System and method for semiconductor device random telegraph sequence noise testing

    公开(公告)号:US11674995B2

    公开(公告)日:2023-06-13

    申请号:US17148371

    申请日:2021-01-13

    IPC分类号: G01R31/26 G01R31/28

    摘要: A method for screening a semiconductor device for production of excessive random telegraph sequence (RTS) noise includes measuring noise of the semiconductor device at a first temperature, changing the temperature of the semiconductor device to a second temperature different from the first temperature, measuring noise of the semiconductor device at the second temperature, extracting a characteristic of the measured noise at the first and second temperatures (e.g., standard deviation, HMM output, frequency domain spectrum of time domain noise measurement), making a comparison of the extracted first and second noise characteristics, and making a determination whether the semiconductor device produces excessive RTS noise based on whether the comparison is above a predetermined threshold. Two different bias conditions of the device may be employed rather than, or in addition to, the two different temperatures.

    SYSTEM AND METHOD FOR SEMICONDUCTOR DEVICE RANDOM TELEGRAPH SEQUENCE NOISE TESTING

    公开(公告)号:US20220221505A1

    公开(公告)日:2022-07-14

    申请号:US17148371

    申请日:2021-01-13

    IPC分类号: G01R31/26 G01R31/28

    摘要: A method for screening a semiconductor device for production of excessive random telegraph sequence (RTS) noise includes measuring noise of the semiconductor device at a first temperature, changing the temperature of the semiconductor device to a second temperature different from the first temperature, measuring noise of the semiconductor device at the second temperature, extracting a characteristic of the measured noise at the first and second temperatures (e.g., standard deviation, HMM output, frequency domain spectrum of time domain noise measurement), making a comparison of the extracted first and second noise characteristics, and making a determination whether the semiconductor device produces excessive RTS noise based on whether the comparison is above a predetermined threshold. Two different bias conditions of the device may be employed rather than, or in addition to, the two different temperatures.