System, method, and apparatus for mechanically releasable slider processing including lapping, air bearing patterning, and debonding
    7.
    发明授权
    System, method, and apparatus for mechanically releasable slider processing including lapping, air bearing patterning, and debonding 有权
    用于机械可拆卸的滑块加工的系统,方法和装置,包括研磨,空气轴承图案化和脱粘

    公开(公告)号:US07504038B2

    公开(公告)日:2009-03-17

    申请号:US10788145

    申请日:2004-02-26

    IPC分类号: B44C1/22

    CPC分类号: G11B5/127

    摘要: A mechanically releasable slider process utilizes silicone rubber or PDMS to take the function of a planarization material for individual sliders or slider rows. Mechanical debonding takes advantage of the rubber-elastic property of PDMS. A gripper is used in a virtually solvent-free, air bearing patterning UV-molding process and resist-based processes. A PDMS-based fixture is used during both the lapping process and the photo or UV-mold patterning of the ABS surface. This fixture can mechanically hold sliders by large area reversible adhesion while allowing gimbaling, electrical connection, actuation, UV-molding or photolithography, and mechanical release, thus reducing the number of slider manipulations to two.

    摘要翻译: 机械可剥离的滑块工艺利用硅橡胶或PDMS来承担各个滑块或滑块排的平面化材料的功能。 机械剥离利用了PDMS的橡胶弹性特性。 夹具用于几乎无溶剂的空气轴承图案化UV成型工艺和基于抗蚀剂的工艺。 在ABS表面的研磨过程和照相或UV模具图案化期间都使用基于PDMS的夹具。 该夹具可以通过大面积可逆粘合机械地保持滑块,同时允许伸缩,电连接,致动,UV成型或光刻,以及机械释放,从而将滑块操纵的数量减少到两个。