公开(公告)号：US20120174572A1

公开(公告)日：2012-07-12

申请号：US13346039

申请日：2012-01-09

申请人： Donato Clausi ,  Jan Piers ,  Dominiek Reynaerts ,  Stefan Braun ,  Henrik Gradin ,  Wouter van der Wijngaart

发明人： Donato Clausi ,  Jan Piers ,  Dominiek Reynaerts ,  Stefan Braun ,  Henrik Gradin ,  Wouter van der Wijngaart

IPC分类号： F03G7/06 ,  H05K13/04

CPC分类号： F03G7/065 ,  Y10T29/49169

摘要： The present invention relates to methods for the batch fixation and electrical connection of pre-strained SMA wires on a microstructured substrate using electroplating, providing high bond strength and electrical connections in one processing step. The integration process here developed relies on conventional micro machining techniques and it provides an efficient solution to some problems that have hindered the widespread diffusion of bulk SMA to MEMS, such as the lack of cost-efficient integration methods of bulk SMA and the difficult electrical contacting of the actuator material at small scale. Also disclosed herein is a Joule-heated SMA wire actuator on silicon MEMS.

摘要翻译： 本发明涉及使用电镀在微结构化衬底上批量固定和电连接预应变SMA线的方法，在一个处理步骤中提供高粘合强度和电连接。 这里开发的集成过程依赖于常规的微加工技术，并且可以有效地解决一些阻碍了体积SMA向MEMS的广泛扩散的问题，例如缺少体积SMA的成本有效的整合方法和难以接触的电接触 的致动器材料。 本文还公开了一种在硅MEMS上的焦耳加热的SMA线驱动器。

公开(公告)号：US07478481B2

公开(公告)日：2009-01-20

申请号：US11569648

申请日：2005-05-27

申请人： Dominiek Reynaerts ,  Jun Qian ,  Dries Hemschoote ,  Hendrik Van Brussel

发明人： Dominiek Reynaerts ,  Jun Qian ,  Dries Hemschoote ,  Hendrik Van Brussel

IPC分类号： G01D13/02

CPC分类号： G03F7/70775 ,  G01D5/24438

摘要： Laser interferometers and high-quality linear encoders both are competitive linear measurement systems used in high-precision machines. Plane laser interferometry allows measuring to a target that moves perpendicular to the measurement direction and to set up the laser beam in line with the functional point. In this way, a stacking of measurement systems can be avoided and a measurement configuration complying with the Abbe principle can be configured. On the other hand, laser interferometry is known to be sensitive to environmental changes. High-quality linear scales are used as an alternative. A disadvantage of linear scales is that the target is only allowed to move along the measurement axis. For targets translating in more than one direction with a range over several millimeters, this leads to a simple stacking of several linear scales together with the supporting slides. This indirect way of measuring introduces errors and partially destroys the accuracy provided by modern linear scales. This patent describes a measurement concept based on linear scales, which combines the stability to environmental changes, typical for linear scales, with the ability to measure to a target that moves also in a direction perpendicular to the measurement axis, typical for plane mirror laser interferometry. The measurement concept is especially interesting for multi-axis machines where a stable and homogeneous atmosphere cannot be guarantied and where measurements should be done during motion.

摘要翻译： 激光干涉仪和高品质线性编码器都是用于高精度机器的竞争性线性测量系统。 平面激光干涉测量允许测量到垂直于测量方向移动的目标，并且设置与功能点一致的激光束。 以这种方式，可以避免测量系统的堆叠，并且可以配置符合阿贝原理的测量配置。 另一方面，已知激光干涉测量对环境变化敏感。 作为替代品，使用高质量线性刻度。 线性刻度的缺点是目标只能沿测量轴移动。 对于多于一个方向的目标，其范围在几毫米以上，这导致了几个线性刻度与支持幻灯片的简单堆叠。 这种间接测量方式引入了错误，部分破坏了现代线性尺度提供的精度。 该专利描述了基于线性尺度的测量概念，其将稳定性与线性尺度典型的环境变化相结合，以及对垂直于测量轴的方向进行测量的能力，对于平面镜激光干涉测量 。 测量概念对于不能保证稳定和均匀的气氛以及在运动中应进行测量的多轴机器尤其有用。

公开(公告)号：US20090267451A1

公开(公告)日：2009-10-29

申请号：US12302409

申请日：2007-05-25

申请人： Dominiek Reynaerts ,  Hendrik Van Brussel ,  Wim Van De Vijver

发明人： Dominiek Reynaerts ,  Hendrik Van Brussel ,  Wim Van De Vijver

IPC分类号： H01L41/09 ,  H02N2/08

CPC分类号： H02N2/0025 ,  H02N2/005 ,  H02N2/0095 ,  H02N2/026

摘要： A piezoelectric motor has a stator module 1, comprising two pairs of piezoelectric actuators Ia, Ib and 2a, 2b inside this stator module. The stator module is fixed by a central fixing point (A). The piezoelectric actuators 1a, 1b, 2a, 2b are connected to the stator module via flexible or biasing elements 3, such as for instance hinges, for instance elastic hinges. The stator module 1 comprises a tuning mechanism 4, comprising at least one mass 4a, 4b and at least one flexible or biasing element 5a, 5b, 5c, 5d, for instance leaf springs. The stator module 1 is contacted to a driven part 6, for instance a slider, at the contact point (A). The piezoelectric motor is designed such that contact point (B) is able to produce a closed trajectory, thereby inducing a relative motion of the driven part 6. The contact point (B) is moved by applying an electric field to actuators Ia and Ib and/or by applying an electric field to actuators 2a and 2b.

摘要翻译： 压电马达具有定子模块1，该定子模块1包括在该定子模块内的两对压电致动器1a，1b和2a，2b。 定子模块由中心固定点（A）固定。 压电致动器1a，1b，2a，2b通过诸如铰链，例如弹性铰链的柔性或偏置元件3连接到定子模块。 定子模块1包括调谐机构4，其包括至少一个质量块4a，4b和至少一个柔性或偏置元件5a，5b，5c，5d，例如板簧。 定子模块1在接触点（A）处与被驱动部分6接触，例如滑块。 压电马达被设计成使得接触点（B）能够产生闭合的轨迹，从而引起被驱动部分6的相对运动。通过向致动器1a和1b施加电场来移动接触点（B），并且 /或通过向致动器2a和2b施加电场。

公开(公告)号：US20080040941A1

公开(公告)日：2008-02-21

申请号：US11569648

申请日：2005-05-27

申请人： Dominiek Reynaerts ,  Jun Qian ,  Dries Hemschoote ,  Hendrik Van Brussel

发明人： Dominiek Reynaerts ,  Jun Qian ,  Dries Hemschoote ,  Hendrik Van Brussel

IPC分类号： G01D13/02

CPC分类号： G03F7/70775 ,  G01D5/24438

摘要： Laser interferometers and high-quality linear encoders both are competitive linear measurement systems used in high-precision machines. Plane laser interferometry allows measuring to a target that moves perpendicular to the measurement direction and to set up the laser beam in line with the functional point. In this way, a stacking of measurement systems can be avoided and a measurement configuration complying with the Abbe principle can be configured. On the other hand, laser interferometry is known to be sensitive to environmental changes. High-quality linear scales are used as an alternative. A disadvantage of linear scales is that the target is only allowed to move along the measurement axis. For targets translating in more than one direction with a range over several millimetres, this leads to a simple stacking of several linear scales together with the supporting slides. This indirect way of measuring introduces errors and partially destroys the accuracy provided by modern linear scales. This patent describes a measurement concept based on linear scales, which combines the stability to environmental changes, typical for linear scales, with the ability to measure to a target that moves also in a direction perpendicular to the measurement axis, typical for plane mirror laser interferometry. The measurement concept is especially interesting for multi-axis machines where a stable and homogeneous atmosphere cannot be guarantied and where measurements should be done during motion.

摘要翻译： 激光干涉仪和高品质线性编码器都是用于高精度机器的竞争性线性测量系统。 平面激光干涉测量允许测量到垂直于测量方向移动的目标，并且设置与功能点一致的激光束。 以这种方式，可以避免测量系统的堆叠，并且可以配置符合阿贝原理的测量配置。 另一方面，已知激光干涉测量对环境变化敏感。 作为替代品，使用高质量线性刻度。 线性刻度的缺点是目标只能沿测量轴移动。 对于多于一个方向的目标，其范围在几毫米以上，这导致了几个线性刻度与支持幻灯片的简单堆叠。 这种间接测量方式引入了错误，部分破坏了现代线性尺度提供的精度。 该专利描述了基于线性尺度的测量概念，其将稳定性与线性尺度典型的环境变化相结合，以及对垂直于测量轴的方向进行测量的能力，对于平面镜激光干涉测量 。 测量概念对于不能保证稳定和均匀的气氛以及在运动中应进行测量的多轴机器尤其有用。

公开(公告)号：US07823499B2

公开(公告)日：2010-11-02

申请号：US11587989

申请日：2005-05-02

申请人： Michaël De Volder ,  Dominiek Reynaerts

发明人： Michaël De Volder ,  Dominiek Reynaerts

IPC分类号： F16J15/40 ,  F15B15/14

CPC分类号： F15B15/1433 ,  F16J15/43

摘要： Present invention involves a seal means suitable to replace the classic seals. For instance the seal means of present invention can be a liquid seal ring (7) to replace the classic rubber seal rings. Such is liquid O-ring can be adapted to resists the actuation pressure relying on surface tension forces. Such liquid O-rings can also be linked in series, hereby increasing the maximum seal pressure. In a preferred embodiment the seal means of present invention comprises two major components, a surface tension seal (7) and a pressure divider (4). The pressure divider will comprise a system that generates a pressure drop. Such pressure divider can be located before the surface tension seal and perform the first pressure drop. The combination of these two systems has the advantage that the surface tension seal is able to reduce the leakage to zero or essentially zero and that the pressure divider is able to perform a large pressure drop. Nevertheless, the surface tension seal can also create a considerable pressure drop. This means that in applications where the seal pressure of the surface tension seal is not exceeded, the pressure divider can be omitted. However, omitting the pressure divider will always result in tighter tolerances when manufacturing the seal.

摘要翻译： 本发明涉及一种适于代替经典密封件的密封装置。 例如，本发明的密封装置可以是液体密封环（7），以代替经典的橡胶密封环。 这样的液体O形环可以适应于抵抗基于表面张力的致动压力。 这样的液体O形圈也可以串联，从而增加最大的密封压力。 在优选实施例中，本发明的密封装置包括两个主要部件：表面张力密封件（7）和分压器（4）。 压力分配器将包括产生压降的系统。 这种分压器可以位于表面张力密封之前，并执行第一压降。 这两个系统的组合具有的优点是，表面张力密封件能够将泄漏减小至零或基本为零，并且分压器能够执行大的压降。 然而，表面张力密封也可能产生相当大的压降。 这意味着在不超过表面张力密封件的密封压力的应用中，可以省略分压器。 然而，在制造密封件时，省略分压器将总是导致更严格的公差。

公开(公告)号：US07728488B2

公开(公告)日：2010-06-01

申请号：US12302409

申请日：2007-05-25

申请人： Dominiek Reynaerts ,  Hendrik Van Brussel ,  Wim Van De Vijver

发明人： Dominiek Reynaerts ,  Hendrik Van Brussel ,  Wim Van De Vijver

IPC分类号： H02N2/00

CPC分类号： H02N2/0025 ,  H02N2/005 ,  H02N2/0095 ,  H02N2/026

摘要： A piezoelectric motor has a stator module (1), comprising two pairs of piezoelectric actuators (1a, 1b) and (2a, 2b) inside this stator module. The stator module is fixed by a central fixing point (A). The piezoelectric actuators (1a, 1b, 2a, 2b) are connected to the stator module via flexible or biasing elements (3), such as for instance hinges, for instance elastic hinges. The stator module (1) comprises a tuning mechanism (4), comprising at least one mass (4a, 4b) and at least one flexible or biasing element (5a, 5b, 5c, 5d), for instance leaf springs. The stator module (1) is contacted to a driven part (6), for instance a slider, at the contact point (A). The piezoelectric motor is designed such that contact point (B) is able to produce a closed trajectory, thereby inducing a relative motion of the driven part (6). The contact point (B) is moved by applying an electric field to actuators (1a and 1b) and/or by applying an electric field to actuators (2a and 2b).

摘要翻译： 压电电动机具有在该定子模块内部包括两对压电致动器（1a，1b）和（2a，2b）的定子模块（1）。 定子模块由中心固定点（A）固定。 压电致动器（1a，1b，2a，2b）通过柔性或偏置元件（3）连接到定子模块，例如铰链，例如弹性铰链。 定子模块（1）包括调谐机构（4），其包括至少一个质量块（4a，4b）和至少一个柔性或偏置元件（5a，5b，5c，5d），例如板簧。 定子模块（1）在接触点（A）处与被驱动部分（6）例如滑块接触。 压电马达被设计成使得接触点（B）能够产生闭合的轨迹，从而引起被驱动部分（6）的相对运动。 通过向致动器（1a和1b）施加电场和/或通过向致动器（2a和2b）施加电场来移动接触点（B）。

公开(公告)号：US20080277881A1

公开(公告)日：2008-11-13

申请号：US11587989

申请日：2005-05-02

申请人： Michael De Volder ,  Dominiek Reynaerts

发明人： Michael De Volder ,  Dominiek Reynaerts

IPC分类号： F16J15/40

CPC分类号： F15B15/1433 ,  F16J15/43

摘要： Present invention involves a seal means suitable to replace the classic seals. For instance the seal means of present invention can be a liquid seal ring (7) to replace the classic rubber seal rings. Such is liquid O-ring can be adapted to resists the actuation pressure relying on surface tension forces. Such liquid O-rings can also be linked in series, hereby increasing the maximum seal pressure. In a preferred embodiment the seal means of present invention comprises two major components, a surface tension seal (7) and a pressure divider (4). The pressure divider will comprise a system that generates a pressure drop. Such pressure divider can be located before the surface tension seal and perform the first pressure drop. The combination of these two systems has the advantage that the surface tension seal is able to reduce the leakage to zero or essentially zero and that the pressure divider is able to perform a large pressure drop. Nevertheless, the surface tension seal can also create a considerable pressure drop. This means that in applications where the seal pressure of the surface tension seal is not exceeded, the pressure divider can be omitted. However, omitting the pressure divider will always result in tighter tolerances when manufacturing the seal.

摘要翻译： 本发明涉及一种适于代替经典密封件的密封装置。 例如，本发明的密封装置可以是液体密封环（7），以代替经典的橡胶密封环。 这样的液体O形环可以适应于抵抗基于表面张力的致动压力。 这样的液体O形圈也可以串联，从而增加最大的密封压力。 在优选实施例中，本发明的密封装置包括两个主要部件：表面张力密封件（7）和分压器（4）。 压力分配器将包括产生压降的系统。 这种分压器可以位于表面张力密封之前，并执行第一压降。 这两个系统的组合具有的优点是，表面张力密封件能够将泄漏减小至零或基本为零，并且分压器能够执行大的压降。 然而，表面张力密封也可能产生相当大的压降。 这意味着在不超过表面张力密封件的密封压力的应用中，可以省略分压器。 然而，在制造密封件时，省略分压器将总是导致更严格的公差。