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1.发明授权Modular all-electrostatic electron-optical column and assembly of said columns into an array and method of manufacture 失效模块化全静电电子光学柱和所述色谱柱组装成阵列和制造方法
公开(公告)号：US4661709A
公开(公告)日：1987-04-28
申请号：US749792
申请日：1985-06-28
IPC分类号： H01J37/30 , H01J37/317 , H01J3/38
CPC分类号： B82Y10/00 , B82Y40/00 , H01J37/3007 , H01J37/3177
摘要： The invention provides a modular-building block method and system of fabrication, installation, alignment and operation of a multi-beam assembly of miniaturized, all-electrostatic charged particle optical columns, such electron beam or ion beam optical columns mounted in parallel in a closely packed cluster over a small target surface area for parallel simultaneous charged particle beam writing on the target surface with the multiple-channel cluster of charged particle beam optical columns. The assembly provides a system and method of increased thru-put in the direct charged particle beam writing on semiconductor target wafers during fabrication of semiconductor micro-circuit chips.
摘要翻译： 本发明提供了一种用于小型化，全静电带电粒子光学柱的多光束组件的制造，安装，对准和操作的模块化构建块方法和系统，这种电子束或离子束光学柱被紧密地安装 在小目标表面区域上的堆叠簇，用于并行同时带电的粒子束在目标表面上与带有带电粒子束光柱的多通道簇一起写入。 该组件提供了在制造半导体微电路芯片期间在半导体靶晶片上的直接带电粒子束写入中增加通量的系统和方法。
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公开(公告)号：US4419580A
公开(公告)日：1983-12-06
申请号：US277554
申请日：1981-06-26
申请人： David M. Walker , John J. Carrona
发明人： David M. Walker , John J. Carrona
IPC分类号： H01J37/141 , H01J9/18 , H01J37/147 , H01J37/30 , H01J37/305 , H01L21/027 , G21K1/08 , G21K5/00
CPC分类号： H01J9/18 , H01J37/3007
摘要： An electron beam lens and deflector array mounting and alignment means are provided. The array is a structure composed of several parallel plates which are held in parallel and axial alignment. The mounting means comprises four slots, one at the end of the four corners of an imaginary rectangle, formed in each facing plate surface. Four cylindrical spacer rods are sandwich between the plates, each seated in two facing slots.
摘要翻译： 提供电子束透镜和偏转器阵列安装和对准装置。 阵列是由平行和轴向对准的多个平行板组成的结构。 安装装置包括四个槽，一个在假想矩形的四个角的端部，形成在每个相对的板表面中。 四个圆柱形间隔棒在板之间夹在中间，每个位于两个相对的槽中。
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