SEALING INTERFACE FOR CURTAIN CHAMBER
    1.
    发明公开

    公开(公告)号:US20240222104A1

    公开(公告)日:2024-07-04

    申请号:US18684195

    申请日:2022-08-16

    IPC分类号: H01J49/04 H01J49/06 H01J49/16

    摘要: A curtain chamber includes an orifice plate defining an orifice plate bore. A curtain plate is disposed adjacent to the orifice plate and defines a curtain plate bore. The orifice plate bore is disposed adjacent the curtain plate bore. A biasing element includes a first portion disposed in the orifice plate bore and a second portion disposed in the curtain plate bore. The biasing element biases the curtain plate towards the orifice plate. A race is defined by at least one of the orifice plate and the curtain plate. The race defines a race depth. A seal is disposed in the race. The seal includes an uncompressed seal depth greater than the race depth and a compressed seal depth less than the uncompressed seal depth.