公开(公告)号：US6147033A

公开(公告)日：2000-11-14

申请号：US407892

申请日：1999-09-29

申请人： Do Jun Youm ,  Doo Hoon Goo ,  Sang Hyun Oh

发明人： Do Jun Youm ,  Doo Hoon Goo ,  Sang Hyun Oh

IPC分类号： C23C14/56 ,  C23C16/54 ,  H01B13/00 ,  H01L39/24 ,  C23C14/00

CPC分类号： C23C14/562 ,  C23C16/545 ,  H01L39/2432

摘要： This invention relates to an apparatus and method for forming a high temperature superconducting film on a tape substrate. In this invention, the superconducting film is deposited on the tape substrate wound around a cylindrical substrate holder inserted in an auxiliary chamber. The holder rotates during the whole deposition process. Vapors of film materials are supplied from a main chamber through an opening between the two chambers. According to the present invention, it is possible to form a highly uniform high temperature superconducting film on a tape substrate at high speeds suitable for large scale production. The manufacturing speed can easily be controlled by the size of the substrate holder.

摘要翻译： 本发明涉及一种在带基材上形成高温超导膜的装置和方法。 在本发明中，超导膜沉积在卷绕在插入辅助室中的圆柱形基片架上的带基片上。 保持架在整个沉积过程中旋转。 薄膜材料的蒸气从主室通过两个室之间的开口供应。 根据本发明，可以在适于大规模生产的高速下在带基材上形成高度均匀的高温超导膜。 制造速度可以容易地通过基板支架的尺寸来控制。

公开(公告)号：US20080015111A1

公开(公告)日：2008-01-17

申请号：US11653170

申请日：2007-01-12

申请人： Sang Soo Oh ,  Ho Seop Kim ,  Kyu Jung Song ,  Do Jun Youm ,  Sun Mi Lim ,  Yong Hwan Jung ,  Sang Moo Lee ,  Ye Hyun Jung ,  Jae Eun Yoo

发明人： Sang Soo Oh ,  Ho Seop Kim ,  Kyu Jung Song ,  Do Jun Youm ,  Sun Mi Lim ,  Yong Hwan Jung ,  Sang Moo Lee ,  Ye Hyun Jung ,  Jae Eun Yoo

IPC分类号： H01L39/24

CPC分类号： H01L39/2445 ,  C23C14/087 ,  C23C14/22 ,  H01L39/2483

摘要： Disclosed herein is a method of fabricating a high temperature superconducting film in a vacuum chamber through auxiliary cluster beam spraying using an evaporation method, wherein a high temperature superconducting material is deposited on a substrate in a vapor state by evaporating the high temperature superconducting material, and at the same time, a cluster beam material is formed into gas atoms by heating the cluster beam material charged in a housing, and the formed gas atoms pass through a nozzle of an inlet of the housing and then are sprayed and grown on the substrate in the form of the cluster beam, thereby forming pinning centers in the high temperature superconducting film.

摘要翻译： 本文公开了一种通过使用蒸发法的辅助聚束束喷射在真空室中制造高温超导膜的方法，其中高温超导材料通过蒸发高温超导材料以蒸气状态沉积在基底上，以及 同时，通过加热装入壳体中的聚束束材料，将聚束束材料形成为气体原子，并且所形成的气体原子通过壳体入口的喷嘴，然后在基板上喷雾和生长 聚束束的形式，从而在高温超导膜中形成钉扎中心。

公开(公告)号：US07838061B2

公开(公告)日：2010-11-23

申请号：US11653170

申请日：2007-01-12

申请人： Sang Soo Oh ,  Ho Seop Kim ,  Kyu Jung Song ,  Do Jun Youm ,  Sun Mi Lim ,  Yong Hwan Jung ,  Sang Moo Lee ,  Ye Hyun Jung ,  Jae Eun Yoo

发明人： Sang Soo Oh ,  Ho Seop Kim ,  Kyu Jung Song ,  Do Jun Youm ,  Sun Mi Lim ,  Yong Hwan Jung ,  Sang Moo Lee ,  Ye Hyun Jung ,  Jae Eun Yoo

IPC分类号： B05D5/12 ,  B05D3/14 ,  H01L39/24 ,  C23C14/00

CPC分类号： H01L39/2445 ,  C23C14/087 ,  C23C14/22 ,  H01L39/2483

摘要： Disclosed herein is a method of fabricating a high temperature superconducting film in a vacuum chamber through auxiliary cluster beam spraying using an evaporation method, wherein a high temperature superconducting material is deposited on a substrate in a vapor state by evaporating the high temperature superconducting material, and at the same time, a cluster beam material is formed into gas atoms by heating the cluster beam material charged in a housing, and the formed gas atoms pass through a nozzle of an inlet of the housing and then are sprayed and grown on the substrate in the form of the cluster beam, thereby forming pinning centers in the high temperature superconducting film.

摘要翻译： 本文公开了一种通过使用蒸发法的辅助聚束束喷射在真空室中制造高温超导膜的方法，其中高温超导材料通过蒸发高温超导材料以蒸气状态沉积在基底上，以及 同时，通过加热装入壳体中的聚束束材料，将聚束束材料形成为气体原子，并且所形成的气体原子通过壳体入口的喷嘴，然后在基板上喷雾和生长 聚束束的形式，从而在高温超导膜中形成钉扎中心。