公开(公告)号：US10824138B2

公开(公告)日：2020-11-03

申请号：US16258137

申请日：2019-01-25

Applicant: EBARA CORPORATION

Inventor： Koji Nonobe ,  Takashi Mitsuya ,  Ryuya Koizumi ,  Kunio Oishi

IPC: G05B19/418 ,  G05B19/4155

Abstract: A calculation amount and calculation time for a substrate conveyance schedule are reduced. A scheduler is provided which is incorporated in a control section of a substrate processing apparatus including a plurality of substrate processing sections that process a substrate, a conveyance section that conveys the substrate, and the control section that controls the conveyance section and the substrate processing sections, and calculates a substrate conveyance schedule. The scheduler includes: a modeling section that models processing conditions, processing time and constraints of the substrate processing apparatus into nodes and edges using a graph network theory, prepares a graph network, and calculates a longest route length to each node; and a calculation section that calculates the substrate conveyance schedule based on the longest route length.

公开(公告)号：US20210011462A1

公开(公告)日：2021-01-14

申请号：US17036189

申请日：2020-09-29

Applicant: EBARA CORPORATION

Inventor： Koji Nonobe ,  Takashi Mitsuya ,  Ryuya Koizumi ,  Kunio Oishi

IPC: G05B19/4155 ,  H01L21/677 ,  G05B19/418 ,  H01L21/67

Abstract: A calculation amount and calculation time for a substrate conveyance schedule are reduced. A scheduler is provided which is incorporated in a control section of a substrate processing apparatus including a plurality of substrate processing sections that process a substrate, a conveyance section that conveys the substrate, and the control section that controls the conveyance section and the substrate processing sections, and calculates a substrate conveyance schedule. The scheduler includes: a modeling section that models processing conditions, processing time and constraints of the substrate processing apparatus into nodes and edges using a graph network theory, prepares a graph network, and calculates a longest route length to each node; and a calculation section that calculates the substrate conveyance schedule based on the longest route length.

公开(公告)号：US11099546B2

公开(公告)日：2021-08-24

申请号：US17036189

申请日：2020-09-29

Applicant: EBARA CORPORATION

Inventor： Koji Nonobe ,  Takashi Mitsuya ,  Ryuya Koizumi ,  Kunio Oishi

IPC: H01L21/677 ,  G05B19/418 ,  G05B19/4155 ,  H01L21/67

Abstract: A calculation amount and calculation time for a substrate conveyance schedule are reduced. A scheduler is provided which is incorporated in a control section of a substrate processing apparatus including a plurality of substrate processing sections that process a substrate, a conveyance section that conveys the substrate, and the control section that controls the conveyance section and the substrate processing sections, and calculates a substrate conveyance schedule. The scheduler includes: a modeling section that models processing conditions, processing time and constraints of the substrate processing apparatus into nodes and edges using a graph network theory, prepares a graph network, and calculates a longest route length to each node; and a calculation section that calculates the substrate conveyance schedule based on the longest route length.

公开(公告)号：US10824135B2

公开(公告)日：2020-11-03

申请号：US15868753

申请日：2018-01-11

Applicant: EBARA CORPORATION

Inventor： Koji Nonobe ,  Takashi Mitsuya ,  Ryuya Koizumi ,  Kunio Oishi

IPC: G05B19/4155 ,  H01L21/677 ,  G05B19/418 ,  H01L21/67

Abstract: A calculation amount and calculation time for a substrate conveyance schedule are reduced. A scheduler is provided which is incorporated in a control section of a substrate processing apparatus including a plurality of substrate processing sections that process a substrate, a conveyance section that conveys the substrate, and the control section that controls the conveyance section and the substrate processing sections, and calculates a substrate conveyance schedule. The scheduler includes: a modeling section that models processing conditions, processing time and constraints of the substrate processing apparatus into nodes and edges using a graph network theory, prepares a graph network, and calculates a longest route length to each node; and a calculation section that calculates the substrate conveyance schedule based on the longest route length.