的线性运动。 卡盘联接到水平轨道，使得第一臂的旋转运动通过第二臂被转换成沿着水平轨道的卡盘的精确的线性运动。 此外，臂内的滑轮系统使旋转（或线性）运动通过臂平移并旋转卡盘。 垂直运动可以由第二臂和卡盘之间的致动器或在该台下方的电动机提供。 由于舞台的紧凑性，它可以很容易地放置在一个室内。
-
公开(公告)号：US07032287B1
公开(公告)日：2006-04-25
申请号：US10198948
申请日：2002-07-19
CPC分类号： H01L21/68728 , H01L21/68707 , Y10T29/49998 , Y10T279/19 , Y10T279/1986
摘要： An actuated edge grip chuck includes tabs with raised portions that press against the side of a substrate as opposed clamping on the top or bottom surfaces. The edge grip chuck includes a solid-state actuator to move a moveable tab into an open position. The solid-state actuator may be, e.g., a piezoelectric actuator or a shape memory alloy. The tab may be biased into the closed position such that when a substrate is held by the edge by the moveable tab and one or more fixed tabs. If desired, more than one moveable tab may be used.
摘要翻译： 致动的边缘夹持卡盘包括具有凸起部分的突出部，其相对于顶部或底部表面上的夹紧而抵靠基板的侧面。 边缘夹持夹具包括一个固态致动器，用于将可移动的突片移动到打开位置。 固态致动器可以是例如压电致动器或形状记忆合金。 突片可以被偏置到关闭位置，使得当基板被可移动突片和一个或多个固定突片保持在边缘时。 如果需要，可以使用多于一个的可动片。
-
公开(公告)号：US06779278B1
公开(公告)日：2004-08-24
申请号：US10622385
申请日：2003-07-17
申请人： Blaine R. Spady , Dan M. Colban
发明人： Blaine R. Spady , Dan M. Colban
IPC分类号： B65G4907
CPC分类号： H01L21/68792 , Y10S414/136
摘要： A compact stage includes a rotary driver and a vertical linear driver that are in the same horizontal plane, which advantageously reduces the height of the device. The stage may include a rotating shaft to which a chuck is mounted. A rotary drive, which may be an annular rotary drive, is coupled to and rotates the rotating shaft. A linear drive is also coupled to the rotating shaft and in one embodiment extends through the center of the annular rotary drive. The linear drive moves the rotating shaft along a vertical axis. The linear drive may be, e.g., a voice coil motor that uses a spring to bias the rotating shaft along the vertical axis.
摘要翻译： 紧凑的平台包括处于相同水平面的旋转驱动器和垂直线性驱动器，这有利地降低了装置的高度。 平台可以包括安装卡盘的旋转轴。 可以是环形旋转驱动器的旋转驱动器联接到旋转轴并使其旋转。 线性驱动器也耦合到旋转轴，并且在一个实施例中延伸穿过环形旋转驱动器的中心。 线性驱动器使旋转轴沿垂直轴移动。 线性驱动器可以是例如使用弹簧沿着垂直轴偏置旋转轴的音圈电动机。
-
公开(公告)号：US06854948B1
公开(公告)日：2005-02-15
申请号：US10219569
申请日：2002-08-15
申请人： Blaine R. Spady , Dan M. Colban , Robert S. Kearns
发明人： Blaine R. Spady , Dan M. Colban , Robert S. Kearns
IPC分类号： B65G49/07 , H01L21/677 , H01L21/687
CPC分类号： H01L21/67769 , H01L21/67751 , H01L21/68728 , Y10S414/136 , Y10S414/138
摘要： A stage used, e.g., in semiconductor fabrication, includes a two substrate buffer station and a movable chuck. The buffer station, in one embodiment is fixed, i.e., non-movable relative to the stage. In another embodiment, the support elements of the buffer station may move in unison vertically or horizontally. In another embodiment, a pair of the support elements horizontally moves toward another pair of support elements to reduce the necessary horizontal motion of the chuck. For example, an unprocessed substrate is loaded onto the top supporting elements of the buffer station, while processed substrates are unloaded from the bottom supporting element of the buffer station. The movable chuck is used to remove the unprocessed substrates from the buffer station and to place the processed substrates on the buffer station.
摘要翻译： 例如在半导体制造中使用的阶段包括两个基板缓冲站和可动卡盘。 缓冲站在一个实施例中是固定的，即相对于平台不可移动。 在另一个实施例中，缓冲站的支撑元件可以垂直或水平地一致地移动。 在另一个实施例中，一对支撑元件水平地朝向另一对支撑元件移动，以减小卡盘所需的水平运动。 例如，未处理的基板被加载到缓冲站的顶部支撑元件上，而处理的基板从缓冲站的底部支撑元件卸载。 可移动卡盘用于从缓冲站中去除未处理的基板，并将经处理的基板放置在缓冲站上。
-
公开(公告)号：US06970255B1
公开(公告)日：2005-11-29
申请号：US10422232
申请日：2003-04-23
CPC分类号： G01D5/34707
摘要： An encoder includes a layer on the scale that has a thickness that varies as a function of position along the length of the scale. The position of the sensor head with respect to the scale may be determined by measuring the thickness of the layer or index of refraction, e.g., using a reflectometer, and converting the thickness to the lateral position. In one embodiment, the thickness of the layer is used to provide a rough position of the sensor head with respect to the scale and an alignment target that includes periodic patterns on both the sensor head and scale is used to provide a refined position.
摘要翻译： 编码器包括刻度上的层，其厚度随着刻度长度的位置而变化。 传感器头相对于刻度尺的位置可以通过测量层的厚度或折射率来确定，例如使用反射计，并将厚度转换成横向位置。 在一个实施例中，层的厚度用于提供传感器头相对于标尺的粗略位置，并且使用包括传感器头部和标尺上的周期性图案的对准目标来提供精细位置。
-
公开(公告)号：US07295314B1
公开(公告)日：2007-11-13
申请号：US09458123
申请日：1999-12-08
CPC分类号： G01N21/9501
摘要： A metrology/inspection system moves the imaging and/or measuring equipment of the system relative to a wafer. Accordingly, measurement or inspection of the wafer does not require that the wafer be mounted on a precision stage. This allows the wafer to be at rest on any structure native in a processing apparatus when the system measures or inspects the wafer. Accordingly, measurement does not require removing the wafer from the processing apparatus and does not delay processing since the wafer can be measured, for example, during a required cool down period of device fabrication process. Alignment of an optical system includes pre-alignment base on edge detection using the optical system and more precise alignment using image recognition. An R-θ stage can position the optical system at inspection areas on the wafer. Image rotation can provide a fixed orientation for all images at the various inspection areas and can maintain the fixed orientation when moving from one inspection area to the next.
摘要翻译： 计量/检查系统相对于晶片移动系统的成像和/或测量设备。 因此，晶片的测量或检查不需要将晶片安装在精密平台上。 这允许当系统测量或检查晶片时，晶片在处理设备中本构的任何结构处于静止状态。 因此，测量不需要从处理设备中移除晶片，并且不延迟处理，因为可以例如在器件制造工艺的所需冷却时间期间测量晶片。 光学系统的对准包括基于使用光学系统的边缘检测的预对准和使用图像识别的更精确的对准。 R-θ级可以将光学系统定位在晶片上的检查区域。 图像旋转可以为各种检查区域的所有图像提供固定的方向，并且可以在从一个检查区域移动到下一个检查区域时保持固定的方向。
-
公开(公告)号：US07289215B2
公开(公告)日：2007-10-30
申请号：US11624666
申请日：2007-01-18
CPC分类号： G02B7/00
摘要： A metrology system includes a positioning system that produces linear and rotational motion between an imaging system and the wafer. The imaging system produces signals representing the image of the wafer in the field of view of the imaging system. A control system receives and processes the image signals, and generates corrected signals that compensate for rotational movement between the imaging system and the wafer. In response to the corrected signals, a monitor displays an image with the orientation of features on the wafer within the field of view unaffected by the rotational movement.
摘要翻译： 计量系统包括在成像系统和晶片之间产生线性和旋转运动的定位系统。 成像系统在成像系统的视野中产生表示晶片的图像的信号。 控制系统接收和处理图像信号，并产生补偿成像系统和晶片之间的旋转运动的校正信号。 响应于校正的信号，监视器在不受旋转运动影响的视场内显示具有晶片上的特征的取向的图像。
-
公开(公告)号：US06181427B2
公开(公告)日：2001-01-30
申请号：US09347362
申请日：1999-07-06
IPC分类号： G01N2155
CPC分类号： G01N21/55
摘要： A highly compact reflectometer system (10) for obtaining reflectance data and images from a sample (18). The reflectometer includes a light source (20) for generating a beam (Bi), a beam splitter (44) for transmitting a portion of the beam toward the sample, a lens (52) for focusing the transmitted light onto the sample, a video camera (104) for viewing a field of view (56) created by the light focused on the sample, and a spectrometer (86) for detecting and analyzing the spectrum of the light reflected from the sample. The reflectometer preferably includes a number of fold mirrors (FM1-FM6) which make the reflectometer highly compact.
摘要翻译： 一种用于从样品（18）获得反射率数据和图像的高度紧凑的反射计系统（10）。 反射计包括用于产生光束（Bi）的光源（20），用于将一部分光束传送到样品的分束器（44），用于将透射光聚焦到样本上的透镜（52），视频 用于观看由聚焦在样本上的光产生的视野（56）的相机（104），以及用于检测和分析从样品反射的光的光谱的光谱仪（86）。 反射计优选地包括多个使反射计高度紧凑的折叠镜（FM1-FM6）。
-
公开(公告)号：US06836690B1
公开(公告)日：2004-12-28
申请号：US10199278
申请日：2002-07-19
IPC分类号： H01L2166
CPC分类号： H01L21/681 , H01L21/68707 , H01L21/68728 , H01L21/68785
摘要： A prealigner includes a light source and light detector that detects the position of the periphery of a substrate as a rotary chuck rotates the substrate. The prealigner includes a processor that receives and records the peripheral position of the substrate relative to the angular position of the substrate. The prealigner determines the center of the substrate by fitting a curve to the recorded data set, after eliminating any spikes in the data, e.g., caused by the notch or parts of the chuck. The center may then be easily and accurately determined using the amplitude and phase of the fitted curve. The position of the notch is determined by fitting a curve to the data set for the notch and determining the derivative of the curve. The mid-point of the notch and the offset error of the apex of the notch from the mid-point are calculated based on the derivative.
摘要翻译： 预对准器包括光源和光检测器，其当旋转卡盘旋转基板时检测基板周边的位置。 预对准器包括处理器，其接收并记录基板相对于基板的角位置的周边位置。 在消除数据中的任何尖峰，例如由卡盘的凹口或部分引起的尖峰之后，预对准器通过将曲线拟合到记录的数据集来确定基板的中心。 然后可以使用拟合曲线的幅度和相位容易且准确地确定中心。 通过将曲线拟合到凹口的数据集并确定曲线的导数来确定凹口的位置。 根据导数计算切口的中点和中点处的切口顶点的偏移误差。
-
10.发明授权System using a polar coordinate stage and continuous image rotation to compensate for stage rotation 失效系统使用极坐标阶段和连续图像旋转来补偿舞台旋转公开(公告)号：US06320609B1
公开(公告)日：2001-11-20
申请号：US09113484
申请日：1998-07-10
IPC分类号： H04N718
CPC分类号： G02B7/00
摘要： A method for controlling a polar coordinate stage moves an object relative to an imaging system. While moving the object, the image of the object is rotated to compensate for rotation of the object. Accordingly, the orientations of features in the image are preserved, and removal of apparent rotation in the image reduces confusion an operator experiences while directing movement of the object. The angular velocity of the motion of the object is controlled so that image shift speed is independent of the radial position of the point being viewed. Use of a polar stage, reduces the required foot print for a stage and facilitates prealignment. In particular, an edge detector measures the position of the edge of the object while the polar coordinate stage rotates the object. A prealignment process determines the position and orientation of the object from the measured edge positions. A further alignment process uses automated pattern recognition which more easily identifies features on the object when the image is rotated so that the orientations of the feature are approximately known.
摘要翻译： 用于控制极坐标级的方法使物体相对于成像系统移动。 在移动对象的同时，旋转对象的图像以补偿对象的旋转。 因此，图像中的特征的取向被保留，并且去除图像中的明显旋转减少了操作者在引导对象的移动的同时经历的混乱。 控制物体运动的角速度使得图像偏移速度与所观察点的径向位置无关。 使用极地舞台，减少舞台所需的脚印，并有助于预对准。 特别地，边缘检测器测量物体边缘的位置，同时极坐标台旋转物体。 预对准过程根据测量的边缘位置确定对象的位置和方向。 进一步的对齐过程使用自动模式识别，当图像被旋转时，其更容易地识别对象上的特征，使得特征的取向近似已知。
-
-
-
-
-
-
-
-
-
搜索结果
10 条记录 (耗时 0.026 秒)
