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公开(公告)号：US20200089121A1
公开(公告)日：2020-03-19
申请号：US16470709
申请日：2016-12-20
发明人： Bernhard Thallner , Boris Povazay
IPC分类号： G03F7/20
摘要： A method and device for exposing a light-sensitive layer, said method comprising: generating at least one light ray by use of at least one light source, illuminating pixels of an exposure pattern by use of at least one micromirror device having a plurality of micromirrors with respective mirror intensity profiles, and overlaying the mirror intensity profiles of adjacent micromirrors to provide a pattern intensity profile of the exposure pattern by summing the mirror intensity profiles of each illuminated pixel of the exposure pattern.
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公开(公告)号：US20190293924A1
公开(公告)日：2019-09-26
申请号：US16464838
申请日：2016-12-20
发明人： Bernhard Thallner , Boris Povazay
摘要： A method for exposing a light-sensitive layer to light using an optical system, wherein at least one light beam is generated by respectively at least one light source and pixels of an exposure pattern grid are illuminated by at least one micro-mirror device with a plurality of micro-mirrors. An affine distortion takes place, in particular a shearing, of the exposure pattern grid.
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公开(公告)号：US11681228B2
公开(公告)日：2023-06-20
申请号：US16973578
申请日：2018-06-19
发明人： Bernhard Thallner , Boris Povazay
CPC分类号： G03F7/704 , G03F7/2051 , G03F7/70283 , G03F7/70291 , G03F7/70358 , G03F7/70466 , G03F7/70558
摘要： A method for the exposure of image points of a photosensitive layer comprising a photosensitive material on a substrate by means of an optical system. The method including continuously moving the image points with respect to the optical system; and controlling a plurality of secondary beams by means of the optical system individually for individual exposures of each image point, whereby the secondary beams are put either into an ON state or into an OFF state, wherein a) secondary beams in the ON state produce an individual exposure of the image point assigned to the respective secondary beam and b) secondary beams in the OFF state do not produce any individual exposure of the image point assigned to the respective secondary beam; wherein, for the generation of image points with grey tones n>1, individual exposures are carried out by different secondary beams with individual doses D.
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公开(公告)号：US20230251580A1
公开(公告)日：2023-08-10
申请号：US18008739
申请日：2020-07-06
CPC分类号： G03F7/70466 , G03F7/0957
摘要： The invention relates to a method and a device for the exposure of a photosensitive coating.
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公开(公告)号：US11460777B2
公开(公告)日：2022-10-04
申请号：US16470709
申请日：2016-12-20
发明人： Bernhard Thallner , Boris Povazay
IPC分类号： G03F7/20
摘要： A method and device for exposing a light-sensitive layer, said method comprising: generating at least one light ray by use of at least one light source, illuminating pixels of an exposure pattern by use of at least one micromirror device having a plurality of micromirrors with respective mirror intensity profiles, and overlaying the mirror intensity profiles of adjacent micromirrors to provide a pattern intensity profile of the exposure pattern by summing the mirror intensity profiles of each illuminated pixel of the exposure pattern.
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公开(公告)号：US10852528B2
公开(公告)日：2020-12-01
申请号：US16464838
申请日：2016-12-20
发明人： Bernhard Thallner , Boris Povazay
摘要： A method for exposing a light-sensitive layer to light using an optical system, wherein at least one light beam is generated by respectively at least one light source and pixels of an exposure pattern grid are illuminated by at least one micro-mirror device with a plurality of micro-mirrors. An affine distortion takes place, in particular a shearing, of the exposure pattern grid.
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