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    Selective fin cut process
    1.
    发明授权
    Selective fin cut process 有权
    选择性翅片切割加工

    公开(公告)号：US08658536B1

    公开(公告)日：2014-02-25

    申请号：US13603725

    申请日：2012-09-05

    申请人： Dae-Han Choi ,  Jae Hee Hwang ,  Wontae Hwang

    发明人： Dae-Han Choi ,  Jae Hee Hwang ,  Wontae Hwang

    IPC分类号： H01L21/311

    CPC分类号： H01L21/308 ,  H01L21/823431 ,  H01L29/66795

    摘要： A process is provided for selective removal of one or more unwanted fins during FINFET device fabrication. In one aspect, the process includes: providing a conformal protective layer over multiple fin structures on a substrate; patterning one or more openings over the unwanted fin structure(s); and removing at least a top portion of the unwanted fin structure(s) exposed through the opening(s), the removing including removing at least a portion of the conformal protective layer over the unwanted fin structure(s) exposed through the opening(s). In enhanced aspects, the removing includes removing a hard mask from the at least one unwanted fin structure(s) exposed through the opening(s), and selectively removing semiconductor material of at least one unwanted fin structure(s). The conformal protective layer protects one or more remaining fin structures during the selective removal of the semiconductor material of the unwanted fin structure(s).

    摘要翻译： 提供了一种用于在FINFET器件制造期间选择性地去除一个或多个不需要的鳍片的工艺。 在一个方面，该方法包括：在衬底上的多个鳍结构上提供保形层; 在不需要的鳍结构上形成一个或多个开口; 以及去除通过所述开口暴露的所述不需要的翅片结构的至少顶部，所述移除包括将所述共形保护层的至少一部分去除在通过所述开口暴露的不需要的翅片结构之上 ）。 在增强的方面，去除包括从暴露在开口中的至少一个不需要的鳍结构去除硬掩模，以及选择性地去除至少一个不需要的鳍结构的半导体材料。 共形保护层在选择性地去除不想要的鳍结构的半导体材料期间保护一个或多个剩余的鳍结构。

    SYSTEM AND METHOD FOR OPERATING AN INTERNAL COMBUSTION ENGINE
    2.
    发明申请
    SYSTEM AND METHOD FOR OPERATING AN INTERNAL COMBUSTION ENGINE 审中-公开
    内燃机运行系统及方法

    公开(公告)号：US20120048218A1

    公开(公告)日：2012-03-01

    申请号：US12872146

    申请日：2010-08-31

    申请人： Adam Edgar Klingbeil ,  Wontae Hwang ,  Roy James Primus

    发明人： Adam Edgar Klingbeil ,  Wontae Hwang ,  Roy James Primus

    IPC分类号： F01L1/00

    CPC分类号： F02D13/0273 ,  F02D13/0269 ,  F02D13/028 ,  F02D23/02 ,  Y02T10/142

    摘要： An internal combustion engine is operated in accordance with a Miller cycle. The engine includes a piston disposed in the engine cylinder and configured to reciprocate between a top dead center position and a bottom dead center position of the engine cylinder. An air intake valve is coupled to the cylinder. The air intake valve is closed when the piston is about the bottom dead center position in the engine cylinder. An exhaust valve is coupled to the engine cylinder. The exhaust valve is opened for a predetermined time period when the piston is about the bottom dead center position of the engine cylinder after closing the intake valve so as to exhaust a predetermined quantity of fresh charge from the engine cylinder via the exhaust valve.

    摘要翻译： 内燃机按照米勒循环运行。 发动机包括设置在发动机气缸中并构造成在发动机气缸的上止点位置和下死点位置之间往复运动的活塞。 进气阀联接到气缸。 当活塞在发动机气缸中的下止点位置时，进气阀关闭。 排气门联接到发动机气缸。 在关闭进气阀之后，当活塞处于发动机气缸的下死点位置时，排气门打开预定的时间段，从而经由排气阀排出来自发动机气缸的预定量的新鲜电量。