Modular all-electrostatic electron-optical column and assembly of said
columns into an array and method of manufacture
    4.
    发明授权
    Modular all-electrostatic electron-optical column and assembly of said columns into an array and method of manufacture 失效
    模块化全静电电子光学柱和所述色谱柱组装成阵列和制造方法

    公开(公告)号:US4661709A

    公开(公告)日:1987-04-28

    申请号:US749792

    申请日:1985-06-28

    IPC分类号: H01J37/30 H01J37/317 H01J3/38

    摘要: The invention provides a modular-building block method and system of fabrication, installation, alignment and operation of a multi-beam assembly of miniaturized, all-electrostatic charged particle optical columns, such electron beam or ion beam optical columns mounted in parallel in a closely packed cluster over a small target surface area for parallel simultaneous charged particle beam writing on the target surface with the multiple-channel cluster of charged particle beam optical columns. The assembly provides a system and method of increased thru-put in the direct charged particle beam writing on semiconductor target wafers during fabrication of semiconductor micro-circuit chips.

    摘要翻译: 本发明提供了一种用于小型化,全静电带电粒子光学柱的多光束组件的制造,安装,对准和操作的模块化构建块方法和系统,这种电子束或离子束光学柱被紧密地安装 在小目标表面区域上的堆叠簇,用于并行同时带电的粒子束在目标表面上与带有带电粒子束光柱的多通道簇一起写入。 该组件提供了在制造半导体微电路芯片期间在半导体靶晶片上的直接带电粒子束写入中增加通量的系统和方法。

    Photomultiplier tube having a stress isolation cage assembly
    5.
    发明授权
    Photomultiplier tube having a stress isolation cage assembly 失效
    具有应力隔离笼组件的光电倍增管

    公开(公告)号:US4355258A

    公开(公告)日:1982-10-19

    申请号:US216906

    申请日:1980-12-16

    CPC分类号: H01J43/00 H01J3/38

    摘要: A photomultiplier tube comprises an evacuated envelope having a photoemissive cathode therein. A cage assembly including an anode and a plurality of closely spaced dynodes are within the envelope. The anode has at least one support rod. Each of the dynodes has a pair of dynode tabs formed in the ends thereof. A pair of dynode support spacers having a plurality of stress isolation apertures and electrode support apertures formed therethrough are provided for supporting the dynodes and the anode. The dynode tabs and the anode support rod extend through the electrode support apertures. A plurality of deformable stress isolation eyelets comprising a tubular shank with a flare formed in one end of the shank are disposed within a different one of the stress isolation apertures. The flare diameter is greater than the diameter of the stress isolation apertures thereby retaining the eyelets within the apertures. A second end of the tubular shank, opposite the flared end, extends outwardly from the dynode support spacers. The outwardly extending end portion is crimped to lock the eyelets within the stress isolation apertures. Nickel leads are provided for flexibly interconnecting the crimped end portion of a different one of each of the eyelets to one end of each of the dynodes and to one end of the anode support rod. A stem closes one end of the envelope. A plurality of relatively stiff cage assembly support leads extend through the stem and are welded to the crimped end portion of the eyelets thereby firmly securing the cage assembly to the support leads and indirectly connecting the support leads to the dynodes and the anode.

    摘要翻译: 光电倍增管包括其中具有光发射阴极的真空外壳。 包括阳极和多个紧密间隔的倍增电极的笼组件在封套内。 阳极具有至少一个支撑杆。 每个倍增极在其端部中形成有一对倍增极片。 提供了一对具有多个应力隔离孔的倍增极支撑间隔物和通过其形成的电极支撑孔,用于支撑倍增电极和阳极。 倍增极片和阳极支撑杆延伸穿过电极支撑孔。 多个可变形应力隔离孔眼包括在柄的一端形成有喇叭口的管状柄,其设置在不同的一个应力隔离孔内。 喇叭直径大于应力隔离孔的直径,从而将孔眼保持在孔内。 管状柄的与扩口端相对的第二端从倍增极支撑间隔件向外延伸。 向外延伸的端部被压接以将孔眼锁定在应力隔离孔内。 提供镍引线用于将每个孔眼中的不同的一个的卷曲端部与每个倍增电极的一端和阳极支撑杆的一端灵活地互连。 杆关闭信封的一端。 多个相对刚性的笼组件支撑引线延伸穿过杆并且焊接到孔眼的压接端部,从而将保持架组件牢固地固定到支撑引线并将支撑引线间接地连接到倍增电极和阳极。

    Low volume, lightweight, high voltage electron gun
    6.
    发明授权
    Low volume, lightweight, high voltage electron gun 失效
    体积小,重量轻,高压电子枪

    公开(公告)号:US4340837A

    公开(公告)日:1982-07-20

    申请号:US110960

    申请日:1980-01-10

    申请人: Thomas W. Meyer

    发明人: Thomas W. Meyer

    IPC分类号: H01J3/38 H01J1/88 H01J19/42

    CPC分类号: H01J3/38

    摘要: A low volume, lightweight, high voltage electron gun having an overall size and weight of approximately 50% the size and weight of a conventional electron gun of the same output. This is accomplished by interposing between the cathode and the walls of the housing of the electron gun a thin piece of dielectric material of preselected breakdown strength. The dielectric material is in direct contact with both the cathode and the housing of the electron gun, with the voltage stress between the walls of the housing and the cathode being such that it does not exceed the breakdown strength of the dielectric material.

    摘要翻译: 一种体积小,重量轻的高压电子枪,其总体尺寸和重量相同输出的常规电子枪的尺寸和重量约为50%。 这是通过在阴极和电子枪壳体的壁之间插入预先击穿强度的薄的介电材料片来实现的。 电介质材料与电子枪的阴极和壳体直接接触,壳体的壁和阴极之间的电压应力使得其不超过电介质材料的击穿强度。

    Apparatuses, systems, and methods for ion traps

    公开(公告)号:US10950408B2

    公开(公告)日:2021-03-16

    申请号:US16774886

    申请日:2020-01-28

    发明人: Daniel Youngner

    摘要: Apparatuses, systems, and methods for ion traps are described herein. One apparatus includes a number of microwave (MW) rails and a number of radio frequency (RF) rails formed with substantially parallel longitudinal axes and with substantially coplanar upper surfaces. The apparatus includes two sequences of direct current (DC) electrodes with each sequence formed to extend substantially parallel to the substantially parallel longitudinal axes of the MW rails and the RF rails. The apparatus further includes a number of through-silicon vias (TSVs) formed through a substrate of the ion trap and a trench capacitor formed in the substrate around at least one TSV.

    ELECTROMAGNET MOUNTING FRAME, ELECTROMAGNET DEVICE, AND PARTICLE BEAM THERAPY SYSTEM

    公开(公告)号:US20200176211A1

    公开(公告)日:2020-06-04

    申请号:US16784752

    申请日:2020-02-07

    摘要: The electromagnet device comprises an electromagnet mounting frame and a plurality of electromagnets. The electromagnet mounting frame is characterized by including: a top plate for supporting the electromagnet; plural legs for sustaining the top plate; and a cable placement member fixed to the plural legs and placed below the top plate; wherein a cable placement portion in which a power cable for the electromagnet is to be placed so as to extend in a traveling direction of the charged particle beam, is formed between the cable placement member and the top plate; and wherein the cable placement portion has a cable placement width (widthwise inter-leg length) that is a length thereof in a direction perpendicular to the traveling direction of the charged particle beam, and that is longer than a width of the electromagnet in the direction perpendicular to the traveling direction of the charged particle beam.

    APPARATUSES, SYSTEMS, AND METHODS FOR ION TRAPS

    公开(公告)号:US20200027684A1

    公开(公告)日:2020-01-23

    申请号:US16399568

    申请日:2019-04-30

    发明人: Daniel Youngner

    摘要: Apparatuses, systems, and methods for ion traps are described herein. One apparatus includes a number of microwave (MW) rails and a number of radio frequency (RF) rails formed with substantially parallel longitudinal axes and with substantially coplanar upper surfaces. The apparatus includes two sequences of direct current (DC) electrodes with each sequence formed to extend substantially parallel to the substantially parallel longitudinal axes of the MW rails and the RF rails. The apparatus further includes a number of through-silicon vias (TSVs) formed through a substrate of the ion trap and a trench capacitor formed in the substrate around at least one TSV.