Semiconductor Device and Method of Manufacturing Such a Device
    1.
    发明申请
    Semiconductor Device and Method of Manufacturing Such a Device 有权
    半导体器件及其制造方法

    公开(公告)号:US20090166753A1

    公开(公告)日:2009-07-02

    申请号:US12304506

    申请日:2007-06-12

    IPC分类号: H01L27/06 H01L21/8249

    摘要: The invention relates to a semiconductor device (10) with a substrate (11) and a semiconductor body (1) comprising a bipolar transistor with in that order a collector region (2), a base region (3), and an emitter region (4), wherein the semiconductor body comprises a projecting mesa (5) comprising at least a portion of the collector region (2) and the base region (3), which mesa is surrounded by an isolation region (6). According to the invention, the semiconductor device (10) also comprises a field effect transistor with a source region, a drain region, an interposed channel region, a superimposed gate dielectric (7), and a gate region (8), which gate region (8) forms a highest part of the field effect transistor, and the height of the mesa (5) is greater than the height of the gate region (8). This device can be manufactured inexpensively and easily by a method according to the invention, and the bipolar transistor can have excellent high-frequency characteristics.

    摘要翻译: 本发明涉及具有基板(11)和半导体本体(1)的半导体器件(10),该半导体器件(1)包括双极晶体管,依次具有集电极区域(2),基极区域(3)和发射极区域 4),其中半导体主体包括包括集电极区域(2)和基极区域(3)的至少一部分的突出台面(5),该台面由隔离区域(6)包围。 根据本发明,半导体器件(10)还包括具有源极区域,漏极区域,插入沟道区域,叠加栅极电介质(7)和栅极区域(8)的场效应晶体管,该栅极区域 (8)形成场效应晶体管的最高部分,台面(5)的高度大于栅极区域(8)的高度。 该装置可以通过根据本发明的方法廉价且容易地制造,并且双极晶体管可以具有优异的高频特性。

    Semiconductor device and method of manufacturing such a device
    2.
    发明授权
    Semiconductor device and method of manufacturing such a device 有权
    半导体装置及其制造方法

    公开(公告)号:US08373236B2

    公开(公告)日:2013-02-12

    申请号:US12304506

    申请日:2007-06-12

    IPC分类号: H01L27/06

    摘要: The invention relates to a semiconductor device (10) with a substrate (11) and a semiconductor body (1) comprising a bipolar transistor with in that order a collector region (2), a base region (3), and an emitter region (4), wherein the semiconductor body comprises a projecting mesa (5) comprising at least a portion of the collector region (2) and the base region (3), which mesa is surrounded by an isolation region (6). According to the invention, the semiconductor device (10) also comprises a field effect transistor with a source region, a drain region, an interposed channel region, a superimposed gate dielectric (7), and a gate region (8), which gate region (8) forms a highest part of the field effect transistor, and the height of the mesa (5) is greater than the height of the gate region (8). This device can be manufactured inexpensively and easily by a method according to the invention, and the bipolar transistor can have excellent high-frequency characteristics.

    摘要翻译: 本发明涉及具有基板(11)和半导体本体(1)的半导体器件(10),该半导体器件(1)包括双极晶体管,依次具有集电极区域(2),基极区域(3)和发射极区域 4),其中半导体主体包括包括集电极区域(2)和基极区域(3)的至少一部分的突出台面(5),该台面由隔离区域(6)包围。 根据本发明,半导体器件(10)还包括具有源极区域,漏极区域,插入沟道区域,叠加栅极电介质(7)和栅极区域(8)的场效应晶体管,该栅极区域 (8)形成场效应晶体管的最高部分,台面(5)的高度大于栅极区域(8)的高度。 该装置可以通过根据本发明的方法廉价且容易地制造,并且双极晶体管可以具有优异的高频特性。