公开(公告)号：US11933284B2

公开(公告)日：2024-03-19

申请号：US17297807

申请日：2019-11-27

Applicant: Edwards Limited

Inventor： Nigel Paul Schofield ,  Christopher Mark Bailey ,  Michael Andrew Galtry ,  Andrew David Mann

IPC: F04B37/14 ,  F04B41/06 ,  F04B49/00 ,  F04D13/12 ,  F04D19/04 ,  F04D25/16 ,  F04D27/00

CPC classification number: F04B37/14 ,  F04B41/06 ,  F04B49/007 ,  F04D13/12 ,  F04D19/042 ,  F04D25/16 ,  F04D27/005

Abstract: A vacuum exhaust system includes a plurality of turbo pumps that evacuate a plurality of vacuum chambers. A plurality of chamber valves are positioned between the turbo pumps and the plurality of vacuum chambers. A plurality of branch channels are each connected to a corresponding exhaust of the plurality of turbo pumps and a main channel is formed from a confluence of the branch channels. A booster vacuum pump is connected to the main channel. A backing vacuum pump is connected to an exhaust of the booster vacuum pump. A plurality of bypass channels, each having a valve, provide a fluid communication path between at least some of the plurality of vacuum chambers and the booster vacuum pump.

公开(公告)号：US20220010788A1

公开(公告)日：2022-01-13

申请号：US17297807

申请日：2019-11-27

Applicant: Edwards Limited

Inventor： Nigel Paul Schofield ,  Christopher Mark Bailey ,  Michael Andrew Galtry ,  Andrew David Mann

IPC: F04B37/14 ,  F04B41/06 ,  F04B49/00 ,  F04D19/04 ,  F04D25/16 ,  F04D27/00

Abstract: A vacuum exhaust system includes a plurality of low pressure vacuum pumps that operate in a molecular flow region and evacuate a plurality of vacuum chambers. A plurality of chamber valves are positioned between the low pressure vacuum pumps and the plurality of vacuum chambers. A plurality of branch channels are each connected to a corresponding exhaust of the plurality of low pressure vacuum pumps and a main channel is formed from a confluence of the branch channels. An intermediate vacuum pump is connected to the main channel and operates in a viscous flow region. A higher pressure vacuum pump operates in a higher pressure viscous flow region and is connected to an exhaust of the intermediate pressure vacuum pump. A plurality of bypass channels, each having a valve, provide a fluid communication path between at least some of the plurality of vacuum chambers and a higher pressure vacuum pump.