摘要:
Hardmask compositions having antireflective properties useful in lithographic processes, methods of using the same, and semiconductor devices fabricated by such methods, are provided. Antireflective hardmask compositions of the invention include: (a) a polymer component including at least one polymer having a monomeric unit of Formula (I) wherein R1 and R2 may each independently be hydrogen, hydroxyl, alkyl, aryl, allyl, halo, or any combination thereof; R3 and R4 may each independently be hydrogen, a crosslinking functionality, a chromophore, or any combination thereof; R5 and R6 may each independently be hydrogen or an alkoxysilane group; R7 may each independently be hydrogen, alkyl, aryl, allyl, or any combination thereof; and n may be a positive integer; (b) a crosslinking component; and (c) an acid catalyst.
摘要翻译:提供了具有抗平滑印刷工艺中有用的抗反射性能的硬掩模组合物,其使用方法以及通过这些方法制造的半导体器件。 本发明的抗反射硬掩模组合物包括:(a)包含至少一种具有式(I)的单体单元的聚合物的聚合物组分,其中R 1和R 2各自 独立地是氢,羟基,烷基,芳基,烯丙基,卤素或其任何组合; R 3和R 4可各自独立地为氢,交联官能团,发色团或其任何组合; R 5和R 6可各自独立地为氢或烷氧基硅烷基; R 7可各自独立地为氢,烷基,芳基,烯丙基或其任何组合; n可以是正整数; (b)交联组分; 和(c)酸催化剂。
摘要:
Hardmask compositions having antireflective properties useful in lithographic processes, methods of using the same, and semiconductor devices fabricated by such methods, are provided. Antireflective hardmask compositions of the invention include: a) a polymer component, including a first monomeric unit and a second monomeric unit, wherein both the first monomeric unit and the second monomeric unit include an aromatic group, and wherein at least one of the first monomeric unit and the second monomeric unit includes a phenol group; b) a crosslinking component; and c) an acid catalyst.
摘要:
Hardmask compositions having antireflective properties useful in lithographic processes, methods of using the same, and semiconductor devices fabricated by such methods, are provided. In some embodiments of the present invention, antireflective hardmask compositions include: a) a polymer component, which includes one or more of the monomeric units of Formulas I, II and III: b) a crosslinking component; and c) an acid catalyst.
摘要:
Hardmask compositions having antireflective properties useful in lithographic processes, methods of using the same, and semiconductor devices fabricated by such methods, are provided. Antireflective hardmask compositions of the invention include: (a) a polymer component including at least one polymer having a monomeric unit of Formula (I) wherein R1 and R2 may each independently be hydrogen, hydroxyl, C1-10 alkyl, C6-10 aryl, allyl, or halo; R3 and R4 may be each independently be hydrogen, a crosslinking functionality, or a chromophore; R5 and R6 may each independently be hydrogen or an alkoxysiloxane having the structure of Formula (II), wherein at least one of R5 and R6 is an alkoxysilane; wherein R8, R9, and R10 may each independently be a hydrogen, alkyl, or aryl; and x is 0 or a positive integer; R7 may be hydrogen, C1-10 alkyl, C6-10 aryl, or allyl; and n is a positive integer; (b) a crosslinking component; and (c) an acid catalyst.
摘要翻译:提供了具有抗平滑印刷工艺中有用的抗反射性能的硬掩模组合物,其使用方法以及通过这些方法制造的半导体器件。 本发明的抗反射硬掩模组合物包括:(a)包含至少一种具有式(I)的单体单元的聚合物的聚合物组分,其中R 1和R 2各自 独立地是氢,羟基,C 1-10烷基,C 6-10芳基,烯丙基或卤素; R 3和R 4可以各自独立地为氢,交联官能团或发色团; R 5和R 6可各自独立地为氢或具有式(II)结构的烷氧基硅氧烷,其中R 5和 和R 6是烷氧基硅烷; 其中R 8,R 9和R 10可各自独立地为氢,烷基或芳基; x为0或正整数; R 7可以是氢,C 1-10烷基,C 6-10芳基或烯丙基; 并且n是正整数; (b)交联组分; 和(c)酸催化剂。
摘要:
Hardmask compositions having antireflective properties useful in lithographic processes, methods of using the same, and semiconductor devices fabricated by such methods, are provided. Antireflective hardmask compositions of the invention include: (a) a polymer mixture including a first polymer that includes one or more of the following monomeric units wherein A is a bivalent radical selected from the group consisting of carbonyl, oxy, alkylene, fluoroalkylene, phenyldioxy, and any combination thereof; R1 and R2 are each independently a bivalent radical selected from the group consisting of an alkylene, an arylene, and any combination thereof; and x, y, and z are 0 or integers; and a second polymer including an aryl group; (b) a crosslinking component; and (c) an acid catalyst.
摘要翻译:提供了具有抗平滑印刷工艺中有用的抗反射性能的硬掩模组合物,其使用方法以及通过这些方法制造的半导体器件。 本发明的抗反射硬掩模组合物包括:(a)包含第一聚合物的聚合物混合物,其包含一种或多种下列单体单元,其中A是选自羰基,氧基,亚烷基,氟代亚烷基,苯基二氧基, 及其任何组合; R 1和R 2各自独立地为选自亚烷基,亚芳基及其任何组合的二价基团; x,y和z为0或整数; 和包含芳基的第二聚合物; (b)交联组分; 和(c)酸催化剂。
摘要:
A method and system are provided for updating software on a handheld computer in communication with a client computer system operable to connect to a network. Software installed on the handheld computer is identified with the client computer. Moreover, information on the identified software is transmitted from the client computer to a server connected to the network. Further, updated versions of the software installed on the handheld computer are transferred from the server to the client computer based on the identified software that is installed on the handheld computer. Still yet, the software installed on the handheld computer is updated with the updated versions transferred to the client computer.
摘要:
An optical payment transceiver and an optical settlement system using the same uses a personal portable terminal incorporated with an optical transceiver as a card substitute payment unit for settlement. Here, card information is incorporated in a personal portable terminal incorporated with an optical transceiver such as a portable phone or a PDA and the optical transceiver is connected to a card inquiry machine to thereby optically transmit and receive card information. The card inquiry machine recognizes the received card information in the same manner as that of the card reader reading a magnetic card, and transmits the card information to a VAN company server or a card company server, to then request for an approval and settle transactions. The present invention is applied to most fields where financial transactions are performed as in a general commerce, a toll gate fee or tunnel passage fee collection system, a subway or bus fare levying system, a gas station, a department store, a drive-thru ordering system, a vending machine, and a fee payment system of kiosks. Also, the present invention can be applied to an entrance/exit security system requiring personal identification. Thus, the present invention can use a portable terminal as a payment unit without carrying a cash or cards, to thereby provide an effect of performing a safer and more reliable credit transaction.
摘要:
Disclosed is a polyester conjugated yarn, including two types of polymers having a large intrinsic viscosity difference subjected to bi-component spinning so as to be longitudinally arranged in a side-by-side sectional structure, in which the twp types of polymers are polyethyleneterephthalate having intrinsic viscosity of 0.45-0.65 as a first polymer and polytrimethyleneterephthalate having intrinsic viscosity of 0.90-1.10 as a second polymer. The polyester conjugated yarn is advantageous in terms of superior spinnability and high uniformity index. In addition, the polyester conjugated yarn can exhibit high self-crimping properties through relaxation-heat treatment of the dyeing and finishing process, and as well, can be applied to manufacture woven/knit fabrics having softness to the touch, beautiful colors, and high drapery and bulk properties, due to inherent characteristics of polytrimentyleneterephthalate.
摘要:
Provided is a portable Internet terminal apparatus for wireless broadband Internet, including: a processor core unit controlling a wireless Internet connection or a wired Internet connection if the wireless connection to the Internet is difficult or impossible; a user input and output unit controlling connections to peripheral devices comprising a display, a key pad, and a transmitter and/or receiver to provide an input and output user interface for a user who uses the Internet provided under the control of the processor core unit; and a network access unit providing an Internet connection function under the control of the processor core unit.
摘要:
A liquid crystal display device includes a plurality of pixel electrodes to which a data voltage is supplied, a plurality of common electrodes arranged to form electric fields with the pixel electrodes, a plurality of common wire lines commonly connected to the common electrodes in each horizontal line, a plurality of common voltage drive circuits to supply a common voltage to each of the corresponding common wire lines, and a controller for generating clock signals to control the common voltage drive circuits to invert an electric potential of the common voltage to be output from each of the common voltage drive circuits for each frame period.