Optical Device Comprising a Cantilever and Method of Fabrication and Use Thereof
    1.
    发明申请
    Optical Device Comprising a Cantilever and Method of Fabrication and Use Thereof 有权
    包括悬臂的光学装置及其制造和使用方法

    公开(公告)号:US20090002714A1

    公开(公告)日:2009-01-01

    申请号:US12094352

    申请日:2005-11-28

    IPC分类号: G01B9/02

    CPC分类号: G01Q20/02 G01Q60/38

    摘要: The present invention provides an optical device, comprising an optical fiber and a cantilever that is arranged on an end of the optical fiber; The cantilever may be an integral part of the optical fiber, and may have a length that is substantially equal to a diameter of the optical fiber. Measurement means for measuring a displacement of the cantilever are connected to an opposite end of the, optical fiber. A method of measuring a displacement using the optical device comprises the steps of: —arranging measurement means, comprising a light source, on an opposite end of the optical fiber; —using the light source to send a beam of light into the optical fiber; —measuring the interference of light that is reflected on the end op the optical fiber and light that is reflected on the cantilever; and determining the displacement of the cantilever relative to an intermediate position dependent on the measured interference.

    摘要翻译: 本发明提供了一种光学装置,包括布置在光纤端部的光纤和悬臂; 悬臂可以是光纤的组成部分,并且可以具有基本上等于光纤直径的长度。 用于测量悬臂的位移的测量装置连接到光纤的相对端。 使用光学装置测量位移的方法包括以下步骤:在光纤的相对端上安置包括光源的测量装置; - 使用光源将光束发射到光纤中; - 测量反射在光纤上的光的干涉和反射在悬臂上的光; 并且根据所测量的干涉来确定悬臂相对于中间位置的位移。

    Optical device comprising a cantilever and method of fabrication and use thereof
    2.
    发明授权
    Optical device comprising a cantilever and method of fabrication and use thereof 有权
    包括悬臂的光学装置及其制造和使用方法

    公开(公告)号:US07916306B2

    公开(公告)日:2011-03-29

    申请号:US12094352

    申请日:2005-11-28

    IPC分类号: G01B11/02 G01B9/02

    CPC分类号: G01Q20/02 G01Q60/38

    摘要: The present invention provides an optical device, comprising an optical fiber and a cantilever that is arranged on an end of the optical fiber; The cantilever may be an integral part of the optical fiber, and may have a length that is substantially equal to a diameter of the optical fiber. Measurement means for measuring a displacement of the cantilever are connected to an opposite end of the, optical fiber. A method of measuring a displacement using the optical device comprises the steps of: —arranging measurement means, comprising a light source, on an opposite end of the optical fiber; —using the light source to send a beam of light into the optical fiber; —measuring the interference of light that is reflected on the end op the optical fiber and light that is reflected on the cantilever; and determining the displacement of the cantilever relative to an intermediate position dependent on the measured interference.

    摘要翻译: 本发明提供了一种光学装置,包括布置在光纤端部的光纤和悬臂; 悬臂可以是光纤的组成部分,并且可以具有基本上等于光纤直径的长度。 用于测量悬臂的位移的测量装置连接到光纤的相对端。 使用光学装置测量位移的方法包括以下步骤:在光纤的相对端上安置包括光源的测量装置; - 使用光源将光束发射到光纤中; - 测量反射在光纤上的光的干涉和反射在悬臂上的光; 并且根据所测量的干涉来确定悬臂相对于中间位置的位移。