公开(公告)号：US5275479A

公开(公告)日：1994-01-04

申请号：US56580

申请日：1993-04-30

申请人： Didier Cruz ,  Claude Doche

发明人： Didier Cruz ,  Claude Doche

IPC分类号： H01L21/00 ,  H01L21/673 ,  H01L21/677 ,  A47B96/00

CPC分类号： H01L21/67373 ,  H01L21/67126 ,  H01L21/67376 ,  H01L21/67772

摘要： The invention permits the transfer between two containers of an object without the latter being in contact with the atmosphere around the containers. The system comprises two doors (12, 22) joined tightly to one another in such a way that the outer faces (13, 23) of these doors are positioned facing one another during opening, e.g. by winding the same around a drum (21). These doors are constituted by two flexible curtains sliding in lateral carriages. The system is particularly applicable to the production of semiconductor wafers or slices in an ultraclean atmosphere.

摘要翻译： 本发明允许物体的两个容器之间的转移，而不会使容器与容器周围的大气接触。 该系统包括彼此紧密连接的两个门（12,22），使得这些门的外表面（13,23）在打开期间彼此相对定位，例如， 通过将其卷绕在鼓（21）周围。 这些门由两个在侧面滑架上滑动的柔性窗帘构成。 该系统特别适用于在超大气氛中生产半导体晶片或切片。

公开(公告)号：US06273664B1

公开(公告)日：2001-08-14

申请号：US09155784

申请日：1999-04-12

申请人： Claude Doche

发明人： Claude Doche

IPC分类号： B65G4907

CPC分类号： H01L21/67748 ,  H01L21/67126 ,  Y10S414/139

摘要： A coupling system for the transfer of a flat object from a confinement box towards a processing unit for processing the flat object. The coupling system includes a first shutter, at least one second opening, a second shutter, and a third shutter associated with the second opening on a side facing the processing unit, and devices for releasing the first, second and third shutter, after coupling the transfer opening of the confinement box with the transfer opening of the processing unit, in order to allow the transfer of the object between the confinement box and the processing unit.

摘要翻译： 一种用于将扁平物体从限制箱传送到用于处理平坦物体的处理单元的联接系统。 联接系统包括第一快门，至少一个第二开口，第二快门和与面向处理单元的一侧上的第二开口相关联的第三快门，以及用于在联接之后释放第一，第二和第三快门的装置 将处理单元的传送开口传送到限制箱的开口，以便允许物体在限制箱和处理单元之间传送。

公开(公告)号：US06214425B1

公开(公告)日：2001-04-10

申请号：US08860471

申请日：1997-09-29

申请人： Philippe Spinelli ,  Claude Doche ,  Jean-Christophe Rostaing ,  François Coeuret ,  Sylvain Scotto D'Apolinia

发明人： Philippe Spinelli ,  Claude Doche ,  Jean-Christophe Rostaing ,  François Coeuret ,  Sylvain Scotto D'Apolinia

IPC分类号： B05D304

CPC分类号： H01L21/67353 ,  H01L21/67366 ,  Y10T428/1352 ,  Y10T428/1379 ,  Y10T428/1383 ,  Y10T428/265

摘要： The invention relates to a storage box for an object that is to be protected from physicochemical contamination. The storage box is intended to have low weight, good mechanical strength, a good electrical condition, with a low degassing rate in time with prevention of diffusion of gasses from the external atmosphere into the interior of the box. The inner and/or outer surface of the box's walls are coated with at least one protective layer. The box may be used to store silicon wafers.

摘要翻译： 本发明涉及一种用于物体的储存箱，其被保护免受物理化学污染。 存储箱旨在具有重量轻，机械强度好，电气条件好，并且具有低的脱气速度，同时防止气体从外部大气扩散到箱体内部。 箱壁的内表面和/或外表面涂覆有至少一个保护层。 该盒可用于存储硅晶片。

公开(公告)号：US5501564A

公开(公告)日：1996-03-26

申请号：US131211

申请日：1993-10-01

申请人： Claude Doche

发明人： Claude Doche

IPC分类号： B65G1/06 ,  B65G1/00 ,  B65G49/07 ,  H01L21/673 ,  H01L21/677 ,  B65G1/04

CPC分类号： H01L21/67769 ,  H01L21/67353 ,  H01L21/67748 ,  H01L21/67766 ,  H01L21/67778 ,  Y10S414/137 ,  Y10S414/139

摘要： According to the present invention, a system for storing and distributing flat objects to different working stations is provided. The system comprises storage modules (2), transportation or conveying modules (4, 4A) and distribution modules (5). All these modules are placed alongside one another to form a continuous chain. Each module has fixed or mobile rollers (7) constituting two superimposed displacement tracks for operating in two opposite directions. Portable racks (20) are also provided. Particular utility is found in storage and transportation of boxes containing silicon wafers.

摘要翻译： 根据本发明，提供了一种用于将平坦物体存储和分配到不同工作站的系统。 该系统包括存储模块（2），运输或运输模块（4,4A）和分配模块（5）。 所有这些模块彼此并排放置以形成连续的链条。 每个模块具有构成两个重叠的位移轨道的固定或移动辊（7），用于在两个相反的方向上操作。 还提供便携式机架（20）。 在含有硅晶片的箱子的储存和运输中发现了特别的用途。

公开(公告)号：US06431806B1

公开(公告)日：2002-08-13

申请号：US09320844

申请日：1999-05-26

申请人： Claude Doche

发明人： Claude Doche

IPC分类号： B65G4907

CPC分类号： H01L21/67772 ,  H01L21/67775 ,  Y10S414/14

摘要： An adapter device is placed on a movable plate of a base of an interface device to position a carrier pod at a preset height enabling a standard interfacing system with equipment machines to be used. A side wall of the adapter device comprises a guiding aperture enabling the carrier pod to pass to bring the first door and its lock into alignment with a front support plane of the side wall. A controller is provided to couple the first door with a second door and to unlock the first door when the side wall accosts against a front face of the interface device.

摘要翻译： 将适配器装置放置在接口装置的底座的可移动板上，以将承载架定位在预设高度，使得能够使用具有设备机器的标准接口系统。 适配器装置的侧壁包括导向孔，使导向架能够通过以使第一门及其锁与侧壁的前支撑平面对准。 提供控制器以将第一门与第二门耦合，并且当侧壁抵靠接口装置的正面时解锁第一门。

公开(公告)号：US5549205A

公开(公告)日：1996-08-27

申请号：US385065

申请日：1995-02-07

申请人： Claude Doche

发明人： Claude Doche

IPC分类号： B65D85/00 ,  B65D85/86 ,  H01L21/673 ,  B65D81/05 ,  B65D81/20

CPC分类号： H01L21/67353 ,  H01L21/67393

摘要： A box is provided for confining a semiconductor water in an ultra clean atmosphere between working or storage points. It is mainly constituted by a body closed by a door and equipped with a gas distributing block making it possible to diffuse a quasi-laminar flow around the article within the body.

摘要翻译： 提供了一个盒子，用于将半导体水限制在工作区或存储点之间的超清洁气氛中。 它主要由一个由门关闭并装有气体分配块的主体构成，使得可能在物体周围扩散准层流。

公开(公告)号：US06176023B1

公开(公告)日：2001-01-23

申请号：US09155746

申请日：1999-01-04

申请人： Claude Doche

发明人： Claude Doche

IPC分类号： F26B300

CPC分类号： H01L21/67757 ,  H01L21/67353 ,  H01L21/67379 ,  H01L21/67386 ,  H01L21/67393 ,  H01L21/67775

摘要： The present invention relates to a device and process for transporting flat objects confined in a specific atmosphere. The device comprises at least one assembly provided with several thin, flat cells (31) that open onto a lateral face (33) of said assembly with the cells arranged in parallel and linked by the same ventilation system. Each cell is constructed to receive a flat object (10) and is closed by an independent door (33). The cells are arranged in tandem and the device includes assembly means for interlocking an upper cell to an adjacent lower cell in each successive pair and in a complementary arrangement.

摘要翻译： 本发明涉及一种用于输送限制在特定气氛中的平坦物体的装置和方法。 该装置包括至少一个组件，该组件设置有几个薄的扁平电池（31），该电池单元（31）打开在所述组件的侧面（33）上，电池平行布置并通过相同的通风系统连接。 每个单元被构造成接收平坦的物体（10）并由独立的门（33）关闭。 电池串联布置，并且该装置包括用于将上电池与每个连续对中的相邻下电池互锁并且以互补布置的装配装置。

公开(公告)号：US5509772A

公开(公告)日：1996-04-23

申请号：US132696

申请日：1993-10-06

申请人： Claude Doche

发明人： Claude Doche

IPC分类号： B65G49/00 ,  B65G49/07 ,  G11B7/26 ,  H01L21/673 ,  H01L21/677 ,  B65G1/08

CPC分类号： H01L21/67196 ,  H01L21/67161 ,  H01L21/67353 ,  H01L21/67748 ,  H01L21/67778 ,  G11B7/26 ,  Y10S414/137 ,  Y10S414/139 ,  Y10S414/14

摘要： The system according to the invention makes it possible to handle and transfer flat objects under an ultraclean atmosphere without using white rooms. It essentially comprises interfaces (5) making it possible to receive individual boxes (1), each of which contains a flat object, opening each box and feeding each flat object into a working station (6A). The system is completed by tunnels (4) making it possible to transfer the flat objects from one working station (6A, 6B) to another.

摘要翻译： 根据本发明的系统使得可以在不使用白色房间的情况下在超大气氛下处理和转移平面物体。 它基本上包括接口（5），使得可以接收各自包含平面物体的单个盒子（1），打开每个盒子并将每个平面物体送入工作站（6A）。 通过隧道（4）完成系统，可以将平面物体从一个工作站（6A，6B）传送到另一个工作站。