公开(公告)号：US20210395916A1

公开(公告)日：2021-12-23

申请号：US17408166

申请日：2021-08-20

Applicant: ELEMENT SIX TECHNOLOGIES LIMITED

Inventor： RIZWAN KHAN ,  STEVEN COE ,  JONATHAN WILMAN (DECEASED) ,  DANIEL TWITCHEN ,  GEOFFREY SCARSBROOK ,  JOHN BRANDON ,  CHRISTOPHER WORT ,  MATTHEW MARKHAM ,  IAN FRIEL ,  KATHARINE ROBERTSON

IPC: C30B25/10 ,  C23C16/27 ,  C30B29/04 ,  C23C16/511

Abstract: A method of fabricating synthetic diamond material using a microwave plasma activated chemical vapour deposition technique is provided which utilizes high and uniform microwave power densities applied over large areas and for extended periods of time. Products fabricated using such a synthesis technique are described including a single crystal CVD diamond layer which has a large area and a low nitrogen concentration, and a high purity, fast growth rate single crystal CVD diamond material.

公开(公告)号：US20210118766A1

公开(公告)日：2021-04-22

申请号：US16464397

申请日：2017-12-15

Applicant: ELEMENT SIX TECHNOLOGIES LIMITED

Inventor： JULIAN ELLIS ,  JOHN BRANDON ,  FRANCIS MARK REININGER

IPC: H01L23/373 ,  C30B29/04 ,  C30B25/18 ,  C30B29/64

Abstract: A synthetic diamond plate comprising a polygonal plate formed of synthetic diamond material, the polygonal plate of synthetic diamond material having a thickness in a range 0.4 mm to 1. mm, and rounded corners having a radius of curvature in a range 1 mm to 6 mm. A mounted synthetic diamond plate is also disclosed comprising a polygonal synthetic diamond plate as described and a base to which the polygonal synthetic diamond plate is bonded, wherein the base comprises a cooling channel. An array of mounted synthetic diamond plates is also described, comprising a plurality of mounted synthetic diamond plates described above, wherein the cooling channels of the mounted synthetic diamond plates are linked to form a common cooling channel across the array of mounted synthetic diamond plates.

公开(公告)号：US20170009376A1

公开(公告)日：2017-01-12

申请号：US15036692

申请日：2014-11-18

Applicant: ELEMENT SIX TECHNOLOGIES LIMITED

Inventor： RIZWAN KHAN ,  STEVEN COE ,  JONATHAN WILMAN ,  DANIEL TWITCHEN ,  GEOFFREY SCARSBROOK ,  JOHN BRANDON ,  CHRISTOPHER WORT ,  MATTHEW MARKHAM ,  IAN FRIEL ,  KATHARINE ROBERTSON

IPC: C30B25/10 ,  C23C16/511 ,  C30B29/04 ,  C23C16/27

CPC classification number: C30B25/105 ,  C23C16/274 ,  C23C16/511 ,  C30B29/04

Abstract: A method of fabricating synthetic diamond material using a microwave plasma activated chemical vapour deposition technique is provided which utilizes high and uniform microwave power densities applied over large areas and for extended periods of time. Products fabricated using such a synthesis technique are described including a single crystal CVD diamond layer which has a large area and a low nitrogen concentration, and a high purity, fast growth rate single crystal CVD diamond material.

Abstract translation: 提供了使用微波等离子体激活化学气相沉积技术制造合成金刚石材料的方法，其利用在大面积上并且延长的时间段施加的高且均匀的微波功率密度。 描述了使用这种合成技术制造的产品，其包括具有大面积和低氮浓度的单晶CVD金刚石层以及高纯度，快速生长速率的单晶CVD金刚石材料。