METHOD AND SYSTEM FOR OPTIMIZING PARAMETER INTERVALS OF MANUFACTURING PROCESSES BASED ON PREDICTION INTERVALS

    公开(公告)号:US20230140696A1

    公开(公告)日:2023-05-04

    申请号:US17902048

    申请日:2022-09-02

    Abstract: Provided is a method of optimizing parameter intervals of manufacturing processes based on prediction intervals. The method includes: collecting process data by applying an experiment design method to a target process; training a second-order polynomial regression model based on the collected process data; estimating importance values of each input variable with respect to each output variable using the second-order polynomial regression model; defining an objective function for process optimization based on the second-order polynomial regression model; optimizing each parameter value by applying an optimization algorithm to the defined objective function; and optimizing each parameter interval including the optimized parameter value in an input space using the prediction interval of the second-order polynomial regression model.

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