公开(公告)号：US20120168404A1

公开(公告)日：2012-07-05

申请号：US13181660

申请日：2011-07-13

Applicant: Du-hyun LEE ,  Byung-kyu LEE ,  Woong KO

Inventor： Du-hyun LEE ,  Byung-kyu LEE ,  Woong KO

IPC: C23F1/02

CPC classification number: G03F7/0002 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0017

Abstract: A method of fabricating a nanoimprint stamp includes forming a resist pattern having a nano size width on a stamp substrate by performing imprint processes repeatedly. In the imprint processes, resist layers that are selectively etched are sequentially used. The stamp substrate is etched using the resist pattern as an etch mask.

Abstract translation: 制造纳米压印印模的方法包括通过重复进行压印处理，在印模基板上形成具有纳米尺寸宽度的抗蚀剂图案。 在压印工艺中，依次使用被选择性蚀刻的抗蚀剂层。 使用抗蚀剂图案作为蚀刻掩模蚀刻印模基板。

公开(公告)号：US20130187309A1

公开(公告)日：2013-07-25

申请号：US13620219

申请日：2012-09-14

Applicant: Ki-yeon YANG ,  Byung-kyu LEE ,  Du-hyun LEE ,  Woong KO ,  Jae-kwan KIM

Inventor： Ki-yeon YANG ,  Byung-kyu LEE ,  Du-hyun LEE ,  Woong KO ,  Jae-kwan KIM

IPC: B29C59/02

CPC classification number: B29C43/021 ,  B29C43/10 ,  B29C2043/025 ,  B29C2043/3233 ,  B29C2043/3238 ,  B29C2043/3615 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002

Abstract: A stamp includes a transparent body having an inner chamber containing an inlet/outlet tube configured to have a fluid injected and removed therefrom.

Abstract translation: 邮票包括具有内部腔室的透明主体，该内部腔室包括被配置为具有从其喷射和移除的流体的入口/出口管。

公开(公告)号：US20130147096A1

公开(公告)日：2013-06-13

申请号：US13617874

申请日：2012-09-14

Applicant: Ki-yeon YANG ,  Woong KO ,  Jae-kwan KIM ,  Du-hyun LEE ,  Byung-kyu LEE

Inventor： Ki-yeon YANG ,  Woong KO ,  Jae-kwan KIM ,  Du-hyun LEE ,  Byung-kyu LEE

IPC: B29C59/02 ,  B29C35/08

CPC classification number: G03F7/0002 ,  B29C59/022 ,  B82Y10/00 ,  B82Y40/00 ,  Y10S977/887

Abstract: An imprinting stamp and a nano-imprinting method using the imprinting stamp are provided. The imprinting stamp includes a first substrate; one or more field regions on the first substrate, the first substrate including nano-patterns; and a first dummy pattern region on the first substrate and adjacent to the field region, the dummy pattern region including first dummy patterns having greater dimensions than that of the nano-patterns, the first dummy patterns being a plurality of polygons, each of the polygons having a vertex pointing in a first direction proceeding from the field region toward the first dummy pattern region.

Abstract translation: 提供使用印记印记的印记印记和纳米印记法。 印记印模包括第一基板; 所述第一基板上的一个或多个场区域，所述第一基板包括纳米图案; 以及在所述第一基板上并与所述场区域相邻的第一虚拟图案区域，所述虚设图案区域包括具有比所述纳米图案的尺寸大的第一虚拟图案，所述第一虚设图案是多个多边形，每个所述多边形 具有指向从场区域朝向第一虚拟图案区域的第一方向的顶点。

公开(公告)号：US20120104353A1

公开(公告)日：2012-05-03

申请号：US13338902

申请日：2011-12-28

Applicant: Byung-kyu LEE ,  Du-hyun Lee ,  Myoung-jae Lee

Inventor： Byung-kyu LEE ,  Du-hyun Lee ,  Myoung-jae Lee

IPC: H01L47/00 ,  B44C1/22 ,  B29C59/00

CPC classification number: H01L45/04 ,  H01L27/2481 ,  H01L45/146 ,  H01L45/1666

Abstract: A cross point memory array includes a structure in which holes are formed in an insulating layer and a storage node is formed in each of the holes. The storage node may include a memory resistor and a switching structure. The master for an imprint process used to form the cross-point memory array includes various pattern shapes, and the method of manufacturing the master uses various etching methods.

Abstract translation: 交叉点存储器阵列包括其中在绝缘层中形成空穴并且在每个孔中形成存储节点的结构。 存储节点可以包括存储器电阻器和开关结构。 用于形成交叉点存储器阵列的压印处理的主机包括各种图案形状，并且制造母版的方法使用各种蚀刻方法。

公开(公告)号：US20080084635A1

公开(公告)日：2008-04-10

申请号：US11748566

申请日：2007-05-15

Applicant: Du-hyun LEE ,  Seong-yong YOON ,  Jin-seung SOHN ,  Byung-kyu LEE

Inventor： Du-hyun LEE ,  Seong-yong YOON ,  Jin-seung SOHN ,  Byung-kyu LEE

IPC: G11B5/82

CPC classification number: G11B5/82 ,  B82Y10/00 ,  G11B5/65 ,  G11B5/743 ,  G11B5/855

Abstract: Provided are a magnetic recording medium and a method of manufacturing the magnetic recording medium. The magnetic recording medium includes a substrate, a soft magnetic underlayer formed on the substrate, a texturing layer formed on the soft magnetic underlayer and including a uniform pattern, and a recording layer including magnetic grains and a non-magnetic boundary region isolating the magnetic grains. The magnetic grains and the non-magnetic boundary region of the recording layer are formed into a regular granular structure by segregation according to the regular pattern of the texturing layer. Therefore, a regular granular structure can be formed in the recording layer without a process such as etching of the recording layer, so that the recording density of the magnetic recording medium can be largely improved.

Abstract translation: 提供磁记录介质和制造磁记录介质的方法。 磁记录介质包括基板，形成在基板上的软磁性底层，形成在软磁性底层上的包含均匀图案的纹理层，以及包括磁性颗粒和磁性颗粒隔离的非磁性边界区域的记录层 。 根据纹理层的规则图案，记录层的磁性颗粒和非磁性边界区域通过偏析形成规则的颗粒结构。 因此，可以在记录层中形成规则的颗粒结构，而不需要诸如蚀刻记录层的处理，从而可以大大提高磁记录介质的记录密度。