公开(公告)号：US20220408196A1

公开(公告)日：2022-12-22

申请号：US17843220

申请日：2022-06-17

Applicant: DENSO CORPORATION ,  TOYOTA JIDOSHA KABUSHIKI KAISHA ,  MIRISE Technologies Corporation ,  Nisshinbo Micro Devices Inc.

Inventor： Yuki OHARA ,  Tomoya JOKE ,  Tetsuya ENOMOTO ,  Hideo YAMADA ,  Shuji KATAKAMI ,  Takahide USUI ,  Hiroyuki KUCHIJI ,  Naoki MASUMOTO

IPC: H04R17/02 ,  B81B3/00 ,  B81C1/00 ,  H04R7/06 ,  H04R7/18

Abstract: A microelectromechanical systems device includes a vibrator and a reinforcing film. The vibrator includes a piezoelectric element configured to convert pressure to an electrical signal. The reinforcing film is configured to reinforce strength of the vibrator. The vibrator further has a groove at which a portion of the reinforcing film is disposed.

公开(公告)号：US20230210010A1

公开(公告)日：2023-06-29

申请号：US17972622

申请日：2022-10-25

Applicant: DENSO CORPORATION ,  TOYOTA JIDOSHA KABUSHIKI KAISHA ,  MIRISE Technologies Corporation ,  Nisshinbo Micro Devices Inc.

Inventor： Tetsuya ENOMOTO ,  Takahide USUI ,  Naokatsu IKEGAMI ,  Shuji KATAKAMI

IPC: H01L41/08 ,  H01L41/18 ,  H01L41/047 ,  H01L41/083 ,  B06B1/06

CPC classification number: H01L41/0805 ,  H01L41/18 ,  H01L41/047 ,  H01L41/083 ,  B06B1/06

Abstract: A piezoelectric device includes a support member, and a vibrating portion provided on a support surface of the support member. The vibrating portion includes, in addition to a first electrode, a piezoelectric film and a second electrode arranged in a stacking direction, an insulating film configured to increase an electric resistance value between the first and second electrodes. The first electrode is provided on the support surface of the support member, and includes an opening penetrating the first electrode in the stacking direction. The piezoelectric film is provided on the first electrode to extend across the opening. The second electrode is provided on the piezoelectric film. The insulating film is provided at a position between the first electrode and the second electrode, and at least a part of the insulating film overlaps with the opening in the stacking direction.

公开(公告)号：US20230201877A1

公开(公告)日：2023-06-29

申请号：US18170121

申请日：2023-02-16

Applicant: DENSO CORPORATION

Inventor： Tetsuya ENOMOTO ,  Akihiko TESHIGAHARA ,  Hideo YAMADA ,  Yusuke KAWAI

IPC: B06B1/06 ,  G01S15/04 ,  C23C14/34 ,  C23C14/06 ,  C23C14/02 ,  C01B21/06 ,  H10N30/853 ,  H10N30/076

CPC classification number: B06B1/0666 ,  G01S15/04 ,  C23C14/34 ,  C23C14/0641 ,  C23C14/02 ,  C01B21/0602 ,  H10N30/853 ,  H10N30/076 ,  C01P2006/80 ,  C01P2006/40

Abstract: A micro-electro-mechanical systems (MEMS) sensor includes a substrate, a diaphragm portion and a piezoelectric film. The diaphragm portion is located at the substrate. The piezoelectric film is located on the diaphragm portion. The piezoelectric film is made of scandium aluminum nitride. A carbon concentration of the piezoelectric film is 2.5 atomic percent or less while an oxygen concentration of the piezoelectric film is 0.35 atomic percent or less.

公开(公告)号：US20190162949A1

公开(公告)日：2019-05-30

申请号：US16261904

申请日：2019-01-30

Applicant: DENSO CORPORATION

Inventor： Tetsuya ENOMOTO ,  Takashi KATSUMATA

IPC: G02B26/08 ,  G02B26/10 ,  H02N2/02 ,  H02N2/06

Abstract: A MEMS device includes a fixed portion fixed to a pedestal, a movable portion arranged inside the fixed portion and configured to be displaceable with respect to the fixed portion, a connecting portion that connects the fixed portion and the movable portion, a piezoelectric element disposed on at least one of the fixed portion or the connecting portion, and a detection portion that output a signal corresponding to a distortion of the movable portion. A voltage is applied to the piezoelectric element on the basis of the output signal of the detection portion thereby reducing the distortion transmitted from the fixed portion to the movable portion.

公开(公告)号：US20190064509A1

公开(公告)日：2019-02-28

申请号：US16080038

申请日：2017-01-12

Applicant: DENSO CORPORATION

Inventor： Koichi OYAMA ,  Takashi KATSUMATA ,  Tetsuya ENOMOTO ,  Yumi MARUYAMA

IPC: G02B26/10 ,  B81B3/00 ,  G02B26/08

Abstract: A variable focus mirror includes a base portion, a first piezoelectric element, a reflection surface portion, and a second piezoelectric element. The base portion has a plate shape with a recessed portion on a back surface. The first piezoelectric element is arranged on a front surface of the base portion where the recessed portion is arranged. The reflection surface portion is arranged on the first piezoelectric element. The reflection surface portion is arranged opposite to the base portion with respect to the first piezoelectric element. The second piezoelectric element is arranged on the front surface of the base portion. The second piezoelectric element covers the part of the base portion where the recessed portion is arranged and the part of the base portion outside the recessed portion. The second piezoelectric element is separated from the first piezoelectric element.