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公开(公告)号:US20180151405A1
公开(公告)日:2018-05-31
申请号:US15574729
申请日:2016-06-03
Applicant: DEXERIALS CORPORATION
Inventor: Hironobu MORIYAMA , Hidekazu YAGI , Tomoyuki ISHIMATSU , Katsuyuki EBISAWA , Keiji HONJYO , Junichi KANEKO
IPC: H01L21/683 , B32B27/08 , B32B38/10 , H01L21/304 , H01L21/78 , H01L23/00 , C09J7/25 , C09J7/24 , C09J7/38 , C09J163/04
CPC classification number: H01L21/6836 , B32B27/00 , B32B27/08 , B32B38/10 , B32B2405/00 , C09J7/245 , C09J7/255 , C09J7/29 , C09J7/38 , C09J163/00 , C09J163/04 , C09J2201/162 , C09J2203/326 , C09J2205/114 , C09J2423/046 , C09J2431/006 , C09J2463/00 , C09J2467/006 , H01L21/304 , H01L21/78 , H01L23/562 , H01L24/11 , H01L2221/68327 , H01L2221/6834 , H01L2221/68386 , H01L2224/11009
Abstract: A protective tape that improves solder bonding properties and reduces wafer warping. The protective tape includes, in the following order, an adhesive agent layer, a first thermoplastic resin layer, a second thermoplastic resin layer, and a matrix film layer. The protective tape satisfies the conditions expressed by the following formulae (1) to (3): Ga>Gb (1) Ta