SYSTEM AND METHOD FOR SEMICONDUCTOR DEVICE RANDOM TELEGRAPH SEQUENCE NOISE TESTING

    公开(公告)号:US20220221505A1

    公开(公告)日:2022-07-14

    申请号:US17148371

    申请日:2021-01-13

    IPC分类号: G01R31/26 G01R31/28

    摘要: A method for screening a semiconductor device for production of excessive random telegraph sequence (RTS) noise includes measuring noise of the semiconductor device at a first temperature, changing the temperature of the semiconductor device to a second temperature different from the first temperature, measuring noise of the semiconductor device at the second temperature, extracting a characteristic of the measured noise at the first and second temperatures (e.g., standard deviation, HMM output, frequency domain spectrum of time domain noise measurement), making a comparison of the extracted first and second noise characteristics, and making a determination whether the semiconductor device produces excessive RTS noise based on whether the comparison is above a predetermined threshold. Two different bias conditions of the device may be employed rather than, or in addition to, the two different temperatures.