公开(公告)号：US12031212B2

公开(公告)日：2024-07-09

申请号：US17230742

申请日：2021-04-14

Applicant: ENTEGRIS, INC.

Inventor： Carlo Waldfried ,  Stephen Longo ,  Parul Tyagi

IPC: C23C16/56 ,  C23C16/02 ,  C23C16/40 ,  C23C16/44 ,  C23C16/455 ,  H01L21/02

CPC classification number: C23C16/56 ,  C23C16/0272 ,  C23C16/405 ,  C23C16/4404 ,  C23C16/45525 ,  H01L21/02 ,  Y10T428/265 ,  Y10T428/31678

Abstract: Described are yttrium fluoride compositions, including deposited films, e.g., coatings, that contain yttrium fluoride; methods of preparing yttrium fluoride compositions and deposited film coatings that contain yttrium fluoride; as well as substrates that have a deposited film coating that contains yttrium fluoride at a surface and methods and equipment that include the substrates.