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公开(公告)号：US20060155557A1
公开(公告)日：2006-07-13
申请号：US11032982
申请日：2005-01-11
申请人： Dennis Freeman , Neil Redden , Terrence O'Toole
发明人： Dennis Freeman , Neil Redden , Terrence O'Toole
CPC分类号： G06Q30/00 , C23C14/12 , C23C14/243 , G06Q10/0832 , G06Q30/0601
摘要： A method of providing a customized one time use vapor deposition source to a user includes a supplier receiving an order from the user; the supplier providing the one time use vapor deposition source to the user, wherein the one time use vapor deposition source includes at least a boat containing the organic material, a heating element, and an aperture plate; and the supplier receiving payment for the one time use vapor deposition source.
摘要翻译： 向用户提供定制的一次性气相沉积源的方法包括供应商从用户接收订单; 供应商向使用者提供一次性气相沉积源，其中一次性气相沉积源至少包括含有有机材料的船，加热元件和孔板; 并且供应商一次性使用气相沉积源。
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2.发明申请公开(公告)号：US20050211172A1
公开(公告)日：2005-09-29
申请号：US10971698
申请日：2004-10-25
申请人： Dennis Freeman , Neil Redden , Steven Slyke
发明人： Dennis Freeman , Neil Redden , Steven Slyke
IPC分类号： H05B33/10 , C23C14/12 , C23C14/24 , H01L51/00 , H01L51/30 , H01L51/40 , H01L51/50 , H01L51/56 , C23C16/00
CPC分类号： C23C14/243 , H01L51/001 , H01L51/0081 , H01L51/56
摘要： A container for vaporizing a solid material includes a housing having side walls, a bottom wall, and a cover enclosing an interior volume. The cover includes at least one aperture to permit egress of vapor efflux from the housing. A heater heats at least a portion of the housing to vaporize the solid material. A baffle disposed between the cover and the solid material prevents a direct line of sight between the solid material and the aperture(s) and is spaced from the cover to control the flow of vaporized material into a region between the baffle and the cover to promote uniformity of vapor efflux from the aperture(s). The ratio of the interior volume to a volume of the region between the baffle and the cover is at least approximately 20:1. The solid material can be an organic material used to form a layer of an organic light-emitting device.
摘要翻译： 用于蒸发固体材料的容器包括具有侧壁，底壁和封闭内部容积的盖的壳体。 该盖包括至少一个孔，以允许从壳体排出蒸气。 加热器加热壳体的至少一部分以使固体材料蒸发。 设置在盖和固体材料之间的挡板防止固体材料和孔之间的直接视线并且与盖间隔开以控制蒸发的材料流入挡板和盖之间的区域以促进 蒸气从孔径流出的均匀性。 挡板和盖板之间的内部体积与容积之比至少为20：1。 固体材料可以是用于形成有机发光装置的层的有机材料。
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公开(公告)号：US20060150915A1
公开(公告)日：2006-07-13
申请号：US11032899
申请日：2005-01-11
申请人： Dennis Freeman , Neil Redden
发明人： Dennis Freeman , Neil Redden
IPC分类号： C23C16/00
CPC分类号： C23C14/243 , C23C14/12
摘要： A vapor deposition source for depositing organic material includes a boat having a cavity for holding organic material and an aperture plate, having a plurality of spaced apertures, for enclosing the boat. The vapor deposition source also includes a heating element provided in the cavity between the aperture plate and the organic material, and a baffle member in contact with the heating element and having at least three surfaces which absorb energy from the heating element, the first surface redirecting energy to the aperture plate and the second and third surfaces redirecting energy to the boat walls and the organic material.
摘要翻译： 用于沉积有机材料的气相沉积源包括具有用于保持有机材料的腔体和孔板的舟皿，具有用于封闭船的多个间隔开的孔。 气相沉积源还包括设置在孔板和有机材料之间的空腔中的加热元件和与加热元件接触并具有至少三个吸收来自加热元件的能量的表面的挡板构件，第一表面重定向 能量到孔板，第二和第三表面将能量重新引导到船的壁和有机材料。
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公开(公告)号：US20070207261A1
公开(公告)日：2007-09-06
申请号：US11745504
申请日：2007-05-08
申请人： Michael Long , Randolph Brost , Jeremy Grace , Dennis Freeman , Neil Redden , Bruce Koppe
发明人： Michael Long , Randolph Brost , Jeremy Grace , Dennis Freeman , Neil Redden , Bruce Koppe
CPC分类号： C23C14/243 , C23C14/12 , H01L51/001 , H01L51/0059 , H01L51/0077 , H01L51/0081
摘要： A method for vaporizing organic materials onto a substrate surface to form a film including providing a quantity of organic material into a vaporization apparatus and actively maintaining the organic material in a first heating region in the vaporization apparatus to be below the vaporization temperature. The method also includes heating a second heating region of the vaporization apparatus above the vaporization temperature of the organic material and metering, at a controlled rate, organic material from the first heating region into the second heating region so that a thin cross section of the organic material is heated at a desired rate-dependent vaporization temperature, whereby organic material vaporizes and forms a film on the substrate surface.
摘要翻译： 一种用于将有机材料蒸发到基板表面上以形成膜的方法，所述方法包括向蒸发装置中提供一定数量的有机材料并主动将所述蒸发装置中的第一加热区域中的有机材料维持在汽化温度以下。 该方法还包括将蒸发装置的第二加热区域加热到有机材料的蒸发温度以上，并以受控的速率将有机材料从第一加热区域计量到第二加热区域，使得有机物的薄截面 材料以所需的速率依赖的蒸发温度被加热，由此有机材料在衬底表面上蒸发并形成膜。
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公开(公告)号：US20050208216A1
公开(公告)日：2005-09-22
申请号：US10805847
申请日：2004-03-22
申请人： Michael Long , Jeremy Grace , Bruce Koppe , Dennis Freeman , Neil Redden , Robert Zwaap
发明人： Michael Long , Jeremy Grace , Bruce Koppe , Dennis Freeman , Neil Redden , Robert Zwaap
CPC分类号： C23C14/24 , C23C14/12 , C23C14/243 , C23C14/26
摘要： A vapor deposition source for use in vacuum chamber for coating an organic layer on a substrate of an OLED device, includes a manifold including side and bottom walls defining a chamber for receiving organic material, and an aperture plate disposed between the side walls, the aperture plate having a plurality of spaced apart apertures for emitting vaporized organic material; the aperture plate including conductive material which in response to an electrical current produces heat; means for heating the organic material to a temperature which causes its vaporization, and heating the side walls of the manifold; and an electrical insulator coupling the aperture plate to the side walls for concentrating heat in the unsupported region of the aperture plate adjacent to the apertures, whereby the distance between the aperture plate and the substrate can be reduced to provide high coating thickness uniformity on the substrate.
摘要翻译： 用于在OLED器件的衬底上涂覆有机层的真空室中的气相沉积源包括：歧管，其包括限定用于接收有机材料的腔室的侧壁和底壁;以及设置在侧壁之间的孔板， 板具有多个间隔开的孔，用于发射蒸发的有机材料; 包括响应于电流的导电材料的孔板产生热量; 用于将有机材料加热到导致其蒸发的温度并加热歧管的侧壁的装置; 以及将孔板连接到侧壁上的电绝缘体，用于将热量集中在邻近孔的孔板的未支撑区域中，由此可以减小孔板和基板之间的距离，以在基板上提供高的涂层厚度均匀性 。
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公开(公告)号：US20050208220A1
公开(公告)日：2005-09-22
申请号：US10805980
申请日：2004-03-22
申请人： Michael Long , David Strip , Jeremy Grace , Dennis Freeman , Neil Redden , Bruce Koppe
发明人： Michael Long , David Strip , Jeremy Grace , Dennis Freeman , Neil Redden , Bruce Koppe
CPC分类号： C23C14/12 , C23C14/228 , C23C14/246 , Y10S427/101
摘要： A method for vaporizing organic materials onto a surface, to form a film includes providing a quantity of organic material in a fluidized powdered form; metering the powdered organic material and directing a stream of such fluidized powder onto a first member; heating the first member so that as the stream of fluidized powder is vaporized; collecting the vaporized organic material in a manifold; and providing a second member formed with at least one aperture in communication with the manifold that permits the vaporized organic material to be directed onto the surface to form a film.
摘要翻译： 将有机材料蒸发到表面上以形成膜的方法包括提供一定量的以流化粉末形式的有机材料; 计量粉状有机材料并将这种流化粉末的流引导到第一构件上; 加热第一构件，使得随着流化粉末流的蒸发; 将蒸发的有机材料收集在歧管中; 以及提供形成有至少一个与歧管连通的孔的第二构件，其允许蒸发的有机材料被引导到表面上以形成膜。
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公开(公告)号：US20050186340A1
公开(公告)日：2005-08-25
申请号：US10784585
申请日：2004-02-23
申请人： Michael Long , Randolph Brost , Jeremy Grace , Dennis Freeman , Neil Redden , Bruce Koppe
发明人： Michael Long , Randolph Brost , Jeremy Grace , Dennis Freeman , Neil Redden , Bruce Koppe
CPC分类号： C23C14/243 , C23C14/12 , H01L51/001 , H01L51/0059 , H01L51/0077 , H01L51/0081
摘要： A method for vaporizing organic materials onto a substrate surface to form a film including providing a quantity of organic material into a vaporization apparatus and actively maintaining the organic material in a first heating region in the vaporization apparatus to be below the vaporization temperature. The method also includes heating a second heating region of the vaporization apparatus above the vaporization temperature of the organic material and metering, at a controlled rate, organic material from the first heating region into the second heating region so that a thin cross section of the organic material is heated at a desired rate-dependent vaporization temperature, whereby organic material vaporizes and forms a film on the substrate surface.
摘要翻译： 一种用于将有机材料蒸发到基板表面上以形成膜的方法，所述方法包括向蒸发装置中提供一定数量的有机材料并主动将所述蒸发装置中的第一加热区域中的有机材料维持在汽化温度以下。 该方法还包括将蒸发装置的第二加热区域加热到有机材料的蒸发温度以上，并以受控的速率将有机材料从第一加热区域计量到第二加热区域，使得有机物的薄截面 材料以所需的速率依赖的蒸发温度加热，由此有机材料在衬底表面上蒸发并形成膜。
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公开(公告)号：US20070104890A1
公开(公告)日：2007-05-10
申请号：US11272320
申请日：2005-11-10
申请人： Michael Boroson , Ronald Cok , Michael Long , Dennis Freeman , Jeremy Grace
发明人： Michael Boroson , Ronald Cok , Michael Long , Dennis Freeman , Jeremy Grace
CPC分类号： C23C14/246 , C23C14/12 , C23C14/564
摘要： A method for evaporating a plurality of purified organic materials in a thermal physical vapor deposition system, comprising the steps of: mixing predetermined amounts of first and second organic materials to form a mixture of materials at a predetermined ratio; processing at least one of the organic materials at less than the sublimation temperature of the at least one of the organic materials before or after mixing to remove a first contaminant, wherein if processing is after mixing, the processing temperature is lower than the sublimation temperature of each of the organic materials; providing a thermal physical vapor deposition source; transferring the purified mixture of organic materials into the thermal physical vapor deposition source while maintaining the purified mixture of organic materials in a controlled, contaminant-free environment; and using the source to evaporate the purified mixture of organic materials.
摘要翻译： 一种用于在热物理气相沉积系统中蒸发多个纯化的有机材料的方法，包括以下步骤：混合预定量的第一和第二有机材料以形成预定比例的材料混合物; 在混合之前或之后以少于有机材料的升华温度处理至少一种有机材料以除去第一污染物，其中如果在混合后进行处理，则处理温度低于 每种有机材料; 提供热物理气相沉积源; 将有机材料的纯化混合物转移到热物理气相沉积源中，同时将有机材料的纯化混合物保持在受控的无污染环境中; 并使用源蒸发有机材料的纯化混合物。
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