公开(公告)号：US10895010B2

公开(公告)日：2021-01-19

申请号：US15334040

申请日：2016-10-25

Applicant: Entegris, Inc.

Inventor： John M. Cleary ,  Jose I. Arno ,  Bryan C. Hendrix ,  Donn Naito ,  Scott Battle ,  John N. Gregg ,  Michael J. Wodjenski ,  Chongying Xu

IPC: C23C16/448 ,  C23C16/44 ,  C23C14/48 ,  C23C16/455 ,  C23C16/08 ,  C23C16/16 ,  C23C16/18 ,  C23C16/30

Abstract: Apparatus and method for volatilizing a source reagent susceptible to particle generation or presence of particles in the corresponding source reagent vapor, in which such particle generation or presence is suppressed by structural or processing features of the vapor generation system. Such apparatus and method are applicable to liquid and solid source reagents, particularly solid source reagents such as metal halides, e.g., hafnium chloride. The source reagent in one specific implementation is constituted by a porous monolithic bulk form of the source reagent material. The apparatus and method of the invention are usefully employed to provide source reagent vapor for applications such as atomic layer deposition (ALD) and ion implantation.

公开(公告)号：US20170037511A1

公开(公告)日：2017-02-09

申请号：US15334040

申请日：2016-10-25

Applicant: Entegris, Inc.

Inventor： John M. Cleary ,  Jose I. Arno ,  Bryan C. Hendrix ,  Donn Naito ,  Scott Battle ,  John N. Gregg ,  Michael J. Wodjenski ,  Chongying Xu

IPC: C23C16/448 ,  C23C16/455 ,  C23C16/30 ,  C23C16/16 ,  C23C16/18 ,  C23C14/48 ,  C23C16/08

CPC classification number: C23C16/4481 ,  C23C14/48 ,  C23C16/08 ,  C23C16/16 ,  C23C16/18 ,  C23C16/30 ,  C23C16/4402 ,  C23C16/45525 ,  C23C16/45544

Abstract: Apparatus and method for volatilizing a source reagent susceptible to particle generation or presence of particles in the corresponding source reagent vapor, in which such particle generation or presence is suppressed by structural or processing features of the vapor generation system. Such apparatus and method are applicable to liquid and solid source reagents, particularly solid source reagents such as metal halides, e.g., hafnium chloride. The source reagent in one specific implementation is constituted by a porous monolithic bulk form of the source reagent material. The apparatus and method of the invention are usefully employed to provide source reagent vapor for applications such as atomic layer deposition (ALD) and ion implantation.

Abstract translation: 挥发易于产生颗粒的源试剂的源试剂的装置和方法，其中通过蒸气发生系统的结构或加工特征抑制了这种颗粒产生或存在的相应源试剂蒸气。 这种装置和方法适用于液体和固体源试剂，特别是固体源试剂如金属卤化物，例如氯化铪。 一种具体实施方案中的源试剂由源试剂材料的多孔整体块形式构成。 本发明的装置和方法有用地用于提供用于例如原子层沉积（ALD）和离子注入的应用的源试剂蒸气。

公开(公告)号：US20160041136A1

公开(公告)日：2016-02-11

申请号：US14887023

申请日：2015-10-19

Applicant: Entegris, Inc.

Inventor： James Dietz ,  Steven E. Bishop ,  James V. McManus ,  Steven M. Lurcott ,  Michael J. Wodjenski ,  Robert Kaim ,  Frank DiMeo, JR.

IPC: G01N33/00 ,  H01L21/66

CPC classification number: G01N33/00 ,  F17C11/00 ,  G01F15/063 ,  G01F22/02 ,  G01F23/0076 ,  G01M3/32 ,  G01M3/3236 ,  G06Q10/087 ,  G06Q30/04 ,  G06Q50/04 ,  H01L21/561 ,  H01L21/568 ,  H01L21/6835 ,  H01L22/10 ,  H01L23/5389 ,  H01L24/24 ,  H01L24/48 ,  H01L24/82 ,  H01L25/03 ,  H01L25/0652 ,  H01L25/16 ,  H01L2224/16225 ,  H01L2224/16227 ,  H01L2224/24011 ,  H01L2224/2518 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2924/00014 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01023 ,  H01L2924/01027 ,  H01L2924/01033 ,  H01L2924/01058 ,  H01L2924/01076 ,  H01L2924/01078 ,  H01L2924/01082 ,  H01L2924/014 ,  H01L2924/09701 ,  H01L2924/14 ,  H01L2924/19042 ,  H05K1/185 ,  H05K3/4602 ,  H05K2203/0165 ,  H05K2203/085 ,  H05K2203/1469 ,  Y02P90/30 ,  Y10T29/4913 ,  Y10T29/49133 ,  Y10T29/49165 ,  Y10T29/53183 ,  H01L2224/45099

Abstract: A monitoring system for monitoring fluid in a fluid supply vessel during operation including dispensing of fluid from the fluid supply vessel. The monitoring system includes (i) one or more sensors for monitoring a characteristic of the fluid supply vessel or the fluid dispensed therefrom, (ii) a data acquisition module operatively coupled to the one or more sensors to receive monitoring data therefrom and responsively generate an output correlative to the characteristic monitored by the one or more sensors, and (iii) a processor and display operatively coupled with the data acquisition module and arranged to process the output from the data acquisition module and responsively output a graphical representation of fluid in the fluid supply vessel, billing documents, usage reports, and/or resupply requests.

Abstract translation: 一种用于在操作期间监测流体供应容器中的流体的监测系统，包括从流体供应容器分配流体。 监测系统包括（i）用于监测流体供应容器或从其分配的流体的特性的一个或多个传感器，（ii）可操作地耦合到所述一个或多个传感器以从其接收监测数据的数据采集模块，并且响应地生成 输出与由一个或多个传感器监测的特性相关联，以及（iii）处理器和显示器，其与数据采集模块可操作地耦合并被布置成处理来自数据采集模块的输出并且响应地输出流体在流体中的图形表示 供应船，记帐单，使用报告和/或补货请求。

公开(公告)号：US20150306537A1

公开(公告)日：2015-10-29

申请号：US14746776

申请日：2015-06-22

Applicant: Entegris, Inc.

Inventor： Dennis Brestovansky ,  Michael J. Wodjenski ,  Jose I. Arno ,  J. Donald Carruthers ,  Philip A. Moroco

IPC: B01D53/053 ,  F17C11/00 ,  F17C13/08

CPC classification number: B01D53/053 ,  B01D53/0407 ,  B01D2253/102 ,  B01D2253/304 ,  B01D2253/342 ,  B01D2257/40 ,  B01D2257/704 ,  B01D2257/706 ,  B01D2257/93 ,  B01D2258/0216 ,  B01D2259/4525 ,  F17C11/00 ,  F17C13/084 ,  F17C2201/0157 ,  F17C2205/0103 ,  F17C2205/0338 ,  F17C2205/0391 ,  F17C2270/0518 ,  Y02E60/321 ,  Y10T137/0318

Abstract: A fluid storage and dispensing apparatus including a fluid storage and dispensing vessel having a rectangular parallelepiped shape, and an integrated gas cabinet assembly including such fluid storage and dispensing apparatus and/or a point-of-use ventilation gas scrubber in the vented gas cabinet. By the use of physical adsorbent and chemical sorbent media, the gas cabinet can be enhanced in safety of operation, e.g., where the process gas supplied from the gas cabinet is of a toxic or otherwise hazardous character.

公开(公告)号：US09126139B2

公开(公告)日：2015-09-08

申请号：US13904988

申请日：2013-05-29

Applicant: Entegris, Inc.

Inventor： Shaun M. Wilson ,  Edward A. Sturm ,  Michael J. Wodjenski ,  J. Donald Carruthers ,  Joshua B. Sweeney

IPC: B01D53/04 ,  B01J20/20 ,  B01J20/30 ,  B01J20/34 ,  B01J20/28 ,  B01D53/02 ,  C12M1/00

CPC classification number: B01D53/04 ,  B01D53/02 ,  B01D2253/102 ,  B01D2257/304 ,  B01D2258/05 ,  B01J20/20 ,  B01J20/28011 ,  B01J20/3078 ,  B01J20/3416 ,  C12M47/18 ,  Y02C20/20

Abstract: A durable carbon pyrolyzate adsorbent having reversible sorptive affinity for hydrogen sulfide, and including the following characteristics: (a) a bulk density as measured by ASTM D2854 in a range of from 0.55 g/cc adsorbent to 1.25 g/cc adsorbent; (b) an H2S capacity in a range of from 140 cc H2S/g adsorbent to 250 cc H2S/g adsorbent, at normal conditions (1 atm, 293.15° K); (c) an H2S capacity in a range of from 1.0 cc H2S/g adsorbent to 15.0 cc H2S/g adsorbent, at partial pressure of 0.76 torr (101.3 Pa) (1000 ppm) of H2S at 293.15° K; and (d) a single pellet radial crush strength in a range of from 7 kilopond (kP) to 40 kilopond (kP) as measured by ASTM D4179. Such adsorbent is usefully employed for capture of hydrogen sulfide from gases containing same, such as H2S-containing gas associated with flowable hydrocarbonaceous material in refining operations, biogas produced by biomass digesters, gas mixtures produced by fluid catalytic cracking (FCC) units, and effluents from power plants gasifying sulfur-containing coal in an integrated gasification combined cycle (IGCC) process.

Abstract translation: 具有对硫化氢具有可逆吸附亲和力的耐久碳热解物吸附剂，并且包括以下特征：（a）通过ASTM D2854测量的在0.55g / cc吸附剂至1.25g / cc吸附剂范围内的堆积密度; （b）在正常条件（1大气压，293.15°K）下，在140cc H2S / g吸附剂至250cc H2S / g吸附剂的范围内的H2S容量; （c）在293.15°K的0.76乇（101.3Pa）（1000ppm）的H 2 S的分压下，在1.0cc H 2 S / g吸附剂至15.0cc H 2 S / g吸附剂的范围内的H 2 S容量; 和（d）通过ASTM D4179测量的单个颗粒径向压实强度在7千帕（kP）至40千碱基（kP）的范围内。 这种吸附剂有用地用于从含有其的气体中捕获硫化氢，例如在精炼操作中与可流动的烃类材料相关的含H 2 S的气体，由生物质消化器产生的沼气，由流化催化裂化（FCC）单元产生的气体混合物，以及流出物 来自发电厂在一体化气化联合循环（IGCC）过程中气化含硫煤。

公开(公告)号：US20150308626A1

公开(公告)日：2015-10-29

申请号：US14796723

申请日：2015-07-10

Applicant: Entegris, Inc.

Inventor： Joseph D. Sweeney ,  Anthony M. Avila ,  Michael J. Wodjenski ,  Joseph R. Despres ,  Thomas H. Baum

IPC: F17D3/01

CPC classification number: F17D3/01 ,  F17D3/00 ,  G05D7/0635 ,  H01J37/3171 ,  H01J2237/006 ,  H01J2237/30466 ,  H01L21/67017 ,  H01L21/67253 ,  Y10T137/0324 ,  Y10T137/86389

Abstract: Apparatus and method for determining endpoint of a fluid supply vessel in which fluid flow is controlled through a flow passage disposed in an interior volume of the fluid supply vessel with a static flow restricting device and a selectively actuatable valve element upon establishing fluid flow. The endpoint determination can be employed to terminate fluid supply from the fluid supply vessel and/or to switch from a fluid-depleted supply vessel to a fresh vessel for continuity or renewal of fluid supply operation. The apparatus and method are suitable for use with fluid-utilizing apparatus such as ion implanters.

Abstract translation: 用于确定流体供应容器的端点的装置和方法，其中通过设置在流体供应容器的内部容积中的流动通道具有静态流动限制装置和在建立流体流动时可选择性致动的阀元件来控制流体流动。 端点确定可以用于终止从流体供应容器供应的流体和/或从流体耗尽的供应容器切换到新鲜的容器，以便连续或更新流体供应操作。 该装置和方法适用于诸如离子注入机之类的流体利用装置。

公开(公告)号：US09170246B2

公开(公告)日：2015-10-27

申请号：US14054497

申请日：2013-10-15

Applicant: Entegris, Inc.

Inventor： James Dietz ,  Steven E. Bishop ,  James V. McManus ,  Steven M. Lurcott ,  Michael J. Wodjenski ,  Robert Kaim ,  Frank DiMeo, Jr.

IPC: G01D1/00 ,  G01N33/00 ,  H01L23/538 ,  H01L23/00 ,  H01L21/683 ,  H01L25/03 ,  H01L25/16 ,  H05K1/18 ,  G01F23/00 ,  H01L21/56 ,  H01L25/065 ,  H05K3/46

CPC classification number: G01N33/00 ,  F17C11/00 ,  G01F15/063 ,  G01F22/02 ,  G01F23/0076 ,  G01M3/32 ,  G01M3/3236 ,  G06Q10/087 ,  G06Q30/04 ,  G06Q50/04 ,  H01L21/561 ,  H01L21/568 ,  H01L21/6835 ,  H01L22/10 ,  H01L23/5389 ,  H01L24/24 ,  H01L24/48 ,  H01L24/82 ,  H01L25/03 ,  H01L25/0652 ,  H01L25/16 ,  H01L2224/16225 ,  H01L2224/16227 ,  H01L2224/24011 ,  H01L2224/2518 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2924/00014 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01023 ,  H01L2924/01027 ,  H01L2924/01033 ,  H01L2924/01058 ,  H01L2924/01076 ,  H01L2924/01078 ,  H01L2924/01082 ,  H01L2924/014 ,  H01L2924/09701 ,  H01L2924/14 ,  H01L2924/19042 ,  H05K1/185 ,  H05K3/4602 ,  H05K2203/0165 ,  H05K2203/085 ,  H05K2203/1469 ,  Y02P90/30 ,  Y10T29/4913 ,  Y10T29/49133 ,  Y10T29/49165 ,  Y10T29/53183 ,  H01L2224/45099

Abstract: A monitoring system for monitoring fluid in a fluid supply vessel during operation including dispensing of fluid from the fluid supply vessel. The monitoring system includes (i) one or more sensors for monitoring a characteristic of the fluid supply vessel or the fluid dispensed therefrom, (ii) a data acquisition module operatively coupled to the one or more sensors to receive monitoring data therefrom and responsively generate an output correlative to the characteristic monitored by the one or more sensors, and (iii) a processor and display operatively coupled with the data acquisition module and arranged to process the output from the data acquisition module and responsively output a graphical representation of fluid in the fluid supply vessel, billing documents, usage reports, and/or resupply requests.

Abstract translation: 一种用于在操作期间监测流体供应容器中的流体的监测系统，包括从流体供应容器分配流体。 监测系统包括（i）用于监测流体供应容器或从其分配的流体的特性的一个或多个传感器，（ii）可操作地耦合到所述一个或多个传感器以从其接收监测数据的数据采集模块，并且响应地生成 输出与由一个或多个传感器监测的特性相关联，以及（iii）处理器和显示器，其与数据采集模块可操作地耦合并被布置成处理来自数据采集模块的输出并且响应地输出流体在流体中的图形表示 供应船，记帐单，使用报告和/或补货请求。

公开(公告)号：US09636626B2

公开(公告)日：2017-05-02

申请号：US14746776

申请日：2015-06-22

Applicant: Entegris, Inc. ,  Judith A. Moroco

Inventor： Dennis Brestovansky ,  Michael J. Wodjenski ,  Jose I. Arno ,  J. Donald Carruthers ,  Philip A. Moroco

IPC: B01D53/04 ,  F17C11/00 ,  B01D53/053 ,  F17C13/08

CPC classification number: B01D53/053 ,  B01D53/0407 ,  B01D2253/102 ,  B01D2253/304 ,  B01D2253/342 ,  B01D2257/40 ,  B01D2257/704 ,  B01D2257/706 ,  B01D2257/93 ,  B01D2258/0216 ,  B01D2259/4525 ,  F17C11/00 ,  F17C13/084 ,  F17C2201/0157 ,  F17C2205/0103 ,  F17C2205/0338 ,  F17C2205/0391 ,  F17C2270/0518 ,  Y02E60/321 ,  Y10T137/0318

Abstract: A fluid storage and dispensing apparatus including a fluid storage and dispensing vessel having a rectangular parallelepiped shape, and an integrated gas cabinet assembly including such fluid storage and dispensing apparatus and/or a point-of-use ventilation gas scrubber in the vented gas cabinet. By the use of physical adsorbent and chemical sorbent media, the gas cabinet can be enhanced in safety of operation, e.g., where the process gas supplied from the gas cabinet is of a toxic or otherwise hazardous character.

公开(公告)号：US09631778B2

公开(公告)日：2017-04-25

申请号：US14796723

申请日：2015-07-10

Applicant: Entegris, Inc.

Inventor： Joseph D. Sweeney ,  Anthony M. Avila ,  Michael J. Wodjenski ,  Joseph R. Despres ,  Thomas H. Baum

IPC: F17D3/00 ,  H01L21/67 ,  F17D3/01 ,  G05D7/06 ,  H01J37/317

CPC classification number: F17D3/01 ,  F17D3/00 ,  G05D7/0635 ,  H01J37/3171 ,  H01J2237/006 ,  H01J2237/30466 ,  H01L21/67017 ,  H01L21/67253 ,  Y10T137/0324 ,  Y10T137/86389

Abstract: Apparatus and method for determining endpoint of a fluid supply vessel in which fluid flow is controlled through a flow passage disposed in an interior volume of the fluid supply vessel with a static flow restricting device and a selectively actuatable valve element upon establishing fluid flow. The endpoint determination can be employed to terminate fluid supply from the fluid supply vessel and/or to switch from a fluid-depleted supply vessel to a fresh vessel for continuity or renewal of fluid supply operation. The apparatus and method are suitable for use with fluid-utilizing apparatus such as ion implanters.

公开(公告)号：US20140329025A1

公开(公告)日：2014-11-06

申请号：US14335897

申请日：2014-07-19

Applicant: Entegris, Inc.

Inventor： John M. Cleary ,  Jose I. Arno ,  Bryan C. Hendrix ,  Donn Naito ,  Scott Battle ,  John N. Gregg ,  Michael J. Wodjenski ,  Chongying Xu

IPC: C23C16/448 ,  C23C16/455 ,  C23C14/48

CPC classification number: C23C16/4481 ,  C23C14/48 ,  C23C16/08 ,  C23C16/16 ,  C23C16/18 ,  C23C16/30 ,  C23C16/4402 ,  C23C16/45525 ,  C23C16/45544

Abstract: Apparatus and method for volatilizing a source reagent susceptible to particle generation or presence of particles in the corresponding source reagent vapor, in which such particle generation or presence is suppressed by structural or processing features of the vapor generation system. Such apparatus and method are applicable to liquid and solid source reagents, particularly solid source reagents such as metal halides, e.g., hafnium chloride. The source reagent in one specific implementation is constituted by a porous monolithic bulk form of the source reagent material. The apparatus and method of the invention are usefully employed to provide source reagent vapor for applications such as atomic layer deposition (ALD) and ion implantation.

Abstract translation: 挥发易于产生颗粒的源试剂的源试剂的装置和方法，其中通过蒸气发生系统的结构或加工特征抑制了这种颗粒产生或存在的相应源试剂蒸气。 这种装置和方法适用于液体和固体源试剂，特别是固体源试剂如金属卤化物，例如氯化铪。 一种具体实施方案中的源试剂由源试剂材料的多孔整体块形式构成。 本发明的装置和方法有用地用于提供用于例如原子层沉积（ALD）和离子注入的应用的源试剂蒸气。