摘要:
Methods of forming a pattern and methods of fabricating a semiconductor device having a pattern are provided, the methods include forming a self-assembly induction layer including a first region and a second region on a semiconductor substrate. A block copolymer layer is coated on the self-assembly induction layer. A first pattern, a second pattern and a third pattern are formed by phase separating the block copolymer. At least one of the first, second and third patterns may be removed to form a preliminary pattern. An etching process may be performed using the preliminary pattern as an etching mask. The first pattern contains the same material as that of the second pattern, and the third pattern contains a material different from that of the first pattern.
摘要:
Methods of forming a pattern and methods of fabricating a semiconductor device having a pattern are provided, the methods include forming a self-assembly induction layer including a first region and a second region on a semiconductor substrate. A block copolymer layer is coated on the self-assembly induction layer. A first pattern, a second pattern and a third pattern are formed by phase separating the block copolymer. At least one of the first, second and third patterns may be removed to form a preliminary pattern. An etching process may be performed using the preliminary pattern as an etching mask. The first pattern contains the same material as that of the second pattern, and the third pattern contains a material different from that of the first pattern.
摘要:
A method of forming fine patterns of a semiconductor device is provided. The method includes forming plural preliminary first mask patterns, which are spaced apart from each other by a first distance in a direction parallel to a surface of a substrate, on the substrate; forming an acid solution layer on the substrate to cover the plural preliminary first mask patterns; forming plural first mask patterns which are spaced apart from each other by a second distance larger than the first distance, of which upper and side portions are surrounded by acid diffusion regions having first solubility; exposing the first acid diffusion regions by removing the acid solution layer; forming a second mask layer having second solubility lower than the first solubility in spaces between the acid diffusion regions; and forming plural second mask patterns located between the plural first mask patterns, respectively, by removing the acid diffusion regions by the dissolvent.
摘要:
A method of forming fine patterns of a semiconductor device is provided. The method includes forming plural preliminary first mask patterns, which are spaced apart from each other by a first distance in a direction parallel to a surface of a substrate, on the substrate; forming an acid solution layer on the substrate to cover the plural preliminary first mask patterns; forming plural first mask patterns which are spaced apart from each other by a second distance larger than the first distance, of which upper and side portions are surrounded by acid diffusion regions having first solubility; exposing the first acid diffusion regions by removing the acid solution layer; forming a second mask layer having second solubility lower than the first solubility in spaces between the acid diffusion regions; and forming plural second mask patterns located between the plural first mask patterns, respectively, by removing the acid diffusion regions by the dissolvent.
摘要:
A backlight unit comprises a light emitting diode (LED) package including one or more LED chips, a light source PCB mounting one side of a bottom of the LED package or both sides of the bottom of the LED package, a bottom cover supporting the light source PCB under the light source PCB, and having an embossing portion which protrudes toward the LED package with a size corresponding to the bottom of the LED package which is not mounted on the light source PCB, and a heat emission material filling between the bottom of the LED package and the embossing portion.
摘要:
A backlight unit comprises a light emitting diode (LED) package including one or more LED chips, a light source PCB mounting one side of a bottom of the LED package or both sides of the bottom of the LED package, a bottom cover supporting the light source PCB under the light source PCB, and having an embossing portion which protrudes toward the LED package with a size corresponding to the bottom of the LED package which is not mounted on the light source PCB, and a heat emission material filling between the bottom of the LED package and the embossing portion.
摘要:
A mobile terminal includes: a terminal main body having a window formed on a front surface thereof; an interface disposed at the side of the main body and electrically connected with an external device; and a cap module configured to open and close the interface, wherein the cap module includes: a cover configured to cover the interface; and a movement mechanism configured to rotate the cover toward a front side or a rear side of the main body from the side of the main body and slidably moving a rotational center of the cover by interworking with a rotation of the cover.
摘要:
Disclosed is a mobile terminal in which while a rear case is coupled to or separated from a terminal body, a case is slopingly moved with respect to the terminal body, so a camera hole of the rear case can be freely moved without being restricted by a camera mounting part protruded from the terminal body.
摘要:
A mobile terminal includes: a terminal main body having a window formed on a front surface thereof; an interface disposed at the side of the main body and electrically connected with an external device; and a cap module configured to open and close the interface, wherein the cap module includes: a cover configured to cover the interface; and a movement mechanism configured to rotate the cover toward a front side or a rear side of the main body from the side of the main body and slidably moving a rotational center of the cover by interworking with a rotation of the cover.